US4781764A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of removing undesired particles from a surface of a substrate
Assignee: US Philips Corp
•
Filing: 1987-07-21
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Granted: 1988-11-01
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Expires: 2007-07-21
Abstract
Abstract A method of removing articles having a diameter which is smaller than 0.3 mu m from a surface of a substrate, the method comprising moving an interface of the liquid over the surface of the substrate at a speed of up to 10 cm/sec. This is of great importance in the manufacture of integrated circuits with submicron details, in which contamination with such particles may have destructive consequences for the satisfactory operation of the circuit.
Inventors
- 👤 Adriaan F. M. Leenaars
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 18:35
CPC Classifications
H; H10; H10P; H10P52/00; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0416; B; B08; B08B; B08B3/00; B08B7/00; B08B7/0035; B08B7/0042
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
57 words
A method of removing undesired particles up to 0.3 micrometers in size from a surface of a substrate, the method comprising moving an interface of the liquid over the surface of the substrate, characterized in that the interface of the liquid is moved over the surface of the substrate at a speed of at most 10 cm/sec.
Claim 2
Independent Claim
57 words
A method of removing undesired particles up to 0.3 micrometers in size from a surface of a substrate, the method comprising moving an interface of the liquid over the surface of the substrate, characterized in that the interface of the liquid is moved over the surface of the substrate at a speed of at most 10 cm/sec.
Claim 3
Dependent Claim
30 words
A method as claimed in claim 1, characterized in that the interface of the liquid is moved over the surface of the substrate by immersing the substrate into the liquid.
Claim 4
Dependent Claim
31 words
A method as claimed in claim 1 characterized in that the interface of the liquid is moved over the surface of the substrate by withdrawing the substrate out of the liquid.
Claim 5
Dependent Claim
39 words
A method as claimed in claim 1 characterized in that the interface of the liquid is the phase boundary with a gas bubble which is moved over the surface of the substrate, the substrate being immersed into the liquid.
Claim 6
Dependent Claim
57 words
A method as claimed in claim 4, characterized in that the gas bubble is a vapour bubble which is formed by irradiating the substrate immersed into the liquid with a beam of laser radiation, and in that the bubble is moved over the surface of the substrate by moving the beam of laser radiation over said surface.
Claim 7
Dependent Claim
48 words
A method as claimed in claim 1, characterized in that the surfaces of the substrate and of the undesired particles adhered thereto are previously treated with a surface-active substance, as a result of which the wettability of the surface of the substrate and of the particles are reduced.
Claim 8
Dependent Claim
29 words
A method as claimed in claim 6, characterized in that the surface-active substance is a substance chosen from a group of compounds consisting of silanes, alcohols and alkyl lithium.
References Cited (Backward Citations)
SU380754A1
Cited
US3664871A
Cited
FR2303612A1
Cited
US4178188A
Cited
US4169807A
Cited
US4238244A
Cited
US4375992A
Cited
WO1987000094A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-11-01 | 1992-05-02 | 1992-11-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-11-01 | 1996-05-02 | 1996-11-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-11-01 | 2000-05-02 | 2000-11-01 | $7700.00 | Window Closed / Lapsed |