Time-of-flight mass spectrometry

Claim 3

A method as claimed in claim 1 comprising: closing said gating means by deflecting said charged particles away from said entrance of said mass analyzer; and opening said gating means by allowing said charged particles to travel substantially towards said entrance of said mass analyzer.

Claim 4

A method as claimed in claim 1 comprising: closing said gating means by deflecting said charged particles away from said entrance of said mass analyzer; and opening said gating means by deflecting said charged particles substantially towards said entrance of said mass analyzer.

Claim 5

A method as claimed in claim 1 in which the end of said third time interval is when the most massive charged particle of interest, being of mass substantially equal to said mass limit, is recorded at said detector.

Claim 6

A time-of-flight mass spectrometer adapted for the analysis of charged particles up to a required mass limit comprising: (a) means for producing from a source, during a first time interval, a pulse comprising charged particles distributed over a range of masses; (b) a preliminary mass separating means, having a first entrance and an exit, said charged particles travelling between said first entrance and exit in a time, which for each of said charged particles, is dependent upon the mass of that charged particle; (c) a time-of-flight mass analyzer having a second entrance; (d) extraction means, disposed between said source and said preliminary mass separating means, which accelerates said charged particles from said source towards said first entrance of said preliminary mass separating means; (e) a gating means, disposed between said exit of said preliminary mass separating means and said second entrance of said time-of-flight mass analyzer; (f) means for controlling said gating means adapted to (i) close said gating means after a second time interval which, measured from the start of said first time interval, is sufficient for substantially all of said charged particles, produced during said first time interval and having mass less than or substantially equal to said mass limit, to travel from said source, through said preliminary mass separating means, to and through said gating means; and (ii) keep said gating means closed until the end of a third time interval, which measured from the start of said first time interval is at least as long as the time taken for substantially the most massive of said charged particles to travel from said source to said gating means, and to open said gating means at substantially the end of said third time interval; and (g) means for producing a plurality of said pulses successively, the time between the start of one pulse and the start of the next pulse being equal to a fourth time interval.

Claim 7

A time-of-flight mass spectrometer adapted for the analysis of charged particles up to a required mass limit comprising: (a) means for producing from a source, during a first time interval, a pulse comprising charged particles distributed over a range of masses; (b) a preliminary mass separating means, having a first entrance and an exit, said charged particles travelling between said first entrance and exit in a time, which for each of said charged particles, is dependent upon the mass of that charged particle; (c) a time-of-flight mass analyzer having a second entrance; (d) extraction means, disposed between said source and said preliminary mass separating means, which accelerates said charged particles from said source towards said first entrance of said preliminary mass separating means; (e) a gating means, disposed between said exit of said preliminary mass separating means and said second entrance of said time-of-flight mass analyzer; (f) means for controlling said gating means adapted to (i) close said gating means after a second time interval which, measured from the start of said first time interval, is sufficient for substantially all of said charged particles, produced during said first time interval and having mass less than or substantially equal to said mass limit, to travel from said source, through said preliminary mass separating means, to and through said gating means; and (ii) keep said gating means closed until the end of a third time interval, which measured from the start of said first time interval is at least as long as the time taken for substantially the most massive of said charged particles to travel from said source to said gating means, and to open said gating means at substantially the end of said third time interval; and (g) means for producing a plurality of said pulses successively, the time between the start of one pulse and the start of the next pulse being equal to a fourth time interval.

Claim 8

A spectrometer as claimed in claim 5 wherein said preliminary mass separating means comprises a drift region, substantially free of electrostatic fields.

Claim 9

A spectrometer as claimed in claim 5 wherein said preliminary mass separating means comprises a region in which there is at least one electrostatic field.

Claim 10

A spectrometer as claimed in claim 5 wherein said gating means comprises deflector plates and is opened by applying voltages to said deflector plates which allow said charged particles into said second entrance, of said mass analyzer, and is closed by applying voltages to said deflector plates which deflect charged particles away from said second entrance of said mass analyzer.

Claim 11

A spectrometer as claimed in claim 8 wherein said gating means is opened by earthing said deflector plates.

Claim 12

A spectrometer as claimed in claim 5 wherein said gating means comprises a repeller grid and may be closed by applying a repelling voltage to said repeller grid, thereby repelling said charged particles away from said second entrance of said mass analyzer.

Claim 13

A spectrometer as claimed in claim 5 wherein said gating means comprises at least one accelerating electrode, and may be closed by applying an accelerating voltage to accelerate said charged particles, giving them a kinetic energy outside the pass energy band of said mass analyzer.

Claim 14

A spectrometer as claimed in claim 5 wherein said extraction means provides a pulsed extraction field.

Claim 15

A spectrometer as claimed in claim 5 comprising means for irradiating said source with a pulsed beam of primary radiation.

Claim 16

A spectrometer as claimed in claim 5 wherein said source is a sample, having a surface; said spectrometer also comprising means for irradiating said surface with a pulsed beam of primary laser radiation, producing from said surface a pulsed beam of charged particles comprising, during said first time interval, said pulse of charged particles.

Claim 17

A spectrometer as claimed in claim 5 wherein said source is a sample, having a surface; said spectrometer also comprising means for irradiating said surface with a pulsed beam of primary ions, producing from said surface a pulsed beam of secondary charged particles, comprising, during said first time interval, said pulse of charged particles comprising secondary ions.

Claim 18

A spectrometer as claimed in claim 5 wherein said source is a sample, having a surface; said spectrometer also comprising means for ionizing neutral particles released from said surface, thereby producing during said first time interval said pulse of charged particles comprising ionized neutral particles.

Claim 19

A time-of-flight secondary ion mass spectrometer, adapted for the analysis of secondary ions up to a required mass limit and comprising: a sample having a surface, means for irradiating said surface with a pulsed primary radiation beam, causing said secondary ions to be emitted from said surface in pulses, means for extracting said secondary ions from said surface, a mass analyzer having an entrance, and a secondary ion detector; wherein the time during which one of said pulses of secondary ions is emitted from said surface is to be known as the first time interval; and also wherein said spectrometer is characterised by also comprising a preliminary mass separating means, deflector plates disposed between said preliminary mass separating means and said mass analyzer, and means for applying deflecting voltages to said deflector plates thereby, for each of said pulses to: (i) deflect said secondary ions away from said entrance of said mass analyzer after a second time interval which, measured from the start of said first time interval, is sufficient for substantially all of said secondary ions, produced during said first time interval and having mass less than or substantially equal to said mass limit, to travel from said surface, through said preliminary mass separating means, to and past said deflector plates, and to enter said mass analyzer; and to (ii) maintain said deflecting voltages on said deflector plates until the end of a third time interval, which measured from the start of said first time interval is at least as long as the time taken for substantially the most massive of said secondary ions to travel from said surface to said deflector plates, and to remove said deflecting voltages from said deflector plates at substantially the end of said third time interval; and wherein the time between the start of one pulse and the start of the next pulse of said secondary ions is equal to a fourth time interval.

Claim 20

A time-of-flight secondary ion mass spectrometer, adapted for the analysis of secondary ions up to a required mass limit and comprising: a sample having a surface, means for irradiating said surface with a pulsed primary radiation beam, causing said secondary ions to be emitted from said surface in pulses, means for extracting said secondary ions from said surface, a mass analyzer having an entrance, and a secondary ion detector; wherein the time during which one of said pulses of secondary ions is emitted from said surface is to be known as the first time interval; and also wherein said spectrometer is characterised by also comprising a preliminary mass separating means, deflector plates disposed between said preliminary mass separating means and said mass analyzer, and means for applying deflecting voltages to said deflector plates thereby, for each of said pulses to: (i) deflect said secondary ions away from said entrance of said mass analyzer after a second time interval which, measured from the start of said first time interval, is sufficient for substantially all of said secondary ions, produced during said first time interval and having mass less than or substantially equal to said mass limit, to travel from said surface, through said preliminary mass separating means, to and past said deflector plates, and to enter said mass analyzer; and to (ii) maintain said deflecting voltages on said deflector plates until the end of a third time interval, which measured from the start of said first time interval is at least as long as the time taken for substantially the most massive of said secondary ions to travel from said surface to said deflector plates, and to remove said deflecting voltages from said deflector plates at substantially the end of said third time interval; and wherein the time between the start of one pulse and the start of the next pulse of said secondary ions is equal to a fourth time interval.

Claim 21

A time-of-flight secondary ion mass spectrometer as claimed in claim 17 in which said end of said third time interval is when the most massive secondary ion of interest, being of mass substantially equal to said mass limit, has been detected, at said secondary ion detector, after passing through said mass analyzer.

Claim 22

A time-of-flight secondary ion mass spectrometer as claimed in claim 17 in which said preliminary mass separating means comprises a drift region substantially free of electric fields and substantially free of magnetic fields.

Claim 23

A time-of-flight secondary ion mass spectrometer as claimed in claim 17 wherein said pulsed primary radiation beam is a pulsed primary ion beam.

Claim 24

A time-of-flight secondary ion mass spectrometer, as claimed in claim 17 wherein said pulsed primary radiation beam is a pulsed primary laser beam.

Claim 25

A time-of-flight secondary ion mass spectrometer as claimed in claim 17 wherein said mass analyzer is an energy-focussing mass analyzer.