US4777641A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for alignment
Assignee: Hitachi Ltd
•
Filing: 1986-10-14
•
Granted: 1988-10-11
•
Expires: 2006-10-14
Abstract
Abstract A method and apparatus for alignment for use in X-ray exposure or the like wherein a mask is provided having a formation of an alignment pattern made up of at least one linear segment formed in a peripheral section of the mask and a wafer is provided having a formation of an alignment pattern formed in a same direction as the alignment pattern of the mask and made up of linear segments. An illuminating arrangement illuminates a light to the mask alignment pattern along a direction inclined to the alignment direction and the mask alignment pattern and the wafer alignment pattern are imaged and transformed into a video signal. An A/D converts the video signal into a digital signal and stores the digital signal in a memory. The digital video signal is read out from the memory and averaged in a mask alignment pattern by removing a shadow portion caused by the mask alignment pattern and additionally averaged in a wafer alignment pattern area with an averaged wafer alignment pattern signal and an averaged wafer alignment pattern signal being provided. Relative displacement between the mask and the wafer is detected from the averaged mask alignment pattern signal and the averaged wafer alignment pattern signal and the mask and wafer are aligned by moving at least one of the mask and wafer so that displacement between the mask and the wafer does not exist.
Inventors
- 👤 Akira Inagaki
- 👤 Yukio Kembo
- 👤 Ryuichi Funatsu
- 👤 Asahiro Kuni
- 👤 Keiichi Okamoto
- 👤 Yoshihiro Komeyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 01:12
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
219 words
A method of alignment comprising the steps of: preparing a mask which has a symmetrical formation of an alignment pattern made up of a plurality of linear segments formed in a peripheral section of said mask, and a wafer which has a formation of an alignment pattern formed in a same direction as of the alignment pattern of said mask and made up of linear segments; illuminating said mask alignment pattern along a direction inclined to said alignment direction using an illumination means; imaging said mask alignment pattern and said wafer alignment pattern using an imaging means and transforming the image into a video signal; converting the video signal into a digital signal using an A/D conversion circuit and storing the digital signal in a memory; reading out the digital video signal from said memory, and averaging the digital video signal in a mask alignment pattern area by removing a shadow portion caused by said mask alignment pattern, and further averaging the digital video signal in a wafer alignment pattern area; detecting a relative displacement between the mask and wafer from the averaged mask alignment pattern signal detected and averaged wafer alignment pattern signal detected; and aligning the mask and wafer by moving one of the mask and wafer so that the displacement between both members does not exist.
Claim 2
Independent Claim
219 words
A method of alignment comprising the steps of: preparing a mask which has a symmetrical formation of an alignment pattern made up of a plurality of linear segments formed in a peripheral section of said mask, and a wafer which has a formation of an alignment pattern formed in a same direction as of the alignment pattern of said mask and made up of linear segments; illuminating said mask alignment pattern along a direction inclined to said alignment direction using an illumination means; imaging said mask alignment pattern and said wafer alignment pattern using an imaging means and transforming the image into a video signal; converting the video signal into a digital signal using an A/D conversion circuit and storing the digital signal in a memory; reading out the digital video signal from said memory, and averaging the digital video signal in a mask alignment pattern area by removing a shadow portion caused by said mask alignment pattern, and further averaging the digital video signal in a wafer alignment pattern area; detecting a relative displacement between the mask and wafer from the averaged mask alignment pattern signal detected and averaged wafer alignment pattern signal detected; and aligning the mask and wafer by moving one of the mask and wafer so that the displacement between both members does not exist.
Claim 3
Independent Claim
248 words
An apparatus for alignment comprising: a mask which has a formation of an alignment pattern made up of at least one linear segment formed in a peripheral section of said mask; a wafer which has a formation of an alignment pattern formed in a same direction as the alignment pattern of said mask and made up of linear segments; illuminating means for illuminating a light to said mask alignment pattern along a direction inclined to an alignment direction; imaging means for imaging said mask alignment pattern and said wafer alignment pattern and transforming the image into a video signal; A/D conversion means for converting the video signal into a digital signal and for storing the digital signal in a memory; averaging means for reading out the digital video signal from said memory and for averaging the digital video signal in a mask alignment pattern area by removing a shadow portion caused by said mask alignment pattern so as to provide an averaged wafer alignmemt pattern signal, and further for averaging the digital video signal in a wafer alignment pattern area so as to provide an averaged wafer alignment signal; detecting means for detecting relative displacement between the mask and the wafer from the averaged mask alignment pattern signal and the averaged wafer alignment pattern signal; and aligning means for aligning the mask and the wafer by moving at least one of the mask and the wafer so that displacement between the mask and the wafer does not exist.
Claim 4
Independent Claim
248 words
An apparatus for alignment comprising: a mask which has a formation of an alignment pattern made up of at least one linear segment formed in a peripheral section of said mask; a wafer which has a formation of an alignment pattern formed in a same direction as the alignment pattern of said mask and made up of linear segments; illuminating means for illuminating a light to said mask alignment pattern along a direction inclined to an alignment direction; imaging means for imaging said mask alignment pattern and said wafer alignment pattern and transforming the image into a video signal; A/D conversion means for converting the video signal into a digital signal and for storing the digital signal in a memory; averaging means for reading out the digital video signal from said memory and for averaging the digital video signal in a mask alignment pattern area by removing a shadow portion caused by said mask alignment pattern so as to provide an averaged wafer alignmemt pattern signal, and further for averaging the digital video signal in a wafer alignment pattern area so as to provide an averaged wafer alignment signal; detecting means for detecting relative displacement between the mask and the wafer from the averaged mask alignment pattern signal and the averaged wafer alignment pattern signal; and aligning means for aligning the mask and the wafer by moving at least one of the mask and the wafer so that displacement between the mask and the wafer does not exist.
Claim 5
Dependent Claim
59 words
An alignment apparatus according to claim 2, wherein said averaging means comprises masking means for removing the shadow portion by masking for a digital video signal of the shadow portion in the digital video signal of the mask alignment pattern area in accordance with positional coordinates and summing means for averaging by summing each of the digital video signals.
Claim 6
Dependent Claim
39 words
An alignment apparatus according to claim 3, wherein said masking means is arranged such that the mask alignment pattern imaged by said imaging means is positioned to predetermined coordinates by finely moving a mask table for holding the mask.
Claim 7
Dependent Claim
16 words
An alignment apparatus according to claim 3, wherein said aligning means comprises an X-ray exposure system.
References Cited (Backward Citations)
US4127777A
Cited
DE2723902A1
Cited
US4203123A
Cited
DE2803653A1
Cited
DE2822269A1
Cited
US4326805A
Cited
EP0107820A2
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-10-11 | 1992-04-11 | 1992-10-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-10-11 | 1996-04-11 | 1996-10-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-10-11 | 2000-04-11 | 2000-10-11 | $7700.00 | Window Closed / Lapsed |