US4776693A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Foreign substance inspecting system including a calibration standard
Assignee: Nikon Corp
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Filing: 1987-11-12
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Granted: 1988-10-11
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Expires: 2007-11-12
Abstract
Abstract A system for placing thereron an object to be inspected, scanning the surface of the object to be inspected by a light spot and inspecting a foreign substance on the basis of light information produced by the foreign substance on the surface of the object to be inspected includes light information producing means including a member for producing light information substantially similar to the light information produced by the foreign substance, and means for disposing the member on a surface substantially identical to the surface of the object to be inspected placed on the system.
Inventors
- 👤 Kazunori Imamura
- 👤 Akikazu Tanimoto
- 👤 Yukio Kakizaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 22:36
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/94
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
299 words
An apparatus for inspecting a foreign substance on a surface of an object to be inspected, said apparatus comprising: (a) disposing means for disposing said object on a predetermined area of said disposing means with the surface of said object substantially in a predetermined plane; (b) scanning means for generating a radiation beam, focusing a spot of said radiation beam on said predetermined plane, and scanning the surface of said object disposed on said disposing means with said radiation beam, said foreign substance scattering radiation from said radiation beam; (c) a device including a transmitting member scanned by said radiation beam and transmitting radiation from said radiation beam therethrough, intercepting means disposed on one surface of said transmitting member at one side thereof for intercepting said radiation beam, and a scattering portion disposed on another surface of said transmitting member at an opposite side thereof with respect to said one surface, said transmitting member being mounted on an area of said disposing means different from said predetermined area with said one surface substantially in said predetermined plane, said intercepting means permitting radiation from said radiation beam to transmit through a spatial interval on said one surface of said transmitting member, said spatial interval having a width narrower than the width of said radiation beam in a scanning direction of said scanning means, said scattering portion receiving radiation from said radiation beam passed through said spatial interval, scattering the received radiation, and producing a quantity of scattered radiation which is substantially similar to the quantity of the radiation scattered by said foreign substance; (d) detecting means for detecting the scattered radiation and producing a detection signal; and (e) control means for adjusting said detecting means in response to the detection signal produced by the radiation scattered by said scattering portion.
Claim 2
Independent Claim
299 words
An apparatus for inspecting a foreign substance on a surface of an object to be inspected, said apparatus comprising: (a) disposing means for disposing said object on a predetermined area of said disposing means with the surface of said object substantially in a predetermined plane; (b) scanning means for generating a radiation beam, focusing a spot of said radiation beam on said predetermined plane, and scanning the surface of said object disposed on said disposing means with said radiation beam, said foreign substance scattering radiation from said radiation beam; (c) a device including a transmitting member scanned by said radiation beam and transmitting radiation from said radiation beam therethrough, intercepting means disposed on one surface of said transmitting member at one side thereof for intercepting said radiation beam, and a scattering portion disposed on another surface of said transmitting member at an opposite side thereof with respect to said one surface, said transmitting member being mounted on an area of said disposing means different from said predetermined area with said one surface substantially in said predetermined plane, said intercepting means permitting radiation from said radiation beam to transmit through a spatial interval on said one surface of said transmitting member, said spatial interval having a width narrower than the width of said radiation beam in a scanning direction of said scanning means, said scattering portion receiving radiation from said radiation beam passed through said spatial interval, scattering the received radiation, and producing a quantity of scattered radiation which is substantially similar to the quantity of the radiation scattered by said foreign substance; (d) detecting means for detecting the scattered radiation and producing a detection signal; and (e) control means for adjusting said detecting means in response to the detection signal produced by the radiation scattered by said scattering portion.
Claim 3
Dependent Claim
36 words
An apparatus according to claim 1, wherein said intercepting means has two intercepting members that are spaced along said scanning direction so that said spatial interval is formed, and wherein said transmitting member is a plate.
Claim 4
Dependent Claim
26 words
An apparatus according to claim 2, wherein said scattering portion is shifted relative to said two intercepting members along a direction perpendicular to said scanning direction.
Claim 5
Dependent Claim
44 words
An apparatus according to claim 3, wherein said detecting means has comparing means for comparing said detection signal with a predetermined level, and said control means changes said predetermined level in response to the detection signal produced by radiation scattered by said scattering portion.
Claim 6
Independent Claim
295 words
An apparatus for inspecting a foreign substance on a surface of an object to be inspected, said apparatus comprising: (a) disposing means for disposing said object on a predetermined area of said disposing means with the surface of said object substantially in a predetermined plane; (b) scanning means for generating a radiation beam focusing a spot of said radiation beam on said predetermined plane, and scanning the surface of said object disposed on said disposing means with said radiation beam, said foreign substance scattering radiation from said radiation beam; (c) a device including a transmitting member scanned by said radiation beam and transmitting radiation from said radiation beam therethrough, intercepting means disposed on one surface of said transmitting member at one side thereof for intercepting said radiation beam, and a scattering portion disposed on another surface of said transmitting member at an opposite side thereof with respect to said one surface, said transmitting member being disposed by said disposing means on said predetermined area with said one surface substantially in said predetermined plane, said intercepting means permitting radiation from said radition beam to transmit through a spatial interval on said one surface of said transmitting member, said spatial interval having a width narrower than the width of said radiation beam in a scanning direction of said scanning means, said scattering portion receiving radiation from said radiation beam passed through said spatial interval, scattering the received radiation, and producing a quantity of scattered radiation which is substantially similar to the quantity of the radiation scattered by said foreign substance; (d) detecting means for detecting the scattered radiation and producing a detection signal; and (e) control means for adjusting said detecting means in response to the detection signal produced by the radiation scattered by said scattering portion.
Claim 7
Independent Claim
295 words
An apparatus for inspecting a foreign substance on a surface of an object to be inspected, said apparatus comprising: (a) disposing means for disposing said object on a predetermined area of said disposing means with the surface of said object substantially in a predetermined plane; (b) scanning means for generating a radiation beam focusing a spot of said radiation beam on said predetermined plane, and scanning the surface of said object disposed on said disposing means with said radiation beam, said foreign substance scattering radiation from said radiation beam; (c) a device including a transmitting member scanned by said radiation beam and transmitting radiation from said radiation beam therethrough, intercepting means disposed on one surface of said transmitting member at one side thereof for intercepting said radiation beam, and a scattering portion disposed on another surface of said transmitting member at an opposite side thereof with respect to said one surface, said transmitting member being disposed by said disposing means on said predetermined area with said one surface substantially in said predetermined plane, said intercepting means permitting radiation from said radition beam to transmit through a spatial interval on said one surface of said transmitting member, said spatial interval having a width narrower than the width of said radiation beam in a scanning direction of said scanning means, said scattering portion receiving radiation from said radiation beam passed through said spatial interval, scattering the received radiation, and producing a quantity of scattered radiation which is substantially similar to the quantity of the radiation scattered by said foreign substance; (d) detecting means for detecting the scattered radiation and producing a detection signal; and (e) control means for adjusting said detecting means in response to the detection signal produced by the radiation scattered by said scattering portion.
Claim 8
Dependent Claim
36 words
An apparatus according to claim 5, wherein said intercepting means has two intercepting members that are spaced along said scanning direction so that said spatial interval is formed, and wherein said transmitting member is a plate.
Claim 9
Dependent Claim
26 words
An apparatus according to claim 6, wherein said scattering portion is shifted relative to said two intercepting members along a direction perpendicular to said scanning direction.
Claim 10
Dependent Claim
44 words
An apparatus according to claim 7, wherein said detecting means has comparing means for comparing said detection signal with a predetermined level, and said control means changes said predetermined level in response to the detection signal produced by radiation scattered by said scattering portion.
References Cited (Backward Citations)
US4386850A
Cited
US4468120A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-10-11 | 1992-04-11 | 1992-10-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-10-11 | 1996-04-11 | 1996-10-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-10-11 | 2000-04-11 | 2000-10-11 | $7700.00 | Window Closed / Lapsed |