Pressure sensing device

Claim 2

A pressure sensing device comprising: a housing assembly having a chamber defined therein; at least one diaphragm formed of a metal sheet obtained by rapidly quenching a molten metal and having the modulus of longitudinal elasticity, E, of 2,000 to 15,000 Kg/mm 2 and dividing the chamber of the housing assembly into a first liquid chamber supplied with a measuring fluid and a second liquid chamber sealing a pressure transmission fluid therein, whereby pressure within the first fluid chamber is transmitted into the second fluid chamber through the diaphragm; said metal sheet forming said diaphragm being made of an amorphous alloy having a composition represented by: (M.sub.1-x T.sub.x).sub.100-m z.sub.m ( 1) where M: at least one kind selected from the group consisting of Fe, Co and Ni; T: at least one kind selected from the group consisting from Ti, Zr, Hf, V, Nb, Ta, Cu, Cr, Au, Ag, Mo, W, Mn, Re, Ru, Rh, Ir, Pt, Pd, Sn, Pb, Sb, Bi, Y and the rare earth elements; and z: at least one kind of B and P, and at least one kind selected from the group consisting of Si, Ge, C and Al, and where 0≦x≦0.3 and 10≦m≦40 and where the subscripts of 1-x, x represent the ratio between the number of atoms in M and T and subscripts of 100-m, m represent an atomic percentage (atm %) of (M T) and z; and sensing means for sensing a pressure variation in the pressure transmission fluid of the second fluid chamber and for sending an output signal to be sensed.

Claim 3

A pressure sensing device comprising: a housing assembly having a chamber defined therein; at least one diaphragm formed of a metal sheet obtained by rapidly quenching a molten metal and having the modulus of longitudinal elasticity, E, of 2,000 to 15,000 Kg/mm 2 and dividing the chamber of the housing assembly into a first liquid chamber supplied with a measuring fluid and a second liquid chamber sealing a pressure transmission fluid therein, whereby pressure within the first fluid chamber is transmitted into the second fluid chamber through the diaphragm; said metal sheet forming said diaphragm being made of an amorphous alloy having a composition represented by: (Ni.sub.1-x-y M'.sub.x T'.sub.y).sub.100-m Z.sub.m ( 2) where M': at least one kind of Fe and Co; T': at least one kinde selected from the group consisting of Ti, V, Mn, Zr, Nb, Mo, Hf, Ta, W and the rare earth elements; Z: at least one kind of B and P, and at least one kind selected from the group consisting of Si, Ge, C and Al; and where 0≦x≦0.3 for M'=Fe; 0≦x≦0.4 for M'=Co; 0≦y≦0.3 and 10≦m≦40, and where the subscripts of 1-x-y, x, y show the ratio between the number of atoms in Ni, M' and T' and the subscripts 100-m, m show an atomic percentage (atm %) of (Ni M' T') and Z; and sensing means for sensing a pressure variation in the pressure transmission fluid of the second fluid chamber and for sending an output signal to be sensed.

Claim 4

A pressure sensing device comprising: a housing assembly having a chamber defined therein; at least one diaphragm formed of a metal sheet obtained by rapidly quenching a molten metal and having the modulus of longitudinal elasticity, E, of 2,000 to 15,000 Kg/mm 2 and dividing the chamber of the housing assembly into a first liquid chamber supplied with a measuring fluid and a second liquid chamber sealing a pressure transmission fluid therein, whereby pressure within the first fluid chamber is transmitted into the second fluid chamber through the diaphragm; said metal sheet forming said diaphragm being made of an amorphous alloy having a composition represented by: (Ni.sub.1-x-y M'.sub.x T'.sub.y).sub.100-m Z.sub.m ( 2) where M': at least one kind of Fe and Co; T': at least one kinde selected from the group consisting of Ti, V, Mn, Zr, Nb, Mo, Hf, Ta, W and the rare earth elements; Z: at least one kind of B and P, and at least one kind selected from the group consisting of Si, Ge, C and Al; and where 0≦x≦0.3 for M'=Fe; 0≦x≦0.4 for M'=Co; 0≦y≦0.3 and 10≦m≦40, and where the subscripts of 1-x-y, x, y show the ratio between the number of atoms in Ni, M' and T' and the subscripts 100-m, m show an atomic percentage (atm %) of (Ni M' T') and Z; and sensing means for sensing a pressure variation in the pressure transmission fluid of the second fluid chamber and for sending an output signal to be sensed.

Claim 5

A pressure sensing device comprising: a housing assembly having a chamber defined therein; at least one diaphragm formed of a metal sheet obtained by rapidly quenching a molten metal and having the modulus of longitudinal elasticity, E, of 2,000 to 15,000 Kg/mm 2 and dividing the chamber of the housing assembly into a first liquid chamber supplied with a measuring fluid and a second liquid chamber sealing a pressure transmission fluid therein, whereby pressure within the first fluid chamber is transmitted into the second fluid chamber through the diaphragm; said metal sheet formin said diaphragm being made of an amorphous alloy having a composition represented by the following Equation: (Ni.sub.1-x-y M'.sub.x T'.sub.y).sub.100-m Z.sub.m ( 3) where M': at least one kind of Fe and Co; T': at least one kind selected from the group consisting of Ti, V, Mn, Zr, Nb, Mo, Hf, Ta, W and the rare earth elements; Z: at least one kind of B and P, and at least one kind selected from the group consisting of Si, Ge, C and Al; and where 0≦x≦0.3 for M'=Fe; 0≦x≦0.4 for M'=Co; 0≦y≦0.2 and 12≦m≦30, and where the subscripts of 1-x-y, x, y show the ratio between the number of atoms, in Ni, M' and T' and the subscripts of 100-m, m show an atomic percentage (atm %) of (Ni M' T') and Z; and sensing means for sensing a pressure variation in the pressure transmission fluid of the second fluid chamber and for sending an output signal to be sensed.

Claim 6

A pressure sensing device comprising: a housing assembly having a chamber defined therein; at least one diaphragm formed of a metal sheet obtained by rapidly quenching a molten metal and having the modulus of longitudinal elasticity, E, of 2,000 to 15,000 Kg/mm 2 and dividing the chamber of the housing assembly into a first liquid chamber supplied with a measuring fluid and a second liquid chamber sealing a pressure transmission fluid therein, whereby pressure within the first fluid chamber is transmitted into the second fluid chamber through the diaphragm; said metal sheet formin said diaphragm being made of an amorphous alloy having a composition represented by the following Equation: (Ni.sub.1-x-y M'.sub.x T'.sub.y).sub.100-m Z.sub.m ( 3) where M': at least one kind of Fe and Co; T': at least one kind selected from the group consisting of Ti, V, Mn, Zr, Nb, Mo, Hf, Ta, W and the rare earth elements; Z: at least one kind of B and P, and at least one kind selected from the group consisting of Si, Ge, C and Al; and where 0≦x≦0.3 for M'=Fe; 0≦x≦0.4 for M'=Co; 0≦y≦0.2 and 12≦m≦30, and where the subscripts of 1-x-y, x, y show the ratio between the number of atoms, in Ni, M' and T' and the subscripts of 100-m, m show an atomic percentage (atm %) of (Ni M' T') and Z; and sensing means for sensing a pressure variation in the pressure transmission fluid of the second fluid chamber and for sending an output signal to be sensed.

Claim 7

A pressure sensing device comprising: a housing assembly having a chamber defined therein; at least one diaphragm formed of a metal sheet obtained by rapidly quenching a molten metal and having the modulus of longitudinal elasticity, E, of 2,000 to 15,000 Kg/mm 2 and dividing the chamber of the housing assembly into a first liquid chamber supplied with a measuring fluid and a second liquid chamber sealing a pressure transmission fluid therein, thereby pressure within the first fluid chamber is transmitted into the second fluid chamber through the diaphragm; said metal sheet forming said diaphragm being made of an amorphous alloy having a composition represented by the following Equation: (M.sub.1-x T".sub.x).sub.100-m Z.sub.m ( 4) where M: at least one kind selected from the group consisting of Fe, Co and Ni; T": at least one kind selected from Cr, Cu and the elements of the platinum group; and Z: at least one kind of B and P and at least one kind selected from the group consisting of Si, Ge, C and Al, and where 0.02≦x≦0.30 and 10≦m≦40 and the subscripts of 1-x, x show the ratio between the number of atoms in M and T" and the subscripts of 100-m, m show an atomic percentage (atm %) of (M T") and Z m ; and sensing means for sensing a pressure variation in the pressure transmission fluid of the second fluid chamber and for sending an output signal to be sensed.

Claim 8

A pressure sensing device comprising: a housing assembly having a chamber defined therein; at least one diaphragm formed of a metal sheet obtained by rapidly quenching a molten metal and having the modulus of longitudinal elasticity, E, of 2,000 to 15,000 Kg/mm 2 and dividing the chamber of the housing assembly into a first liquid chamber supplied with a measuring fluid and a second liquid chamber sealing a pressure transmission fluid therein, thereby pressure within the first fluid chamber is transmitted into the second fluid chamber through the diaphragm; said metal sheet forming said diaphragm being made of an amorphous alloy having a composition represented by the following Equation: (M.sub.1-x T".sub.x).sub.100-m Z.sub.m ( 4) where M: at least one kind selected from the group consisting of Fe, Co and Ni; T": at least one kind selected from Cr, Cu and the elements of the platinum group; and Z: at least one kind of B and P and at least one kind selected from the group consisting of Si, Ge, C and Al, and where 0.02≦x≦0.30 and 10≦m≦40 and the subscripts of 1-x, x show the ratio between the number of atoms in M and T" and the subscripts of 100-m, m show an atomic percentage (atm %) of (M T") and Z m ; and sensing means for sensing a pressure variation in the pressure transmission fluid of the second fluid chamber and for sending an output signal to be sensed.

Claim 9

A pressure sensing device comprising: a housing assembly having a chamber defined therein; at least one diaphragm formed of a metal sheet obtained by rapidly quenching a molten metal and having the modulus of longitudinal elasticity, E, of 2,000 to 15,000 Kg/mm 2 and dividing the chamber of the housing assembly into a first liquid chamber supplied with a measuring fluid and a second liquid chamber sealing a pressure transmission fluid therein, whereby pressure within the first fluid chamber is transmitted into the second fluid chamber through the diaphragm; said metal sheet forming said diaphragm being made of an amorphous alloy having a composition represented by the following Equation: (Ni.sub.1-x-y-z M'.sub.x T'.sub.y T".sub.z).sub.100-m Z.sub.m ( 5) where M': at least one kind of Fe and Co; T': at least one kind selected from the group consisting of Ti, V, Mn, Zr, Nb, Mo, Hf, Ta, W and the rare earth elements; T": at least one kind selected from Cr, Cu and the elements of the platinum group; and Z: at least one kind of B and P and at least one kind selected from the group consisting of Si, Ge, C and Al, where x≦0.3 for M'=Fe; x≦0.4 for M'=Co; 0≦y≦0.20; 0.02≦z≦0.20; 0.02≦y+z≦0.30 and 10<m<40 and where the subscripts of 1-x-y-z, x, y, z show the ratio between the number of atoms in Ni, M', T' and T" and the subscripts of 100-m, m show an atomic percentage of (Ni M' T' T") and Z; and sensing means for sensing a pressure variation in the pressure transmission fluid of the second fluid chamber and for sending an output signal to be sensed.

Claim 10

A pressure sensing device comprising: a housing assembly having a chamber defined therein; at least one diaphragm formed of a metal sheet obtained by rapidly quenching a molten metal and having the modulus of longitudinal elasticity, E, of 2,000 to 15,000 Kg/mm 2 and dividing the chamber of the housing assembly into a first liquid chamber supplied with a measuring fluid and a second liquid chamber sealing a pressure transmission fluid therein, whereby pressure within the first fluid chamber is transmitted into the second fluid chamber through the diaphragm; said metal sheet forming said diaphragm being made of an amorphous alloy having a composition represented by the following Equation: (Ni.sub.1-x-y-z M'.sub.x T'.sub.y T".sub.z).sub.100-m Z.sub.m ( 5) where M': at least one kind of Fe and Co; T': at least one kind selected from the group consisting of Ti, V, Mn, Zr, Nb, Mo, Hf, Ta, W and the rare earth elements; T": at least one kind selected from Cr, Cu and the elements of the platinum group; and Z: at least one kind of B and P and at least one kind selected from the group consisting of Si, Ge, C and Al, where x≦0.3 for M'=Fe; x≦0.4 for M'=Co; 0≦y≦0.20; 0.02≦z≦0.20; 0.02≦y+z≦0.30 and 10<m<40 and where the subscripts of 1-x-y-z, x, y, z show the ratio between the number of atoms in Ni, M', T' and T" and the subscripts of 100-m, m show an atomic percentage of (Ni M' T' T") and Z; and sensing means for sensing a pressure variation in the pressure transmission fluid of the second fluid chamber and for sending an output signal to be sensed.