Patent US5473354A successfully refreshed from Google Patents.
US4774414A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Liquid metal ion source
Assignee: Hitachi Ltd
•
Filing: 1986-12-05
•
Granted: 1988-09-27
•
Expires: 2006-12-05
Abstract
Abstract This invention relates to a liquid metal ion source which melts a source material and extracts ions. Stable extraction of ions of at least one element selected from among As, P and B for a long period of time can be attained by using as a source material an alloy having a composition represented by the formula L X R Y M A wherein X, Y and A each stands for atomic percentage; L at least one element selected from among Pt, Pd and Ag; R at least one element selected from among As, P and B; M at least one element selected from among Ge, Si and Sb; 5<A<50; 40<X<70; and X+Y+A=100.
Inventors
- 👤 Kaoru Umemura
- 👤 Tohru Ishitani
- 👤 Toshiyuki Aida
- 👤 Hifumi Tamura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 23:31
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/26
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
141 words
In a liquid metal ion source comprising a reservoir which contains a source material in a molten state, an emitter which has been arranged so that said molten source material fed from said reservoir is emitted in the form of ions from the tip thereof and an extracting electrode which serves to extract ions from the tip of said emitter, the improvement wherein said source material is an alloy having a composition represented by the formula L X R Y M A wherein X, Y and A each stands for atomic percentage; L at least one element selected from a group consisting of Pt, Pd and Ag; R at least one element selected from a group consisting of As, P and B; M at least one element selected from a group consisting of Ge, Si and Sb; 5<A<50; 40<X<70; and X+Y+A=100.
Claim 2
Dependent Claim
141 words
In a liquid metal ion source comprising a reservoir which contains a source material in a molten state, an emitter which has been arranged so that said molten source material fed from said reservoir is emitted in the form of ions from the tip thereof and an extracting electrode which serves to extract ions from the tip of said emitter, the improvement wherein said source material is an alloy having a composition represented by the formula L X R Y M A wherein X, Y and A each stands for atomic percentage; L at least one element selected from a group consisting of Pt, Pd and Ag; R at least one element selected from a group consisting of As, P and B; M at least one element selected from a group consisting of Ge, Si and Sb; 5<A<50; 40<X<70; and X+Y+A=100.
Claim 3
Dependent Claim
55 words
A liquid metal ion source according to claim 1, wherein said source material is an alloy having a composition represented by said formula wherein L stands for at least one element selected from a group consisting of Pt and Pd and R at least one element selected from a group consisting of P and As.
References Cited (Backward Citations)
US4367429A
Cited
US4467240A
Cited
US4556798A
Cited
US4624833A
Cited
US4629931A
Cited
US4686414A
Cited
US4617203A
Cited
US4670685A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-09-27 | 1992-03-28 | 1992-09-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-09-27 | 1996-03-28 | 1996-09-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-09-27 | 2000-03-28 | 2000-09-27 | $7700.00 | Window Closed / Lapsed |