US4774151A
Expired / Lapsed
US
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Low contact electrical resistant composition, substrates coated therewith, and process for preparing such
Assignee: International Business Machines Corp
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Filing: 1986-05-23
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Granted: 1988-09-27
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Expires: 2006-05-23
Abstract
Abstract A composition of a metallic compound represented by the formula MT, and G is provided by sputtering an M x G 100-x target. M is a metal selected from the group of titanium, hafnium, zirconium, and mixtures thereof. T is selected from the group of N, C, and mixtures thereof. G is a metal selected from the group of gold, platinum, and palladium. X is an integer from about 65 to about 95. Also provided are substrates coated with the composition and process for depositing the composition on substrates.
Inventors
- 👤 Jerome J. Cuomo
- 👤 Eric P. Dibble
- 👤 Solomon L. Levine
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 18:19
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414; C23C14/06; C23C14/0688; H; H01; H01H; H01H1/00; H01H1/02; H01H1/021; H01H1/023; Y; Y10; Y10T; Y10T428/00; Y10T428/26; Y10T428/261
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
101 words
A film containing particles of a metal selected from the group consisting of gold, palladium, and mixtures thereof with a matrix of a nitrede, carbide, or mixtures thereof of a metal selected from the group consisting of titanium, zirconium, and mixtures thereof and being obtained by sputtering an MxG 100-x target wherein M is a metal selected form the group consisting of titanium, zirconium, and mixtures thereof; G is a metal selected from the group consisting of gold, palladium, and mixtures thereof; and x is an integer from about 65 to about 97; and wherein said targer is titanium-gold or zirconium-palladium.
Claim 2
Dependent Claim
101 words
A film containing particles of a metal selected from the group consisting of gold, palladium, and mixtures thereof with a matrix of a nitrede, carbide, or mixtures thereof of a metal selected from the group consisting of titanium, zirconium, and mixtures thereof and being obtained by sputtering an MxG 100-x target wherein M is a metal selected form the group consisting of titanium, zirconium, and mixtures thereof; G is a metal selected from the group consisting of gold, palladium, and mixtures thereof; and x is an integer from about 65 to about 97; and wherein said targer is titanium-gold or zirconium-palladium.
Claim 3
Dependent Claim
8 words
The film of claim 1 containing a nitride.
Claim 4
Dependent Claim
10 words
The film of claim 1 wherein said target is titanium-gold.
Claim 5
Dependent Claim
10 words
The film of claim 1 wherein said target is zirconium-palladium.
Claim 6
Dependent Claim
9 words
The film of claim 1 containing titinium-nitride and gold.
Claim 7
Dependent Claim
9 words
The film of claim 1 containing zirconium-nitride and palladium.
Claim 8
Dependent Claim
13 words
The film of claim 1 wherein x is about 70 to about 80.
Claim 9
Dependent Claim
10 words
The film of claim 1 wherein x is about 75.
Claim 10
Dependent Claim
9 words
A coated substrate containing a film of claim 1.
Claim 11
Dependent Claim
16 words
The coated substrate of claim 9 wherein said film is about 100 to 10,000 angstoms thick.
Claim 12
Dependent Claim
16 words
The coated substrate of claim 9 wherein said layer is about 5,000 to 10,000 angstroms thick.
Claim 13
Dependent Claim
22 words
The coated substrated of claim 9 wherein said substrate is selected from the group of silicon, polycrystalline silicon, sapphire, copper, and beryllium-copper.
Claim 14
Dependent Claim
11 words
The coated substrate of claim 9 wherein said substrate is beryllium-copper.
Claim 15
Dependent Claim
12 words
The coated substrate of claim 9 wherein said film contains a nitride.
Claim 16
Dependent Claim
11 words
The coated substrate of claim 9 wherein said target is titanium-gold.
Claim 17
Dependent Claim
11 words
The coated substrate of claim 9 wherein said target is zirconium-palladium.
Claim 18
Dependent Claim
13 words
The coated substrate of claim 9 wherein said film contains titanium-nitride and gold.
Claim 19
Dependent Claim
13 words
The coated substrate of claim 9 wherein said film contains zirconium-nitride and palladium.
Claim 20
Dependent Claim
14 words
The coated substrate of claim 10 wherein x is about 70 to about 80.
Claim 21
Dependent Claim
11 words
The coated substrate of claim 9 wherein x is about 75.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-09-27 | 1992-03-28 | 1992-09-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-09-27 | 1996-03-28 | 1996-09-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-09-27 | 2000-03-28 | 2000-09-27 | $7700.00 | Window Closed / Lapsed |