US4772866A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device including a temperature sensor
Assignee: AT&T Inc
•
Filing: 1986-04-11
•
Granted: 1988-09-20
•
Expires: 2006-04-11
Abstract
Abstract A structure of alternating layers of titanium and an insulator or semiconductor material has temperature-sensitive electrical resistivity. In combination with a resistance-measuring circuit, such structure can serve as an accurate temperature sensor. And, since electrical resistivity is inversely related to temperature, disclosed structures can serve as miniature thermistors in integrated circuit devices.
Inventors
- 👤 Ronald H. Willens
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 05:38
CPC Classifications
G; G01; G01K; G01K7/00; G01K7/16; G01K7/18; G01K7/183; H; H01; H01C; H01C7/00; H01C7/04; H01C7/041; H01C7/18
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
65 words
Device comprising a temperature sensor element and a first and a second contact to said temperature sensor element, said device being characterized in that said temperature sensor element consists essentially of a substrate-supported layered structure of alternating first and second layers, the material of said first layers consisting essentially of titanium, and the material of said second layers having electrical resistivity greater than 10,000 micro-ohm-cm.
Claim 2
Dependent Claim
65 words
Device comprising a temperature sensor element and a first and a second contact to said temperature sensor element, said device being characterized in that said temperature sensor element consists essentially of a substrate-supported layered structure of alternating first and second layers, the material of said first layers consisting essentially of titanium, and the material of said second layers having electrical resistivity greater than 10,000 micro-ohm-cm.
Claim 3
Dependent Claim
28 words
Device of claim 1 in which titanium is included in the material of said first layers in an amount which is greater than or equal to 99 percent.
Claim 4
Dependent Claim
21 words
Device of claim 1 in which the material of said second layers is essentially the same in said substrate-supported layered structure.
Claim 5
Dependent Claim
16 words
Device of claim 1 in which the material of said second layers consists essentially of silicon.
Claim 6
Dependent Claim
16 words
Device of claim 1 in which the material of said second layers consists essentially of germanium.
Claim 7
Dependent Claim
21 words
Device of claim 1 in which the material of said second layers consists essentially of a mixture of silicon and germanium.
Claim 8
Dependent Claim
16 words
Device of claim 1 in which said structure is supported by a body of insulator material.
Claim 9
Dependent Claim
13 words
Device of claim 7 in which said body consists essentially of silica glass.
Claim 10
Dependent Claim
16 words
Device of claim 1 in which said structure is supported by a body of semiconductor material.
Claim 11
Dependent Claim
12 words
Device of claim 9 in which said body consists essentially of silicon.
Claim 12
Dependent Claim
23 words
Device of claim 1 in which the thickness of said first and second layers is in the range from 0.1 to 10 nanometers.
Claim 13
Dependent Claim
13 words
Device of claim 1 in which said device is an integrated semiconductor device.
Claim 14
Dependent Claim
14 words
Device of claim 1 in which said temperature sensor element serves as a thermistor.
References Cited (Backward Citations)
US4424507A
Cited
US4463337A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-09-20 | 1992-03-21 | 1992-09-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-09-20 | 1996-03-21 | 1996-09-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-09-20 | 2000-03-21 | 2000-09-20 | $7700.00 | Window Closed / Lapsed |