US4772817A
Expired / Lapsed
US
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Cathode mounting a high-frequency piezoelectric chip
Assignee: Hitachi Ltd
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Filing: 1987-06-02
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Granted: 1988-09-20
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Expires: 2007-06-02
Abstract
Abstract A piezoelectric crystal without spontaneous polarization such as Li 2 B 4 O 7 or quartz crystal is jointed to a cathode on the side opposite to the tip thereof to finely drive the cathode. The surface observation apparatus mounting the cathode makes it possible to observe the surface of a sample at high speeds.
Inventors
- 👤 Toshiyuki Aida
- 👤 Hiroshi Takeuchi
- 👤 Sumio Hosaka
- 👤 Shigeyuki Hosoki
- 👤 Tadashi Ikeda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 10:06
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; B; B82; B82Y; B82Y35/00; G01Q10/00; G01Q10/04; H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/06; H01J37/067; H01J37/26; H01J37/28; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/872
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
89 words
A cathode mounting a high-frequency piezoelectric chip, which comprises a cathode tip arranged maintaining a gap with respect to a sample to be measured that serves as an anode, and at least one piezoelectric crystal chip without spontaneous polarization that is joined to said cathode tip, said cathode tip being mounted on said piezoelectric crystal chip to be displaced by the strain of said piezoelectric crystal chip, and said piezoelectric crystal chip without spontaneous polarization being composed of an Li 2 B 4 O 7 or a quartz crystal.
Claim 2
Dependent Claim
89 words
A cathode mounting a high-frequency piezoelectric chip, which comprises a cathode tip arranged maintaining a gap with respect to a sample to be measured that serves as an anode, and at least one piezoelectric crystal chip without spontaneous polarization that is joined to said cathode tip, said cathode tip being mounted on said piezoelectric crystal chip to be displaced by the strain of said piezoelectric crystal chip, and said piezoelectric crystal chip without spontaneous polarization being composed of an Li 2 B 4 O 7 or a quartz crystal.
Claim 3
Dependent Claim
32 words
A cathode mounting a high-frequency piezoelectric chip according to claim 1, wherein a piezoelectric crystal for coarse motion having spontaneous polarization is joined in cascade to said piezoelectric crystal without spontaneous polarization.
Claim 4
Dependent Claim
29 words
A cathode mounting a high-frequency piezoelectric chip according to claim 1, wherein said piezoelectric crystal without spontaneous polarization is composed of an Li 2 B 4 O 7 .
Claim 5
Dependent Claim
29 words
A cathode mounting a high-frequency piezoelectric chip according to claim 2, wherein said piezoelectric crystal without spontaneous polarization is composed of an Li 2 B 4 O 7 .
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-09-20 | 1992-03-21 | 1992-09-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-09-20 | 1996-03-21 | 1996-09-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-09-20 | 2000-03-21 | 2000-09-20 | $7700.00 | Window Closed / Lapsed |