US4770740A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing valve element for use in an ink-jet printer head
Assignee: NEC Corp
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Filing: 1987-08-05
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Granted: 1988-09-13
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Expires: 2007-08-05
Abstract
Abstract A photoresist and etch method is used to manufacture valve elements of an ink jet printer. The method involves the building of successive layers upon a substrate, with the layers including conductive spacer layers which may be dissolved and plated layers that resist the dissolving. The resulting structure is a very small structure manufactured to extreme accuracy.
Inventors
- 👤 Mitsuo Tsuzuki
- 👤 Michihisa Suga
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 04:00
CPC Classifications
F; F16; F16K; F16K99/00; F16K99/0001; B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/17; B41J2/175; B41J2/17596; F15; F15C; F15C5/00; F16K15/00; F16K15/14; F16K99/0003; F16K99/0005; F16K99/0007; F16K99/0034; F16K99/0055; F16K99/0057; F16K2099/0073; F16K2099/0074; F16K2099/0082; F16K2099/0092; Y; Y10; Y10T; Y10T137/00; Y10T137/7722; Y10T137/7837; Y10T137/7869
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
223 words
A method of producing a valve element for use in an ink-jet printer head comprising steps of: coating a photoresist having a predetermined thickness onto a substrate equipped with an electrically conductive layer on at least its surface and removing said photoresist of a portion to be plated, thereby forming a pattern of a valve seat having a fine hole; applying plating to the portion devoid of said resist so as to bury said portion by a predetermined metal to the thickness substantially equal to that of said resist, thereby forming said valve seat; forming, on the surface of said valve seat, a spacer at least the surface of which has conductivity, in such a manner that said spacer is positioned between a valve, support portion and said valve seat; forming a pattern of a valve member on said valve seat having formed thereon said spacer, by photoresist, said valve member consisting of said valve arranged so as to cover said fine hole of said valve seat and having a predetermined size and shape greater than said fine hole and said support and fixing portions for said valve; plating the pattern of said valve member using a predetermined metal to form said valve member; and removing the photoresist forming said valve seat pattern, and photoresist forming said valve member pattern and said spacer.
Claim 2
Independent Claim
223 words
A method of producing a valve element for use in an ink-jet printer head comprising steps of: coating a photoresist having a predetermined thickness onto a substrate equipped with an electrically conductive layer on at least its surface and removing said photoresist of a portion to be plated, thereby forming a pattern of a valve seat having a fine hole; applying plating to the portion devoid of said resist so as to bury said portion by a predetermined metal to the thickness substantially equal to that of said resist, thereby forming said valve seat; forming, on the surface of said valve seat, a spacer at least the surface of which has conductivity, in such a manner that said spacer is positioned between a valve, support portion and said valve seat; forming a pattern of a valve member on said valve seat having formed thereon said spacer, by photoresist, said valve member consisting of said valve arranged so as to cover said fine hole of said valve seat and having a predetermined size and shape greater than said fine hole and said support and fixing portions for said valve; plating the pattern of said valve member using a predetermined metal to form said valve member; and removing the photoresist forming said valve seat pattern, and photoresist forming said valve member pattern and said spacer.
Claim 3
Independent Claim
250 words
A method of producing a valve element for use in an ink-jet printer head comprising steps of: coating a substrate with photoresist of a predetermined thickness, said substrate having an electrically conductive layer over at least its surface, photographically removing said photoresist over a portion of said layer which is to be plated, thereby forming a pattern of a valve seat having a fine hole; applying plating to the pattern formed by said photoresist to bury the portion which is devoid of said resist under a predetermined metal to a thickness which is substantially equal to the thickness of said resist, thereby forming said valve seat; forming on the surface of said valve seat a spacer having at least its surface made of a conductive material, said spacer being positioned between a valve, its support portion and said valve seat; forming by photoresist a pattern of a valve member on said valve seat having said spacer formed thereon, said valve member comprising said valve positioned to cover said fine hole of said valve seat, said valve member having a predetermined size and shape which is greater than said fine hole and said support for fixing the position of said valve over said hole; plating the pattern of said valve member using a predetermined metal to form said valve member; and removing the photoresist forming said valve seat pattern, said valve member pattern, and removing said spacer whereby said valve and said support are separated and spaced away from said substrate.
Claim 4
Independent Claim
250 words
A method of producing a valve element for use in an ink-jet printer head comprising steps of: coating a substrate with photoresist of a predetermined thickness, said substrate having an electrically conductive layer over at least its surface, photographically removing said photoresist over a portion of said layer which is to be plated, thereby forming a pattern of a valve seat having a fine hole; applying plating to the pattern formed by said photoresist to bury the portion which is devoid of said resist under a predetermined metal to a thickness which is substantially equal to the thickness of said resist, thereby forming said valve seat; forming on the surface of said valve seat a spacer having at least its surface made of a conductive material, said spacer being positioned between a valve, its support portion and said valve seat; forming by photoresist a pattern of a valve member on said valve seat having said spacer formed thereon, said valve member comprising said valve positioned to cover said fine hole of said valve seat, said valve member having a predetermined size and shape which is greater than said fine hole and said support for fixing the position of said valve over said hole; plating the pattern of said valve member using a predetermined metal to form said valve member; and removing the photoresist forming said valve seat pattern, said valve member pattern, and removing said spacer whereby said valve and said support are separated and spaced away from said substrate.
Claim 5
Dependent Claim
31 words
The method of claim 2 wherein said substrate comprises a conductive layer formed by a vacuum deposit over a glass sheet, said conductive layer being a material which can be etched.
Claim 6
Dependent Claim
10 words
The method of claim 3 wherein said layer comprises nickel.
Claim 7
Dependent Claim
12 words
The method of claim 3 wherein said layer comprises an aluminum layer.
Claim 8
Dependent Claim
25 words
The method of claim 5 wherein the thickness of said coating of photoresist is in the range of several hundreds to several thousands of angstroms.
Claim 9
Dependent Claim
15 words
The method of claim 6 and a thin layer of nickel over said aluminum layer.
Claim 10
Dependent Claim
30 words
The method of claim 2 wherein said pattern comprises a central plate having a plurality of spoke like arms extending to a rim portion which is concentric to said plate.
References Cited (Backward Citations)
US4007464A
Cited
US4701766A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-09-13 | 1992-03-14 | 1992-09-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-09-13 | 1996-03-14 | 1996-09-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-09-13 | 2000-03-14 | 2000-09-13 | $7700.00 | Window Closed / Lapsed |