US4770739A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Bilayer photoresist process
Assignee: Texas Instruments Inc
•
Filing: 1987-02-03
•
Granted: 1988-09-13
•
Expires: 2007-02-03
Abstract
Abstract The present invention relates to a bilayer photoresist process, wherein a first planarizing resist layer is applied to a base and a second or top photoresist layer is applied over the first. The top layer resist is sensitive to deep UV light, while the planarizing layer resist is sensitive to near UV or violet light. The top layer, by use of a dye or other means, is opaque to predetermined near UV or violet wavelengths by which the planarizing layer is illuminated. The top layer is patterned using deep UV light. A flood exposure of the predetermined near UV or violet wavelengths is then used to transfer the pattern of the top layer to the bottom planarizing resist layer. Improved resolution is achieved by the use of deep UV light for patterning the top layer. Less costly yet faster illumination of the planarizing layer is accomplished by using near UV or violet light. Additionally pattern degradation due to spurious reflections normally occurring from near UV exposure of the top layer is avoided. Also, the near UV sensitive resist planarizing layer results in a better dry etch mask than previous bilayer scheme planarizing layers. The pattern of the resolution layer can be transferred to the planarization layer by plasma etching.
Inventors
- 👤 Kevin J. Orvek
- 👤 Cesar M. Garza
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 01:39
CPC Classifications
H; H10; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/095; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948; Y10S438/949
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
138 words
A method of patterning photoresist on a body having semiconducting surface areas comprising: forming on said body a first layer of photoresist material, said photoresist material of said first layer being sensitive to a first predetermined spectrum of light; forming a second layer of photoresist material on said first layer, said photoresist material of said second layer being sensitive to a second predetermined spectrum of light and opaque to said first predetermined spectrum of light, wherein said first predetermined spectrum is of a wavelength longer than said second predetermined spectrum; exposing a selected portion of said second layer to light of said second predetermined spectrum; removing the exposed portion of said second layer; and exposing said first layer covered by the remaining portion of said second layer to a blanket exposure of light of said first predetermined spectrum.
Claim 2
Independent Claim
138 words
A method of patterning photoresist on a body having semiconducting surface areas comprising: forming on said body a first layer of photoresist material, said photoresist material of said first layer being sensitive to a first predetermined spectrum of light; forming a second layer of photoresist material on said first layer, said photoresist material of said second layer being sensitive to a second predetermined spectrum of light and opaque to said first predetermined spectrum of light, wherein said first predetermined spectrum is of a wavelength longer than said second predetermined spectrum; exposing a selected portion of said second layer to light of said second predetermined spectrum; removing the exposed portion of said second layer; and exposing said first layer covered by the remaining portion of said second layer to a blanket exposure of light of said first predetermined spectrum.
Claim 3
Dependent Claim
18 words
The method of claim 1, wherein said second predetermined spectrum is of a wavelength less than 310 nanometers.
Claim 4
Dependent Claim
18 words
The method of claim 2, wherein said first predetermined spectrum is of a wavelength greater than 310 nanometers.
Claim 5
Dependent Claim
21 words
The method of claim 3, where said patterning of said second layer is accomplished by exposure of light through a reticle.
Claim 6
Dependent Claim
29 words
The method of claim 3, wherein said exposure of said first layer by blanket exposure serves to transfer the pattern set in said second layer to said first layer.
Claim 7
Dependent Claim
17 words
The method of claim 3, wherein said first layer is formed to provide a substantially planar surface.
Claim 8
Dependent Claim
21 words
An integrated circuit patterning process comprising the steps of: forming a body having semiconducting areas and also having a top surface;
Claim 9
Dependent Claim
21 words
An integrated circuit patterning process comprising the steps of: forming a body having semiconducting areas and also having a top surface;
Claim 10
Dependent Claim
134 words
forming a layer of a first photoresist material over said surface of said body; providing an opaquing agent in a second photoresist material, said opaquing agent serving to render said second photoresist opaque to a first predetermined wavelength of light; forming a layer of said second photoresist material with opaquing agent over said first photoresist material, said second photoresist material being sensitive to a second predetermined wavelength of light and said second predetermined wavelength being shorter than said first predetermined wavelength; exposing said second photoresist material to pattered optical illumination of said second predetermined wavelength in a predetermined pattern; developing said second photoresist material so that said second photoresist material is removed in areas determined by said predetermined pattern; illuminating said first photoresist material at said first predetermined wavelength; and developing said first photoresist.
Claim 11
Dependent Claim
134 words
forming a layer of a first photoresist material over said surface of said body; providing an opaquing agent in a second photoresist material, said opaquing agent serving to render said second photoresist opaque to a first predetermined wavelength of light; forming a layer of said second photoresist material with opaquing agent over said first photoresist material, said second photoresist material being sensitive to a second predetermined wavelength of light and said second predetermined wavelength being shorter than said first predetermined wavelength; exposing said second photoresist material to pattered optical illumination of said second predetermined wavelength in a predetermined pattern; developing said second photoresist material so that said second photoresist material is removed in areas determined by said predetermined pattern; illuminating said first photoresist material at said first predetermined wavelength; and developing said first photoresist.
Claim 12
Dependent Claim
15 words
The process of claim 7, wherein, said second predetermined wavelength is less than 310 nanometers.
Claim 13
Dependent Claim
14 words
The process of claim 7, wherein said first predetermined wavelength is above 310 nanometers.
Claim 14
Dependent Claim
14 words
The process of claim 8, wherein said first predetermined wavelength is above 310 nanometers.
Claim 15
Dependent Claim
33 words
The process of claim 7, wherein said first photoresist material is formed in a layer over said top surface, said layer of first photoresist having a thickness of from 0.6 to 1.9 microns.
Claim 16
Dependent Claim
34 words
The process of claim 11, wherein said second photoresist material is formed in a layer over said first photoresist material, said layer of second photoresist material having a thickness of less than 1.0 micron.
Claim 17
Dependent Claim
14 words
The process of claim 8, wherein said first predetermined wavelength is above 350 nanometers.
Claim 18
Dependent Claim
34 words
The process of claim 13, wherein said first and second photoresist materials have compositions such that said second photoresist material can be developed in a solvent which will not erode said first photoresist material.
Claim 19
Dependent Claim
14 words
The process of claim 8, wherein said opaquing agent comprises Coumarin No. 6 dye.
Claim 20
Dependent Claim
166 words
An integrated circuit patterning process for a body having semiconducting areas and also having a top surface comprising: forming a first photoresist material over said top surface of said body, said first photoresist material being deposited to provide a substantially planar surface, and said first photoresist material being sensitive to a first predetermined wavelength of light; forming a second photoresist material over said first photoresist material, said second photoresist material being sensitive to light of a second predetermined wavelength which second predetermined wavelength is shorter than said first predetermined wavelength; exposing said second photoresist material to patterned optical illumination at said second predetermined wavelength in a predetermined pattern; developing said second photoresist material so that said second photoresist material is removed in areas determined by said predetermined pattern; illuminating said first photoresist material with light of said first predetermined wavelength with said second photoresist being opaque to said first predetermined wavelength of light during said illuminating of said first photoresist material; and developing said first photoresist.
Claim 21
Dependent Claim
166 words
An integrated circuit patterning process for a body having semiconducting areas and also having a top surface comprising: forming a first photoresist material over said top surface of said body, said first photoresist material being deposited to provide a substantially planar surface, and said first photoresist material being sensitive to a first predetermined wavelength of light; forming a second photoresist material over said first photoresist material, said second photoresist material being sensitive to light of a second predetermined wavelength which second predetermined wavelength is shorter than said first predetermined wavelength; exposing said second photoresist material to patterned optical illumination at said second predetermined wavelength in a predetermined pattern; developing said second photoresist material so that said second photoresist material is removed in areas determined by said predetermined pattern; illuminating said first photoresist material with light of said first predetermined wavelength with said second photoresist being opaque to said first predetermined wavelength of light during said illuminating of said first photoresist material; and developing said first photoresist.
Claim 22
Dependent Claim
21 words
The process of claim 16, wherein said second photoresist material is rendered opaque by the inclusion therein of an opaquing agent.
Claim 23
Dependent Claim
15 words
The process of claim 16, wherein said second predetermined wavelength is less than 310 nanometers.
Claim 24
Dependent Claim
15 words
The process of claim 18, wherein said first, predetermined wavelength is greater than 310 nanomters.
Claim 25
Dependent Claim
33 words
The process of claim 19, wherein said first photoresist material is deposited in a layer over said top surface, said layer of first photoresist having a thickness of from 0.6 to 1.9 microns.
Claim 26
Dependent Claim
34 words
The process of claim 20, wherein said second photoresist material is deposited is a layer over said first photoresist material, said layer of second photoresist material having a thickness of less than 1.0 micron.
Claim 27
Dependent Claim
16 words
The process of claim 18, wherein said first predetermined wavelength of light is above 350 nanometers.
Claim 28
Dependent Claim
49 words
The process of claim 17, further comprising: exposing said body to a predetermined etchant, whereby portions of said top surface exposed by said first photoresist layer are etched and portions of said top surface which are overlaid by remaining portions of said first photoresist layer are not substantially etched.
Claim 29
Dependent Claim
16 words
The process of claim 23, wherein said first photoresist material is resistant to said predetermined etchant.
Claim 30
Dependent Claim
16 words
The process of claim 23, wherein said second photoresist material is resistant to said predetermined etchant.
Claim 31
Dependent Claim
35 words
The process of claim 23, wherein said first and second photoresist materials have respective compositions such that said second photoresist material can be developed in a solvent which will not erode said first photoresist material.
Claim 32
Dependent Claim
62 words
The process of claim 17, further comprising: depositing a thin film of a predetermined material overall; and removing the remaining portions of said photoresist layers, whereby said predetermined material remains on portions of said top surface which had been exposed by said developed first photoresist layer in said predetermined pattern and does not substantially remain on other portions of said top surface.
Claim 33
Dependent Claim
62 words
The process of claim 22, further comprising: depositing a thin film of a predetermined material overall; and removing the remaining portions of said photoresist layers, whereby said predetermined material remains on portions of said top surface which had been exposed by said developed first photoresist layer in said predetermined pattern and does not substantially remain on other portions of said top surface.
Claim 34
Dependent Claim
44 words
The of claim 17, further comprising: implanting said body a desired dose of at least one predetermined ion species at a predetermined energy, whereby said desired dose is at least partially stopped by remaining portions of said photoresist materials to provide patterned ion implantation.
Claim 35
Dependent Claim
45 words
The process of claim 22, further comprising: implanting said body a desired dose of at least one predetermined ion species at a predetermined energy, whereby said desired dose is at least partially stopped by remaining portions of said photoresist materials to provide patterned ion implantation.
Claim 36
Dependent Claim
87 words
The process of claim 17, further comprising: etching, prior to forming said first photoresist material over said top surface, contact holes in predetermined locations and depositing a thin film of a metal overall on said surface; exposing, after developing said first photoresist, said integrated circuit structure to a predetermined metal etchant plasma, whereby portions of said metal film exposed by said first photoresist layer are etched and portions of said metal film which are overlaid by remaining portions of said first photoresist layer are not substantially etched.
Claim 37
Dependent Claim
88 words
The process of claim 22, further comprising: etching, prior to forming said first photoresist material over said top surface, contact holes in predetermined locations and depositing a thin film of a metal overall on said top surface; exposing, after developing said first photoresist, said integrated circuit structure to a predetermined metal etchant plasma, whereby portions of said metal film exposed by said first photoresist layer are etched and portions of said metal film which are overlaid by remaining portions of said first photoresist layer are not substantially etched.
Claim 38
Dependent Claim
49 words
The process of claim 22, further comprising: exposing said body to a predetermined etchant, whereby portions of said top surface exposed by said first photoresist layer are etched and portions of said top surface which are overlaid by remaining portions of said first photoresist layer are not substantially etched.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-09-13 | 1992-03-14 | 1992-09-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-09-13 | 1996-03-14 | 1996-09-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-09-13 | 2000-03-14 | 2000-09-13 | $7700.00 | Window Closed / Lapsed |