US4766351A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Starter for inductively coupled plasma tube
Assignee: BIENIEWSKI THOMAS M ET AL
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Filing: 1987-06-29
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Granted: 1988-08-23
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Expires: 2007-06-29
Abstract
Abstract A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation.
Inventors
- 👤 Donald E. Hull
- 👤 Thomas M. Bieniewski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 04:17
CPC Classifications
H; H05; H05H; H05H1/00; H05H1/24; H05H1/46
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
101 words
In an inductively coupled plasma tube having a coil with a high voltage lead energizable by a high voltage radio-frequency generator and a grounded lead and wound about a shield assembly defining an axis of said tube, a starter assembly effective for internal pressures greater than 30 microns, comprising: a conductive probe for connecting with said generator and insulated from said shield assembly and placed within said coil along said axis; and a starter circuit including a capacitor and a switch having a first starting position for connecting said probe with said high voltage lead of said generator through said capacitor.
Claim 2
Dependent Claim
101 words
In an inductively coupled plasma tube having a coil with a high voltage lead energizable by a high voltage radio-frequency generator and a grounded lead and wound about a shield assembly defining an axis of said tube, a starter assembly effective for internal pressures greater than 30 microns, comprising: a conductive probe for connecting with said generator and insulated from said shield assembly and placed within said coil along said axis; and a starter circuit including a capacitor and a switch having a first starting position for connecting said probe with said high voltage lead of said generator through said capacitor.
Claim 3
Dependent Claim
22 words
A plasma tube starter assembly according to claim 1, further including an insulator ring for insulating said probe from said shield assembly.
Claim 4
Dependent Claim
35 words
A plasma tube starter assembly according to claim 1, wherein said capacitor has a capacitance effective to enable current flow for initiating said plasma while limiting said current flow to avoid damage to said tube.
Claim 5
Independent Claim
81 words
A method for starting an inductively coupled plasma tube having a coil with a high voltage lead energizable by a high voltage radio-frequency generator and a grounded lead and wound about a shield assembly defining an axis of said tube, comprising the steps of: inserting a conductive probe along said axis within said coil and insulated from shield assembly; and connecting said probe through a capacitor to said high voltage lead of said generator for a time effective to initiate ionization.
Claim 6
Independent Claim
81 words
A method for starting an inductively coupled plasma tube having a coil with a high voltage lead energizable by a high voltage radio-frequency generator and a grounded lead and wound about a shield assembly defining an axis of said tube, comprising the steps of: inserting a conductive probe along said axis within said coil and insulated from shield assembly; and connecting said probe through a capacitor to said high voltage lead of said generator for a time effective to initiate ionization.
Claim 7
Dependent Claim
31 words
A method according to claim 4, further including the step of electrically disconnecting said probe from said generator and connecting said probe with said shield assembly when said plasma is initiated.
Claim 8
Dependent Claim
50 words
A method according to claim 4, further including the step of limiting current from said generator to said probe by a capacitor having a capacitance effective to initiate said plasma at a selected internal pressure of said tube without damage to said tube from the arc which initiates the plasma.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-08-23 | 1992-02-22 | 1992-08-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-08-23 | 1996-02-22 | 1996-08-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-08-23 | 2000-02-22 | 2000-08-23 | $7700.00 | Window Closed / Lapsed |