US4758304A
Expired / Lapsed
US
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Method and apparatus for ion etching and deposition
Assignee: University of New Mexico
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Filing: 1987-03-20
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Granted: 1988-07-19
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Expires: 2007-03-20
Abstract
Abstract The disclosure relates to a method and apparatus using ion etching and ion assisted deposition to reform a surface of an object, such as a large lens, from its existing topography to a predetermined topography. The method comprises comparing the existing topography of the surface of the object to the predetermined topography. In one embodiment, the comparison can be used to distinguish objects having surfaces which are readily or economically reformable to the predetermined topography from those which are not suitable for such reforming. The method novelly utilizes an algorithm comprising image restoration. The ion etching structure of the apparatus comprises an ion source grid which can be used to provide an ion beam of a preselected spatial distribution. The grid is constructed of a nonconducting, vacuum compatible material, such as a ceramic sheet coated with a conductive layer on each side. Apertures are drilled through the grid in a selected pattern. The ion beam produced from a plasma source when a suitable voltage is applied across the coatings has a spatial distribution in accordance with the aperture pattern. In one embodiment the coatings comprise discrete corresponding areas on each surface and different voltages are appliable to each area to further control beam spatial distribution. Ion assisted deposition may be simultaneously performed under the algorithm to add material to the surface in accordance with the desired predetermined topography.
Inventors
- 👤 John R. McNeil
- 👤 Scott R. Wilson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 06:35
CPC Classifications
B; B44; B44C; B44C1/00; B44C1/22; H; H01; H01J; H01J37/00; H01J37/30; H01J37/305; H01J37/3053; B05; B05D; B05D3/00; B05D3/06; C; C03; C03C; C03C23/00; C03C23/0005; C03C23/0055; C23; C23C; C23C14/00; H01J37/302; H01J37/3023
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
65 words
A method for ion etching a selected surface of an object from its existing topography to a predetermined topography, the method comprising the steps of: (a) comparing the existing topography of the surface to the predetermined topography, (b) using an algorithm comprising image restoration, etching the surface with an ion beam to remove selected material therefrom, thereby causing the surface to reach the predetermined topography.
Claim 2
Independent Claim
65 words
A method for ion etching a selected surface of an object from its existing topography to a predetermined topography, the method comprising the steps of: (a) comparing the existing topography of the surface to the predetermined topography, (b) using an algorithm comprising image restoration, etching the surface with an ion beam to remove selected material therefrom, thereby causing the surface to reach the predetermined topography.
Claim 3
Dependent Claim
29 words
The invention of claim 1 further comprising depositing material on selected portions of the surface in accordance with the algorithm to cause the surface to reach the predetermined topography.
Claim 4
Dependent Claim
11 words
The invention of claim 1 wherein the predetermined topography is symmetric.
Claim 5
Dependent Claim
11 words
The invention of claim 1 wherein the predetermined topography is nonsymmetric.
Claim 6
Dependent Claim
17 words
The invention of claim 1 wherein the ion beam is a high current, low energy, broad beam.
Claim 7
Dependent Claim
43 words
The invention of claim 1 wherein the ion beam has a current between about 0.2 kV and about 2 kV, an energy between about 800 eV and about 1500 eV and focuses to between about 2 and 5 centimeters and larger in diameter.
Claim 8
Dependent Claim
14 words
The invention of claim 1 further comprising using surface extrapolation to avoid edge effects.
Claim 9
Dependent Claim
75 words
The invention of claim 1 wherein said algorithm is: ##EQU4## where at t(x,y) the ion beam is at each point (x,y) F(u,v) is the orthogonal transform of a predetermined surface, D(u,v) is the orthogonal transform of the desired surface profile, H(u,v) is the orthogonal transform of the surface material modification profile, F -1 is the inverse orthogonal transform of the forward transform used to form F, D and H, and γ is the multivariate parameter.
Claim 10
Dependent Claim
15 words
The invention of claim 1 wherein the beam has a profile of substantially Gaussian shape.
Claim 11
Dependent Claim
23 words
The invention of claim 1 wherein the beam emerges from a grid comprising a plurality of discrete sources spaced in a predetermined pattern.
Claim 12
Dependent Claim
15 words
The invention of claim 10 further comprising controlling the spatial distribution of the ion beam.
Claim 13
Dependent Claim
14 words
The invention of claim 10 wherein said pattern comprises a plurality of concentric circles.
Claim 14
Independent Claim
113 words
A method of sorting unprocessed objects having a surface with a topography suitable for surface etching to a predetermined topography from those having surface topographies not suitable for etching, the method comprising the steps of: (a) comparing the existing topography of the object's surface considered for etching with the predetermined surface topography using an algorithm utilizing image restoration to determine whether a selected object comprises a surface having an existing topography which can be etched to the predetermined topography in accordance with preselected criteria, (b) accepting for etching those objects comprising surfaces which can be etched within the preselected criteria, and (c) rejecting those objects which do not comprise surfaces meeting the criteria.
Claim 15
Independent Claim
113 words
A method of sorting unprocessed objects having a surface with a topography suitable for surface etching to a predetermined topography from those having surface topographies not suitable for etching, the method comprising the steps of: (a) comparing the existing topography of the object's surface considered for etching with the predetermined surface topography using an algorithm utilizing image restoration to determine whether a selected object comprises a surface having an existing topography which can be etched to the predetermined topography in accordance with preselected criteria, (b) accepting for etching those objects comprising surfaces which can be etched within the preselected criteria, and (c) rejecting those objects which do not comprise surfaces meeting the criteria.
Claim 16
Dependent Claim
13 words
The invention of claim 13 wherein the criteria comprise time as a criterion.
Claim 17
Dependent Claim
26 words
The invention of claim 13 further comprising the step of ion etching the surfaces of the objects meeting the preselected criteria in accordance with the algorithm.
Claim 18
Dependent Claim
22 words
The invention of claim 13 wherein the algorithm comprises deblurring and image restoration calculations for the computation of a beam dwell array.
Claim 19
Dependent Claim
67 words
An ion source grid apparatus for extracting ions from a source plasma, said apparatus comprising: a two surface sheet of nonconductive material; a conductive layer disposed on each surface of said sheet; a plurality of apertures penetrating both said conductive layers and said sheet in a predetermined pattern for providing an ion beam having a preselected spatial distribution; and means for supplying electrical voltage across said layers.
Claim 20
Dependent Claim
67 words
An ion source grid apparatus for extracting ions from a source plasma, said apparatus comprising: a two surface sheet of nonconductive material; a conductive layer disposed on each surface of said sheet; a plurality of apertures penetrating both said conductive layers and said sheet in a predetermined pattern for providing an ion beam having a preselected spatial distribution; and means for supplying electrical voltage across said layers.
Claim 21
Dependent Claim
25 words
The invention of claim 17 wherein said plurality of apertures are disposed within a substantially circular central region and at least one circle concentric thereto.
Claim 22
Dependent Claim
106 words
An ion source grid apparatus for extracting ions from a source plasma, said apparatus comprising: a two surface sheet of nonconductive material; like conductive layers disposed on each surface of said sheet, each layer comprising a plurality of separate and discrete areas, said like layers comprising corresponding areas; a plurality of apertures penetrating, within said discrete areas, both said conductive layers and said nonconductive sheet in a predetermined pattern for providing ion beam having a preselected spatial distribution; and means for supplying a selected electrical voltage across each said corresponding area of said like conductive layers to provide an ion beam of a desired spatial distribution.
Claim 23
Dependent Claim
106 words
An ion source grid apparatus for extracting ions from a source plasma, said apparatus comprising: a two surface sheet of nonconductive material; like conductive layers disposed on each surface of said sheet, each layer comprising a plurality of separate and discrete areas, said like layers comprising corresponding areas; a plurality of apertures penetrating, within said discrete areas, both said conductive layers and said nonconductive sheet in a predetermined pattern for providing ion beam having a preselected spatial distribution; and means for supplying a selected electrical voltage across each said corresponding area of said like conductive layers to provide an ion beam of a desired spatial distribution.
Claim 24
Dependent Claim
25 words
The invention of claim 19 comprising means for controlling each selected voltage to change said desired ion beam spatial distribution in accordance with said voltages.
Claim 25
Dependent Claim
24 words
The invention of claim 19 wherein said corresponding layer areas essentially comprise a substantially circular central area and at least one circle concentric thereto.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-07-19 | 1992-01-18 | 1992-07-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-07-19 | 1996-01-18 | 1996-07-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-07-19 | 2000-01-18 | 2000-07-19 | $7700.00 | Window Closed / Lapsed |