US4758127A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Original feeding apparatus and a cassette for containing the original
Assignee: Canon Inc
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Filing: 1986-07-28
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Granted: 1988-07-19
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Expires: 2006-07-28
Abstract
Abstract An apparatus includes a plurality of cassettes each for containing a mask or reticle having thereon an integrated circuit pattern, each cassette having a holder for holding the mask or reticle while covering the lower surface thereof, the apparatus further including a carrier for storing therein the cassettes in a layered fashion, a fork for selectively taking out one of the holders from the carrier and an elevator for feeding the take-out holder to a separation station so that the mask or reticle is automatically taken out from, fed from and moved back into the carrier.
Inventors
- 👤 Shunzo Imai
- 👤 Hiroshi Sato
- 👤 Kazuo Iizuka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 08:33
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/10; H10P72/19; H10P72/1906; G; G03; G03B; G03B23/00; G03B23/02; G03F; G03F1/00; G03F1/66; G03F7/00; G03F7/70; G03F7/70691; G03F7/70733; G03F7/70741; H10P72/30; H10P72/34; H10P72/3404; H10P72/3408; H10P72/3411
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
219 words
A device for conveying a sheet member having a pattern for an integrated circuit, comprising: a plurality of first members each for covering at least a top of one of a plurality of sheet members; a plurality of second members each for covering at least a bottom of one of the plurality of sheet members and each having a surface for supporting one of the plurality of sheet members at its bottom, wherein each of said second members is associated with one of said first members, wherein each of said second members is engageable with its associated first member, and wherein each of said second members is disengageable from its associated first member by movement thereof in a direction substantially parallel to said supporting surface for the sheet member; means for accommodating combinations of said first members and their associated second members in an array extending substantially perpendicular to said supporting surfaces; and conveying means for moving one of said second members together with the sheet member supported thereon in a direction substantially parallel to said supporting surface to disengage said one of said second members, together with the sheet member supported thereon, from its associated first member and for conveying said one of said second members together with the sheet member supported thereon out of said accommodating means.
Claim 2
Independent Claim
219 words
A device for conveying a sheet member having a pattern for an integrated circuit, comprising: a plurality of first members each for covering at least a top of one of a plurality of sheet members; a plurality of second members each for covering at least a bottom of one of the plurality of sheet members and each having a surface for supporting one of the plurality of sheet members at its bottom, wherein each of said second members is associated with one of said first members, wherein each of said second members is engageable with its associated first member, and wherein each of said second members is disengageable from its associated first member by movement thereof in a direction substantially parallel to said supporting surface for the sheet member; means for accommodating combinations of said first members and their associated second members in an array extending substantially perpendicular to said supporting surfaces; and conveying means for moving one of said second members together with the sheet member supported thereon in a direction substantially parallel to said supporting surface to disengage said one of said second members, together with the sheet member supported thereon, from its associated first member and for conveying said one of said second members together with the sheet member supported thereon out of said accommodating means.
Claim 3
Dependent Claim
62 words
A device according to claim 1, wherein each said second member has an engaging portion for engaging each said second member with an associated first member and for disengaging each said second member from said associated first member, each said engaging portion including a portion at which said associated first member and said associated second member are slidable relative to each other.
Claim 4
Dependent Claim
13 words
A device according to claim 1, wherein said sheet member includes a pellicle.
Claim 5
Dependent Claim
13 words
A device according to claim 1, wherein said conveying means includes a fork.
Claim 6
Dependent Claim
26 words
A device according to claim 1, further comprising a second conveying means for separating the sheet member from said second member and conveying the sheet member.
Claim 7
Independent Claim
186 words
A method of conveying a sheet member having a pattern for an integrated circuit, comprising the steps of: covering at least the tops of a plurality of sheet members each with a respective one of a plurality of first members; covering at least the bottoms of the plurality of sheet members each with a respective one a plurality of second members, wherein each of said first members is associated with one second member; supporting each of the plurality of sheet members on a supporting surface of a different one of said plurality of second members; accommodating in accommodating means combinations of said first members and their associated second members in an array extending substantially perpendicular to said supporting surface; moving one of said plurality of said second members together with the sheet member supported thereon in a direction substantially parallel to said supporting surface to disengage said one of said plurality of second members together with the sheet member supported thereon from its associated first member and conveying said one of said second members together with the sheet member supported thereon out of said accommodating means.
Claim 8
Independent Claim
186 words
A method of conveying a sheet member having a pattern for an integrated circuit, comprising the steps of: covering at least the tops of a plurality of sheet members each with a respective one of a plurality of first members; covering at least the bottoms of the plurality of sheet members each with a respective one a plurality of second members, wherein each of said first members is associated with one second member; supporting each of the plurality of sheet members on a supporting surface of a different one of said plurality of second members; accommodating in accommodating means combinations of said first members and their associated second members in an array extending substantially perpendicular to said supporting surface; moving one of said plurality of said second members together with the sheet member supported thereon in a direction substantially parallel to said supporting surface to disengage said one of said plurality of second members together with the sheet member supported thereon from its associated first member and conveying said one of said second members together with the sheet member supported thereon out of said accommodating means.
Claim 9
Dependent Claim
22 words
A method according to claim 6, wherein the moving step includes a sliding action between said first member and said second member.
Claim 10
Dependent Claim
13 words
A method according to claim 6, wherein the sheet member includes a pellicle.
Claim 11
Dependent Claim
28 words
A method according to claim 6, wherein said one of said first and second members is restored to a place where it is located in said accommodating step.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-07-19 | 1992-01-18 | 1992-07-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-07-19 | 1996-01-18 | 1996-07-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-07-19 | 2000-01-18 | 2000-07-19 | $7700.00 | Window Closed / Lapsed |