Abstract The x-cut single crystal wafer of lithium tantalate according to the invention is characterized by the orientation flat formed in a specific crystallographic orientation. The plane of the orientation flat should be (A) in parallel with the (018) plane or a plane which is in parallel with the x-axis and makes an angle of 15° or smaller with the (018) plane or (B) in parallel with a plane which is in parallel with the x-axis and perpendicular to the (018) plane or a plane which is in parallel with the x-axis and makes an angle of 15° or smaller with the plane which is in parallel with the x-axis and perpendicular to the (018) plane. In contrast to conventional lithium tantalate single crystal wafers provided with an orientation flat in a direction parallel to the 112° Y direction, the location of the crystallographic orientation of the orientation flat is very easy and consequently great advantages are obtained in the working efficiency of locating the direction of the orientation flat and improved quality as well as increased yield of acceptable devices, e.g. SAW filters, prepared from the wafers.
An x-cut single crystal wafer of lithium tantalate which is a wafer having at least one orientation flat, the plane thereof being: (A) in parallel with a crystallographic (018) plane or a plane which is in parallel with the x-axis and makes an angle of 15° or smaller with the (018) plane; or (B) in parallel with a plane which is in parallel with the x-axis and perpendicular to the (018) plane or a plane which is in parallel with the x-axis and makes an angle of 15° or smaller with the plane which is in parallel with the x-axis and perpendicular to the (018) plane.
Claim 2
Dependent Claim
106 words
An x-cut single crystal wafer of lithium tantalate which is a wafer having at least one orientation flat, the plane thereof being: (A) in parallel with a crystallographic (018) plane or a plane which is in parallel with the x-axis and makes an angle of 15° or smaller with the (018) plane; or (B) in parallel with a plane which is in parallel with the x-axis and perpendicular to the (018) plane or a plane which is in parallel with the x-axis and makes an angle of 15° or smaller with the plane which is in parallel with the x-axis and perpendicular to the (018) plane.
Claim 3
Independent Claim
169 words
A method of preparing a single crystal wafer of lithium tantalate having at least one orientation flat, comprising the steps of: (a) forming a boule of lithium tantalate crystal grown in the direction of a selected x-axis; (b) aligning plural ferroelectric domains within said boule into a single domain; (c) locating an 018 crystallographic plane within said boule and substantially parallel to said x-axis; (d) forming an orientation flat on said boule, the plane thereof being: (i) in parallel with said 018 crystallographic plane or a plane which is parallel to the x-axis and makes an angle of 15 degrees or smaller with the 018 plane; or (ii) in parallel with a plane which is in parallel with the x-axis and perpendicular to the 018 plane or a plane which is in parallel with the x-axis and makes an angle of 15 degrees or smaller with the plane which is in parallel with the x-axis and perpendicular to the 018 plane; and (e) forming x-cut wafers from said boule.
Claim 4
Independent Claim
169 words
A method of preparing a single crystal wafer of lithium tantalate having at least one orientation flat, comprising the steps of: (a) forming a boule of lithium tantalate crystal grown in the direction of a selected x-axis; (b) aligning plural ferroelectric domains within said boule into a single domain; (c) locating an 018 crystallographic plane within said boule and substantially parallel to said x-axis; (d) forming an orientation flat on said boule, the plane thereof being: (i) in parallel with said 018 crystallographic plane or a plane which is parallel to the x-axis and makes an angle of 15 degrees or smaller with the 018 plane; or (ii) in parallel with a plane which is in parallel with the x-axis and perpendicular to the 018 plane or a plane which is in parallel with the x-axis and makes an angle of 15 degrees or smaller with the plane which is in parallel with the x-axis and perpendicular to the 018 plane; and (e) forming x-cut wafers from said boule.