US4752628A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Concentrated lapping slurries
Assignee: DuPont Electronic Materials Holding Inc
•
Filing: 1987-05-15
•
Granted: 1988-06-21
•
Expires: 2007-05-15
Abstract
Abstract Improved lapping compositions are disclosed which contain; -% by weight -Ingredients General Preferred -Finely divided inorganic 5-70 40-60 -abrasive -Biocide .05-3 .1-2 -Carboxylic acid .1-1 .2-.5 -dispersant polymer -Carboxylic acid 0.5-5 .2-1.5 -polymer thickener -Water-soluble corrosion .5-5 1-3 -inhibitor -Lubricant (optional) .5-3 1-2 -
Inventors
- 👤 Charles C. Payne
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 01:39
CPC Classifications
C; C09; C09G; C09G1/00; C09G1/02
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
48 words
A concentrated lapping composition having the following makeup: ______________________________________
Ingredient % by weight
______________________________________
Finely divided inorganic
5-70
abrasive
Biocide .05-3
Carboxylic acid .1-1
dispersant polymer
having a molecular weight
of from 500-50,000
Cross-linked carboxylic acid
0.5-5
gel polymer thickener
Water-soluble corrosion
.5-5
inhibitor
Lubricant (optional)
.5-3
______________________________________
Claim 2
Dependent Claim
48 words
A concentrated lapping composition having the following makeup: ______________________________________
Ingredient % by weight
______________________________________
Finely divided inorganic
5-70
abrasive
Biocide .05-3
Carboxylic acid .1-1
dispersant polymer
having a molecular weight
of from 500-50,000
Cross-linked carboxylic acid
0.5-5
gel polymer thickener
Water-soluble corrosion
.5-5
inhibitor
Lubricant (optional)
.5-3
______________________________________
Claim 3
Dependent Claim
48 words
A concentrated lapping composition having the following makeup: ______________________________________
Ingredient % by weight
______________________________________
Finely divided inorganic
40-60
abrasive
Biocide .1-2
Carboxylic acid .2-.5
dispersant polymer
having a molecular weight
of from 1,000-20,000
Cross-linked carboxylic acid
.2-1.5
gel polymer thickener
Water-soluble corrosion
1-3
inhibitor
Lubricant (optional)
1-2
______________________________________
Claim 4
Dependent Claim
48 words
A concentrated lapping composition having the following makeup: ______________________________________
Ingredient % by weight
______________________________________
Finely divided inorganic
40-60
abrasive
Biocide .1-2
Carboxylic acid .2-.5
dispersant polymer
having a molecular weight
of from 1,000-20,000
Cross-linked carboxylic acid
.2-1.5
gel polymer thickener
Water-soluble corrosion
1-3
inhibitor
Lubricant (optional)
1-2
______________________________________
Claim 5
Dependent Claim
24 words
A method of lapping a silicon surface with the composition of claim 1 which has been diluted with water to about 10% abrasive solids.
Claim 6
Dependent Claim
15 words
The method of claim 3 where the surface is silicon and the abrasive is alumina.
References Cited (Backward Citations)
US4260396A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-06-21 | 1991-12-21 | 1992-06-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-06-21 | 1995-12-21 | 1996-06-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-06-21 | 1999-12-21 | 2000-06-21 | $7700.00 | Window Closed / Lapsed |