US4751372A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum chamber heater apparatus
Assignee: Air Water Inc
•
Filing: 1986-12-12
•
Granted: 1988-06-14
•
Expires: 2006-12-12
Abstract
Abstract A heater apparatus particularly suitable for use in a vacuum deposition apparatus is disclosed. The heater apparatus contains an open structure surrounding the heating element to permit quick evacuation of the apparatus and avoid memory problems attendant with sealed heater tubes used in a high vacuum environment which is repeatedly cycled from vacuum to ambient pressure.
Inventors
- 👤 Lewis M. Fraas
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 10:26
CPC Classifications
H; H05; H05B; H05B3/00; H05B3/62; H05B3/64; C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/541; C23C16/00; C23C16/44; C23C16/46
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
81 words
A heater apparatus for use within a vacuum disposition apparatus comprising: a heater wire; open insulating means surrounding said heater wire and having a length; molybdenum heat spreader plate means engaging said insulating means along said length for spreading the heat generated by said heater wire; means connected to said spreader plates means for locating said heat spreader plate means within the vacuum deposition apparatus; and means attached to said heater wire for making an electrical contact to said heater wire.
Claim 2
Dependent Claim
81 words
A heater apparatus for use within a vacuum disposition apparatus comprising: a heater wire; open insulating means surrounding said heater wire and having a length; molybdenum heat spreader plate means engaging said insulating means along said length for spreading the heat generated by said heater wire; means connected to said spreader plates means for locating said heat spreader plate means within the vacuum deposition apparatus; and means attached to said heater wire for making an electrical contact to said heater wire.
Claim 3
Dependent Claim
14 words
The apparatus according to claim 1 wherein said insulating means are tubular sapphire members.
Claim 4
Dependent Claim
21 words
The apparatus according to claim 2 wherein said means for making the electrical contact to said heater wire are molybdenum rods.
Claim 5
Dependent Claim
22 words
The apparatus according to claim 3 further comprising means for quickly connecting and disconnecting to said heater wire to said molybdenum rods.
Claim 6
Dependent Claim
19 words
The apparatus according to claim 4 wherein said means for locating said heat spreader plate means are molybdenum rods.
Claim 7
Dependent Claim
22 words
The apparatus according to claim 5 further comprising means for connecting and disconnecting said molybdenum rods from said heat spreader plate means.
Claim 8
Dependent Claim
32 words
The apparatus according to claim 6 further comprising one or a plurality of heat shields surrounding said heat spreader plate means on sides thereof not in radiative heat communication with a substrate.
Claim 9
Dependent Claim
130 words
A vacuum chamber heater apparatus comprising: a tungsten-rhenium heater wire; molybdenum electrical contacts contacting said heater wire such that electrical current can be passed through a wall of a vacuum chamber to energize said heater wire; Al 2 O 3 tubular insulating means surrounding said heater wire and having a length; molybdenum heat spreader plate means engaging said A1 2 0 3 tubular insulating means along said length for spreading the heat generated by said heater wire; molybdenum rods for locating said heat spreader plate means within said vacuum chamber apparatus; means for connecting and disconnecting said molybdenum rods from said heat spreader plate means; and one or a plurality of heat shields surrounding said heat spreader plate means on sides thereof not in radiative heat communication with a substrate.
Claim 10
Dependent Claim
130 words
A vacuum chamber heater apparatus comprising: a tungsten-rhenium heater wire; molybdenum electrical contacts contacting said heater wire such that electrical current can be passed through a wall of a vacuum chamber to energize said heater wire; Al 2 O 3 tubular insulating means surrounding said heater wire and having a length; molybdenum heat spreader plate means engaging said A1 2 0 3 tubular insulating means along said length for spreading the heat generated by said heater wire; molybdenum rods for locating said heat spreader plate means within said vacuum chamber apparatus; means for connecting and disconnecting said molybdenum rods from said heat spreader plate means; and one or a plurality of heat shields surrounding said heat spreader plate means on sides thereof not in radiative heat communication with a substrate.
Claim 11
Dependent Claim
22 words
The apparatus according to claim 8 further comprising means for connecting and disconnecting said molybdenum electrical contact from said tungsten-rhenium heater wire.
References Cited (Backward Citations)
US4207456A
Cited
US4531047A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-06-14 | 1991-12-14 | 1992-06-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-06-14 | 1995-12-14 | 1996-06-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-06-14 | 1999-12-14 | 2000-06-14 | $7700.00 | Window Closed / Lapsed |