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US4749255A Expired / Lapsed US ⏱️ 0.0 years remaining

Coating for optical devices

Assignee: Nokia Bell Labs
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Filing: 1985-12-09
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Granted: 1988-06-07
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Expires: 2005-12-09
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Abstract

Abstract Disclosed is a device including a surface coating for passivation or anti-reflection, and a method of manufacture. The coating comprises ZrO 2 doped with yttrium, magnesium or calcium. The doped ZrO 2 is preferably deposited on the device surface by electron-beam evaporation from a single crystal source of ZrO 2 and Y 2 O 3 , MgO or CaO.

Inventors

  • 👤 Utpal K. Chakrabarti
  • 👤 Aland K. Chin
  • 👤 George J. Przybylek
  • 👤 LeGrand G. Van Uitert
  • 👤 George J. Zydzik

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-24 01:14
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/02; H01S5/028; C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/083; C23C14/22; C23C14/24; C23C14/28; C23C14/30; G; G02; G02B; G02B1/00; G02B1/10; G02B1/11; G02B1/113

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 82 words
An optical device including a semiconductor material selected from the group consisting of III-V and II-VI semiconductors, said device comprising a coating formed by depositing from a source material over at least a portion of the surface of the device, characterized in that the coating comprises ZrO 2 and an oxide of an element selected from the group consisting of yttrium, magnesium, and calcium, and that said source material is a single crystal of ZrO 2 doped with one of said oxides.
Claim 2
Dependent Claim 82 words
An optical device including a semiconductor material selected from the group consisting of III-V and II-VI semiconductors, said device comprising a coating formed by depositing from a source material over at least a portion of the surface of the device, characterized in that the coating comprises ZrO 2 and an oxide of an element selected from the group consisting of yttrium, magnesium, and calcium, and that said source material is a single crystal of ZrO 2 doped with one of said oxides.
Claim 3
Dependent Claim 23 words
The device according to claim 1 wherein the device is a laser with mirror facets and the coating covers at least one facet.
Claim 4
Dependent Claim 23 words
The device according to claim 2 wherein the device is a channeled substrate buried heterostructure capable of withstanding current pulses of 1 amp.
Claim 5
Dependent Claim 22 words
The device according to claim 2 wherein the device is a distributed feedback laser which emits light having a single longitudinal mode.
Claim 6
Dependent Claim 42 words
The device according to claim 1 wherein the thickness of the coating is an odd multiple of λ/2n where λ is the wavelength of the light emitted or received by the device and n is the index of refraction of the coating.
Claim 7
Dependent Claim 42 words
The device according to claim 1 wherein the thickness of the coating is an odd multiple of λ/4n where λ is the wavelength of the light emitted or received by the device and n is the index of refraction of the coating.
Claim 8
Dependent Claim 20 words
The device according to claim 1 wherein the coating consists essentially of ZrO 2 and Y 2 O 3 .
Claim 9
Dependent Claim 34 words
The device according to claim 7 wherein the proportion of ZrO 2 is within the range 88-92 mole percent and the proportion of Y 2 O 3 is within the range 8-12 mole percent.
Claim 10
Independent Claim 78 words
A method of fabricating an optical device including a semiconductor material selected from the group consisting of III-V and II-VI semiconductors, including coating at least a portion of the device surface comprising the steps of: providing a single crystal material comprising ZrO 2 and an oxide of an element selected from the group consisting of yttrium, magnesium, and calcium in a vacuum environment; and electron-beam evaporating the material so as to deposit a coating on the semiconductor surface.
Claim 11
Independent Claim 78 words
A method of fabricating an optical device including a semiconductor material selected from the group consisting of III-V and II-VI semiconductors, including coating at least a portion of the device surface comprising the steps of: providing a single crystal material comprising ZrO 2 and an oxide of an element selected from the group consisting of yttrium, magnesium, and calcium in a vacuum environment; and electron-beam evaporating the material so as to deposit a coating on the semiconductor surface.
Claim 12
Dependent Claim 18 words
The method according to claim 9 wherein no oxygen is introduced into the vacuum environment during the evaporation.
Claim 13
Dependent Claim 20 words
The method according to claim 9 wherein the material consists essentially of ZrO 2 and Y 2 O 3 .
Claim 14
Dependent Claim 35 words
The method according to claim 11 wherein the proportion of ZrO 2 is within the range of 88-92 mole percent and the proportion of Y 2 O 3 is within the range 8-12 mole percent.
Claim 15
Dependent Claim 42 words
The method according to claim 9 wherein the thickness of the coating is an odd multiple of λ/2n where λ is the wavelength of the light emitted or received by the device and n is the index of refraction of the coating.
Claim 16
Dependent Claim 42 words
The method according to claim 9 wherein the thickness of the coating is an odd multiple of λ/4n where λ is the wavelength of the light emitted or received by the device and n is the index of refraction of the coating.

References Cited (Backward Citations)

US3432314A Cited
US3984581A Cited
US4327129A Cited
JPS5635488A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1991-06-07 1991-12-07 1992-06-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1995-06-07 1995-12-07 1996-06-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1999-06-07 1999-12-07 2000-06-07 $7700.00 Window Closed / Lapsed

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