US4748329A
Expired / Lapsed
US
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Method for on-line thickness monitoring of a transparent film
Assignee: National Research Council Canada
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Filing: 1987-02-17
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Granted: 1988-05-31
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Expires: 2007-02-17
Abstract
Abstract An optical system is described for monitoring the thickness of a translucent film either free-standing or coated on a reflective substrate. A polychromatic light beam is projected onto the surface of the sheet, and the transmitted light is detected at, at least, three wavelengths of which only one corresponds to an absorption band of the film material. By properly processing the three or more detected signals, an accurate evaluation of the film thickness is obtained irrespective of the presence of colored pigments in the material or of wavelength-dependent attenuation due to scattering at the film interfaces. Optical configurations are also described which avoid errors produced by interference fringes or front-surface reflections while simplifying the scanning of the sheet surface.
Inventors
- 👤 Paolo Cielo
- 👤 Kenneth C. Cole
- 👤 Mario Lamontagne
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 12:22
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0625; G01B11/0691
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
190 words
An optical film thickness measuring method for measuring the thickness of a thin sheet, comprising steps of: (a) projecting an incident beam of polychromatic light onto a surface of the thin sheet, (b) detecting the light transmitted through the sheet at, at least three different wavelengths λ 1 , λ 2 and λ 3 , the first wavelength λ 1 corresponding to an absorption band of a material of the sheet and the second and the third wavelengths λ 2 and λ 3 being outside the absorption band and being substantially free from absorption by the material, (c) producing three electric signals T(λ 1 ), T(λ 2 ) and T(λ 3 ) representative of the light detected at the three different wavelengths λ 1 , λ 2 and λ 3 , (d) establishing a reference signal T o from the electric signals T(λ 2 ) and T(λ 3 ) by using a pre-established non linear relationship among T o , T(λ 2 ) and T(λ 3 ), and (e) comparing the reference signal T o to the electric signal T(λ 1 ) to determine the thickness of the thin sheet.
Claim 2
Dependent Claim
190 words
An optical film thickness measuring method for measuring the thickness of a thin sheet, comprising steps of: (a) projecting an incident beam of polychromatic light onto a surface of the thin sheet, (b) detecting the light transmitted through the sheet at, at least three different wavelengths λ 1 , λ 2 and λ 3 , the first wavelength λ 1 corresponding to an absorption band of a material of the sheet and the second and the third wavelengths λ 2 and λ 3 being outside the absorption band and being substantially free from absorption by the material, (c) producing three electric signals T(λ 1 ), T(λ 2 ) and T(λ 3 ) representative of the light detected at the three different wavelengths λ 1 , λ 2 and λ 3 , (d) establishing a reference signal T o from the electric signals T(λ 2 ) and T(λ 3 ) by using a pre-established non linear relationship among T o , T(λ 2 ) and T(λ 3 ), and (e) comparing the reference signal T o to the electric signal T(λ 1 ) to determine the thickness of the thin sheet.
Claim 3
Dependent Claim
33 words
The method as defined in claim 1 wherein the step of establishing a reference signal comprises extrapolating the reference signal T o from the electric signals T(λ 2 ) and T(λ 3 ).
Claim 4
Dependent Claim
45 words
The method as defined in claim 2, further comprising a step of removing components of the light beam corresponding to wavelengths absorbed by water so that the electric signals will be insensitive to the humidity of the air along the path of the light beam.
Claim 5
Dependent Claim
25 words
The method as defined in claim 3 wherein the detecting step is carried out on the side of the sheet opposite of the incident beam.
Claim 6
Dependent Claim
26 words
The method as defined in claim 3 wherein the incident light beam is modulated at a pre-selected frequency to reduce low frequency environmental and electronic noises.
Claim 7
Dependent Claim
36 words
The method as defined in claim 5 wherein the sheet is of moderately dyed polyethylene, and the three wavelengths λ 1 , λ 2 and λ 3 are respectively 2.35 μm, 2.05 μm and 2.2 μm.
Claim 8
Dependent Claim
25 words
The method as defined in claim 3 wherein the detecting step is carried out on the same side of the sheet as the incident beam.
Claim 9
Dependent Claim
56 words
A method as defined in claim 7, further comprising steps of adjusting the incident angle of the incident light beam to the Brewster angle approximately; and polarizing the incident light beam alternately in parallel and in perpendicular to the plane of incidence so that the transmittance spectrum can be produced with and without interference fringe perturbation.
Claim 10
Dependent Claim
54 words
A method as defined in claim 7 further comprises steps of scanning the incident light beam across the width of the film, and retroreflecting at the same angle light onto the surface of the film before the step of detecting so that the effect of the angular variation of the light beam is reduced.
Claim 11
Dependent Claim
81 words
A method as defined in claim 7 wherein the detecting step comprises the detection of a fourth wavelength λ 4 which is absorbed by the film, and the signal processing step further comprises the production a fourth signal T(λ 4 ) indicative of the front reflection of the incident light beam and a step of subtracting the signal T(λ 4 ) from the signal T(λ 1 ), T(λ 2 ) and T(λ 3 ) to generate signals free from front reflection.
Claim 12
Dependent Claim
182 words
An optical thickness measuring apparatus for measuring the thickness of a thin sheet comprising: (a) a source of polychromatic light for projecting an incident light beam onto a surface of the sheet; (b) detecting means for detecting the light transmitted through the sheet at, at least three different wavelengths λ 1 , λ 2 and λ 3 , the first wavelength λ 1 corresponding to an absorption band of a material of the sheet and the second and the third wavelengths λ 2 and λ 3 being outside the absorption band and being substantially free from absorption by the material; (c) optoelectrical transducers for producing three electric signals T(λ 1 ), T(λ 2 ) and T(λ 3 ) representative of the light detected at the three different wavelengths λ 1 , λ 2 and λ 3 ; and (d) signal processing means for establishing a reference signal T o from the electric signals T(λ 2 ) and T(λ 3 ) and for comparing the reference signal T o to the electric signal T(λ 1 ) to determine the thickness of the sheet.
Claim 13
Dependent Claim
182 words
An optical thickness measuring apparatus for measuring the thickness of a thin sheet comprising: (a) a source of polychromatic light for projecting an incident light beam onto a surface of the sheet; (b) detecting means for detecting the light transmitted through the sheet at, at least three different wavelengths λ 1 , λ 2 and λ 3 , the first wavelength λ 1 corresponding to an absorption band of a material of the sheet and the second and the third wavelengths λ 2 and λ 3 being outside the absorption band and being substantially free from absorption by the material; (c) optoelectrical transducers for producing three electric signals T(λ 1 ), T(λ 2 ) and T(λ 3 ) representative of the light detected at the three different wavelengths λ 1 , λ 2 and λ 3 ; and (d) signal processing means for establishing a reference signal T o from the electric signals T(λ 2 ) and T(λ 3 ) and for comparing the reference signal T o to the electric signal T(λ 1 ) to determine the thickness of the sheet.
Claim 14
Dependent Claim
54 words
The apparatus as defined in claim 11 further comprising filtering means positioned in between the light source and the detecting means for removing components of light beam corresponding to wavelengths absorbed by water so that the electric signals will be insensitive to water vapour in the air along the path of the light beam.
Claim 15
Dependent Claim
33 words
The apparatus as defined in claim 12 wherein the film is in between the light source and the detecting means so that the light beam is transmitted throughout the thickness of the film.
Claim 16
Dependent Claim
33 words
The apparatus as defined in claim 13 further comprises a light chopper means for modulating the incident light beam and filtering means centered at the modulation frequency to reduce environmental and electronic noise.
Claim 17
Dependent Claim
23 words
The apparatus as defined in claim 12 wherein the light source and the detecting means are on the same side of the film.
Claim 18
Dependent Claim
62 words
The apparatus as defined in claim 15 wherein the incident angle of the incident light beam is approximately at Brewster angle, the apparatus further comprising a variable polarizer positioned near the source for polarizing the light beam alternately in parallel and in perpendicular to the plane of incidence so that the transmittance spectrum can be produced with and without interference fringe perturbation.
Claim 19
Dependent Claim
70 words
The apparatus as defined in claim 15 further comprises angular scanning mirror means for scanning the incident light beam across the width of the sheet; retroreflector means for retroreflecting at the same angle light onto the surface of the sheet; and mirror means for collecting retroreflected light from the sheet and projecting onto the detecting means so that the effect of the angular variation of the light beam is reduced.
Claim 20
Dependent Claim
77 words
The apparatus as defined in claim 15 wherein the detecting means further comprises a filter to detect a fourth wavelength λ 4 which is absorbed by the sheet, and the signal processing means establishes a fourth signal T(λ 4 ) indicative of the front reflection of the incident light beam and subtracts the signal T(λ 4 ) from the signals T(λ 1 ), T(λ 2 ) and T(λ 3 ) to generate signals free from front reflection.
References Cited (Backward Citations)
US3869211A
Cited
US3892490A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-05-31 | 1991-11-30 | 1992-05-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-05-31 | 1995-11-30 | 1996-05-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-05-31 | 1999-11-30 | 2000-05-31 | $7700.00 | Window Closed / Lapsed |