US4746799A
Expired / Lapsed
US
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Atomic jet radiation source
Assignee: Individual
•
Filing: 1986-07-30
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Granted: 1988-05-24
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Expires: 2006-07-30
Abstract
Abstract A compact radiation source is obtainable by cascade ionization of a high pressure gas jet as it emerges into a vacuum. The high frequency electric field causing the ionization can be supplied by either microwave or infra-red means. The radiation produced includes ions, atoms, plasma or light, in particular, vacuum ultraviolet radiation.
Inventors
- 👤 Michael R. McMillan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 12:07
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70008; H; H01; H01J; H01J27/00; H01J27/02; H01J27/16
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
93 words
An atomic jet plasma and light source comprising: a jet of atoms or molecules issuing into a vacuum region containing free electrons from a pinhole in a gas cell containing said atoms or molecules in a gas state at about 1-100 atmospheres; high frequency electric field means for accelerating said electrons and establishing and maintaining a discharge in an electron-atom collision zone located between the pinhole and a point up to 200 pinhole diameters downstream in the jet from the pinhole, thereby producing plasma and light which radiate outward from the collision zone.
Claim 2
Dependent Claim
93 words
An atomic jet plasma and light source comprising: a jet of atoms or molecules issuing into a vacuum region containing free electrons from a pinhole in a gas cell containing said atoms or molecules in a gas state at about 1-100 atmospheres; high frequency electric field means for accelerating said electrons and establishing and maintaining a discharge in an electron-atom collision zone located between the pinhole and a point up to 200 pinhole diameters downstream in the jet from the pinhole, thereby producing plasma and light which radiate outward from the collision zone.
Claim 3
Dependent Claim
37 words
The atomic jet plasma and light defined in claim 1, further including a magnetic field parallel to the axis of the jet to confine the plasma to a cylinder around the axis, thereby forming a plasma jet.
Claim 4
Dependent Claim
155 words
An atomic jet ion and light source comprising: a jet of atoms or molecules issuing into a vacuum region containing free electrons from a pinhole in a gas cell containing said atoms or molecules in a gas state at about 1-100 atmospheres; high-frequency electric field means for accelerating said electrons and establishing and maintaining a discharge in an electron-atom collision zone located between the pinhole and a point up to 200 pinhole diameters downstream in the jet from the pinhole, producing plasma and light which radiate outward from the collision zone; anode and cathode screen electrodes, perpendicular to the axis of the jet, downstream from the jet, and separated from each other by a small distance, said anode held at gas cell potential and said cathode held at a negative potential to extract ions from the plasma and repel electrons back into the plasma, said light passing out through the apertures in said screen electrodes.
Claim 5
Dependent Claim
155 words
An atomic jet ion and light source comprising: a jet of atoms or molecules issuing into a vacuum region containing free electrons from a pinhole in a gas cell containing said atoms or molecules in a gas state at about 1-100 atmospheres; high-frequency electric field means for accelerating said electrons and establishing and maintaining a discharge in an electron-atom collision zone located between the pinhole and a point up to 200 pinhole diameters downstream in the jet from the pinhole, producing plasma and light which radiate outward from the collision zone; anode and cathode screen electrodes, perpendicular to the axis of the jet, downstream from the jet, and separated from each other by a small distance, said anode held at gas cell potential and said cathode held at a negative potential to extract ions from the plasma and repel electrons back into the plasma, said light passing out through the apertures in said screen electrodes.
Claim 6
Dependent Claim
197 words
An atomic jet ion and light source comprising: a jet of atoms or molecules issuing into a vacuum from a pinhole in a gas cell containing said atoms or molecules in a gas state at about 1-100 atmospheres; pre-ionization means disposed downstream of said pinhole for increasing the number of free electrons in the jet; high-frequency electric field means for accelerating said electrons and establishing and maintaining a discharge in an electron-atom collision zone located between the pinhole and a point up to 200 pinhole diameters downstream in the jet from the pinhole, producing plasma and light which radiate outward from the collision zone; a magnetic field parallel to the axis of the gas jet to form a plasma jet; anode and cathode electrodes, each electrode consisting of a metal plate or screen containing a circular aperture, said electrodes situated perpendicular to the axis of the gas jet, downstream from the pinhole and separated from each other by a smally distance, said apertures being coaxial with said plasma jet and larger in diameter than this jet, ions being extracted from the plasma jet by said cathode, and light passing through said apertures or said apertures and screens.
Claim 7
Dependent Claim
197 words
An atomic jet ion and light source comprising: a jet of atoms or molecules issuing into a vacuum from a pinhole in a gas cell containing said atoms or molecules in a gas state at about 1-100 atmospheres; pre-ionization means disposed downstream of said pinhole for increasing the number of free electrons in the jet; high-frequency electric field means for accelerating said electrons and establishing and maintaining a discharge in an electron-atom collision zone located between the pinhole and a point up to 200 pinhole diameters downstream in the jet from the pinhole, producing plasma and light which radiate outward from the collision zone; a magnetic field parallel to the axis of the gas jet to form a plasma jet; anode and cathode electrodes, each electrode consisting of a metal plate or screen containing a circular aperture, said electrodes situated perpendicular to the axis of the gas jet, downstream from the pinhole and separated from each other by a smally distance, said apertures being coaxial with said plasma jet and larger in diameter than this jet, ions being extracted from the plasma jet by said cathode, and light passing through said apertures or said apertures and screens.
Claim 8
Dependent Claim
54 words
The radiation source defined in claim 1, wherein: a re-entrant microwave cavity is present, a part of said cavity consisting of two closely-spaced metal electrodes forming a capacitor, said jet emerging from a pinhole in one of the electrodes and striking the other electrode, said cavity and said electrodes providing said electric field means.
Claim 9
Dependent Claim
82 words
The high frequency electric field means defined in claim 5, wherein: said re-entrant microwave cavity further consists of a gas tube with a gas cell at one end, said gas cell being terminated by a flat face perpendicular to the axis of the tube and the cell, the tube and the cell being enclosed by a coaxial tube which is terminated by plates at both ends, the plate nearest the gas cell forming said capacitor with the face of said gas cell.
Claim 10
Dependent Claim
28 words
The re-entrant microwave cavity defined in claim 6, wherein said gas cell is enclosed by a tubular oven, said oven being enclosed in turn by said coaxial tube.
Claim 11
Dependent Claim
21 words
The high frequency electric field means defined in claim 5, wherein said microwave cavity operates at a frequency of 2.45 GHz.
Claim 12
Dependent Claim
20 words
The radiation source defined in claim 1, wherein said high frequency electric field means is a focusing means for light.
Claim 13
Dependent Claim
40 words
The high frequency electric field means defined in claim 9, wherein said focusing means is a parabolic mirror with its focus located between the pinhole and a point up to 20 pinhole diameters downstream in said jet from said pinhole.
Claim 14
Dependent Claim
42 words
The focusing means defined in claim 10, wherein said parabolic mirror is concave toward the jet, has an aperture on its axis, and serves as an anode for the extraction of ions from the discharge and the electrostatic containment of the discharge.
Claim 15
Dependent Claim
18 words
The high frequency electric field means defined in claim 9, wherein said light is obtained from a laser.
Claim 16
Dependent Claim
19 words
The laser means defined in claim 12, wherein said laser is a CO 2 laser operating at 10.6 microns.
Claim 17
Dependent Claim
14 words
The light source defined in claim 1 wherein said jet consists essentially of helium.
Claim 18
Dependent Claim
27 words
The plasma and light source of claim 1 wherein pre-ionization means for increasing the number of free electrons in the jet is provided downstream of said pinhole.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-05-24 | 1991-11-23 | 1992-05-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-05-24 | 1995-11-23 | 1996-05-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-05-24 | 1999-11-23 | 2000-05-24 | $7700.00 | Window Closed / Lapsed |