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US4746375A
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Activation of refractory metal surfaces for electroless plating
Assignee: Intersil Corp
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Filing: 1987-05-08
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Granted: 1988-05-24
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Expires: 2007-05-08
Abstract
Abstract A method of catalytically activating refractory metal surfaces for the subsequent electroless plating of another metal thereon is disclosed, in which the refractory surface is treated while heated in a carburizing atmosphere under conditions which cause the formation of refractory metal carbides on the refractory surface.
Inventors
- 👤 Charles D. Iacovangelo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 20:54
CPC Classifications
C; C23; C23C; C23C18/00; C23C18/16; C23C18/18; C23C18/1851; C23C18/1872; C23C18/1875; C23C18/1882; C23C18/1862; C23C18/1865; C23C8/00; C23C8/80; H; H05; H05K; H05K1/00; H05K1/02; H05K1/09; H05K1/092; H05K3/00; H05K3/22; H05K3/24; H05K3/245
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
68 words
A method of catalytically activating a refractory metal surface for the subsequent electroless plating of metal thereon; said method comprising treating the surface while heated in a carburizing atmosphere under conditions which cause carbon to react with refractory metal atoms at the surface, said carburizing treatment followed by the electroless plating of a metal selected from the group consisting of nickel, cobalt, and gold onto the refractory surface.
Claim 2
Independent Claim
68 words
A method of catalytically activating a refractory metal surface for the subsequent electroless plating of metal thereon; said method comprising treating the surface while heated in a carburizing atmosphere under conditions which cause carbon to react with refractory metal atoms at the surface, said carburizing treatment followed by the electroless plating of a metal selected from the group consisting of nickel, cobalt, and gold onto the refractory surface.
Claim 3
Dependent Claim
36 words
The method of claim 1 wherein a surface of a refractory metal selected from the group consisting of tungsten and molybdenum is heated to a temperature of at least about 1050° C. in the carburizing atmosphere.
Claim 4
Dependent Claim
11 words
The method of claim 1 wherein the refractory metal is tungsten.
Claim 5
Dependent Claim
13 words
The method of claim 3 wherein the carburizing atmosphere comprises methane and hydrogen.
Claim 6
Dependent Claim
12 words
The method of claim 4 wherein the carburizing atmosphere further comprises oxygen.
Claim 7
Dependent Claim
38 words
The method of claim 5 wherein the surface is heated to a temperature of at least about 1050° C. in the carburizing atmosphere; and the partial pressure of oxygen is maintained at less than about 10 -18 atmospheres.
Claim 8
Dependent Claim
16 words
The method of claim 5 wherein the volume ratio of methane to hydrogen is about 5:95.
Claim 9
Dependent Claim
17 words
The method of claim 4 wherein the carburizing atmosphere further comprises oxygen, carbon dioxide, and carbon monoxide.
References Cited (Backward Citations)
US3772096A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-05-24 | 1991-11-23 | 1992-05-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-05-24 | 1995-11-23 | 1996-05-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-05-24 | 1999-11-23 | 2000-05-24 | $7700.00 | Window Closed / Lapsed |