Microscope

Claim 2

A microscope, comprising: a microscope body; a stage mounted on said microscope body; an objective optical system mounted movably in parallel with the surface of said stage on said microscope body and an eyepiece optical system which is fixedly mounted on said microscope body and through which the image of the light having passed said objective optical system and coming out of a sample placed on said stage can be observed, a light path length between said objective optical system and eyepiece optical system being variable by moving said objective optical system; an afocal 1× relay lens system consisting of a plurality of lens components arranged between said objective optical system and eyepiece optical system to relay an image of the sample formed by said objective optical system to the position of the entrance pupil of said eyepiece optical system and a reflecting member arranged between said stage surface and relay lens system and for arranging at least the light path of said relay lens system parallelly with the surface of said sample, said objective optical system and reflecting member being integrally movable in parallel with the surface of said sample and, in response to the movement of said objective optical system and reflecting member, the distances between the respective lens components of said relay lens system being varied so that said relay lens system may be kept afocal 1×.

Claim 3

A microscope according to claim 1 wherein said objective optical system is linearly movable.

Claim 4

A microscope according to claim 1 wherein said objective optical system is linearly movable in directions intersecting at right angles with each other.

Claim 5

A microscope according to claim 1 wherein said reflecting member is rockable around the optical axis of said reflecting member.

Claim 6

A microscope according to claim 1 wherein said objective optical system is formed of a reflecting member having a reflection surface of a predetermined curvature and bending the light path of the light out of said sample so as to be in parallel with the surface of said stage.

Claim 7

A microscope according to claim 5 wherein said reflecting member is rockable around the optical axis of said reflecting member.

Claim 8

A microscope according to claim 1 wherein said objective optical system is formed as an objective unit including an infinity objective, a half mirror bending the light path of the light out of said sample so as to be in parallel with the surface of said stage and an illuminating light source means projecting an illuminating light onto the surface of said sample through said half mirror.

Claim 9

A microscope according to claim 1 wherein said objective optical system is formed as an objective unit including a half mirror having a reflecting surface of a predetermined curvature and bending the light path of the light out of said sample so as to be in parallel with the surface of said stage and an illuminating light source means projecting an illuminating light onto the surface of said sample through said half mirror.

Claim 10

A microscope according to claim 1 wherein said objective optical system is formed as an objective unit including an infinity objective, a half mirror bending the light path of light out of said sample so as to be in parallel with the surface of said stage and a master specimen for forming the image of the master specimen within said eyepiece optical system through said half mirror and objective.

Claim 11

A microscope according to claim 1 wherein said stage is moved to rotate and said objective optical system is moved linearly across the rotation center of said stage.

Claim 12

A microscope according to claim 1 wherein said stage is moved linearly and said objective optical system is rocked so as to intersect with the moving direction of said stage in a plane parallel with the surface of said stage.

Claim 13

A microscope according to claim 1 wherein: said relay lens system is formed of four lens components L 1 , L 2 , L 3 and L 4 and the distance d 1 between the lens components L 1 and L 2 , the distance D between the lens components L 2 and L 3 and the distance d between the lens components L 3 and L 4 are adjusted to satisfy the following formulae when said four lens components are approximated respectively with thin lenses: ##EQU2## where φ 1 represents the power of the lens component L 1 , φ 2 represents the power of the lens component L 2 , φ 3 represents the power of the lens component L 3 , φ 4 represents the power of the lens component L 4 , φ 1 >0 or φ 2 >0, φ 3 >0 or φ 4 >0, and E represents the displacement of the image by the lens components L 1 to L 4 .

Claim 14

A microscope according to claim 1 wherein said objective optical system is formed as an objective unit including an infinity objective and a reflecting member bending the light path of the light out of said sample so as to be in parallel with the surface of said stage.

Claim 15

A microscope suitable for observing a sample having a flat surface, comprising: a microscope body; a stage movably mounted on said microscope body; an objective optical system mounted movably in parallel with the surface of said stage on said microscope body and an eyepiece optical system which is fixedly mounted on said microscope body and through which the image of the light having passed said objective optical system and coming out of a sample placed on said stage can be observed, a light path length between said objective optical system and eyepiece optical system being variable by moving said objective optical system; an afocal 1× relay lens system consisting of a plurality of lens components arranged between said objective optical system and eyepiece optical system to relay an image of the sample formed by said objective optical system to the position of the entrance pupil of said eyepiece optical system and a reflecting member arranged between said stage surface and relay lens system and for arranging at least the light path of said relay lens system parallelly with the surface of said sample, said objective optical system and reflecting member being integrally movable in parallel with the surface of said sample and, in response to the movement of said objective optical system and reflecting member, the distances between the respective lens components of said relay lens system being varied so that said relay lens system may be kept afocal 1×.

Claim 16

A microscope suitable for observing a sample having a flat surface, comprising: a microscope body; a stage movably mounted on said microscope body; an objective optical system mounted movably in parallel with the surface of said stage on said microscope body and an eyepiece optical system which is fixedly mounted on said microscope body and through which the image of the light having passed said objective optical system and coming out of a sample placed on said stage can be observed, a light path length between said objective optical system and eyepiece optical system being variable by moving said objective optical system; an afocal 1× relay lens system consisting of a plurality of lens components arranged between said objective optical system and eyepiece optical system to relay an image of the sample formed by said objective optical system to the position of the entrance pupil of said eyepiece optical system and a reflecting member arranged between said stage surface and relay lens system and for arranging at least the light path of said relay lens system parallelly with the surface of said sample, said objective optical system and reflecting member being integrally movable in parallel with the surface of said sample and, in response to the movement of said objective optical system and reflecting member, the distances between the respective lens components of said relay lens system being varied so that said relay lens system may be kept afocal 1×.

Claim 17

A microscope according to claim 14 wherein said relay system is formed of four lens components L 1 , L 2 , L 3 and L 4 and the distance d 1 between the lens components L 1 and L 2 , the distance D between the lens components L 2 and L 3 and the distance d 2 between the lens components L 3 and L 4 are adjusted to satisfy the following formulae when said four lens components are approximated respectively with thin lenses: ##EQU3## where φ 1 represents the power of the lens component L 1 , φ 2 represents the power of the lens component L 2 , φ 3 represents the power of the lens component L 3 , φ 4 represents the power of the lens component L 4 , φ 1 >0 or φ 2 >0, φ 3 >0 or φ 4 >0, and E represents the displacement of the image by the lens components L 1 to L 4 .