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US4739170A Expired / Lapsed US ⏱️ 0.0 years remaining

Plasma generator

Assignee: Department of Industry, Science and Resources
•
Filing: 1986-05-07
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Granted: 1988-04-19
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Expires: 2006-05-07
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Abstract

Abstract Plasma generator which is constructed and operated to provide an enhanced probability of collisions between charged and neutral particles in the working chamber together with enhanced energy transfer and uniformity of the plasma. The plasma generator includes a chamber (1) with means to produce electrons (5) and to cause the electrons to rotate and spiral (6,7) to produce ion of gases introduced into the chamber to produce a plasma. The plasma is contained by magnetic mirrors (10,11) at each end of the chamber (2). Axial oscillation of the plasma is produced by a low frequency oscillating potential (9) in the chamber to significantly increased ion electron interaction.

Inventors

  • 👤 Istvan K. Varga

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 23:51
CPC Classifications
H; H05; H05H; H05H1/00; H05H1/02; H05H1/16; H05H1/10; H05H1/14

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 153 words
A plasma generator adapted to be evacuated, and opening to a chamber (2) a magnetron (1) having a cylindrical anode (6) and an axial magnet (7) to form a confined plasma (8) said chamber (2) including an electrode (12-13) at the plasma field, characterised by magnetic means (10-11) effective at each side of the said chamber (2) and coaxial with the cylindrical anode (6) and polarised to form a magnetic mirror field, further characterised by means (9) to apply an axial potential to the electrons and ions of the plasma (8) of a frequency low enough to establish an axial oscillation of the heavier ions with electrons and ions moving in opposite directions in the magnetic mirror field, whereby to facilitate multiple ionization and enhancement of neutral particle ionization, further characterised by means (16-17) to polarize said electrode (12-13) to produce either an electrically neutral or positive or negative beam of charged particles.
Claim 2
Dependent Claim 153 words
A plasma generator adapted to be evacuated, and opening to a chamber (2) a magnetron (1) having a cylindrical anode (6) and an axial magnet (7) to form a confined plasma (8) said chamber (2) including an electrode (12-13) at the plasma field, characterised by magnetic means (10-11) effective at each side of the said chamber (2) and coaxial with the cylindrical anode (6) and polarised to form a magnetic mirror field, further characterised by means (9) to apply an axial potential to the electrons and ions of the plasma (8) of a frequency low enough to establish an axial oscillation of the heavier ions with electrons and ions moving in opposite directions in the magnetic mirror field, whereby to facilitate multiple ionization and enhancement of neutral particle ionization, further characterised by means (16-17) to polarize said electrode (12-13) to produce either an electrically neutral or positive or negative beam of charged particles.
Claim 3
Dependent Claim 26 words
A plasma generator according to claim 1 wherein the said low frequency axial potential is applied between the said anode (6) and the said chamber (2).
Claim 4
Dependent Claim 47 words
A plasma generator according to claim 1 wherein the said magnetron (1) receives its electron supply from a filament (5) connected to a DC power source (15) which is biased by a further DC source (14) connecting it to the said anode (6) of the magnetron (1).
Claim 5
Dependent Claim 44 words
A plasma generator according to claim 1 wherein the said electrode (12-13) at the plasma field is energised by an AC power source (17) biased by a DC power source (16) connected between the said AC power source (17) and the said chamber (2).
Claim 6
Dependent Claim 27 words
A plasma generator according to claim 1 wherein the magnetic mirror at the magnetron (1) side of the said chamber (2) is common to the magnetron (1).
Claim 7
Dependent Claim 45 words
A plasma generator according to claim 1 wherein a single magnet (19) is used having one pole (20) adjacent to the end of the magnetron (1) remote from the chamber (2) and the other pole (22) adjacent the chamber (2) remote from the magnetron (1).
Claim 8
Dependent Claim 43 words
A plasma generator according to claim 1 wherein a magnetic mirror field is applied through the chamber (2) at right angles to the axis of the plasma generator (1) and at the centre of the first magnetic mirror field by magnet means (22-23).
Claim 9
Dependent Claim 16 words
A plasma generator according to claim 1 wherein the chamber (2) includes an intermediate volume (18).
Claim 10
Independent Claim 131 words
The method of producing a plasma which consists in exciting a gas in a magnetron directed into an evacuated chamber, forming a magnetic mirror by means of opposite polarity magnetic fields disposed one on one side of the said chamber and the other on the other side of the said chamber about the axis of the said magnetron, applying an oscillating field between the anode of said magnetron and said chamber of a frequency low enough to oscillate both ions and electrons and of a voltage high enough to drive ions and electrons through the magnetic field between the said magnetron and the said chamber, and applying a biased field to an electrode in said chamber whereby to produce either an electrically neutral or positive or negative beam of charged particles.
Claim 11
Independent Claim 131 words
The method of producing a plasma which consists in exciting a gas in a magnetron directed into an evacuated chamber, forming a magnetic mirror by means of opposite polarity magnetic fields disposed one on one side of the said chamber and the other on the other side of the said chamber about the axis of the said magnetron, applying an oscillating field between the anode of said magnetron and said chamber of a frequency low enough to oscillate both ions and electrons and of a voltage high enough to drive ions and electrons through the magnetic field between the said magnetron and the said chamber, and applying a biased field to an electrode in said chamber whereby to produce either an electrically neutral or positive or negative beam of charged particles.
Claim 12
Dependent Claim 40 words
The method of producing a plasma according to claim 9 which includes applying a further magnetic mirror field through the chamber at right angles and central to the magnetic mirror field existing in the chamber, to further enhancing plasma generation.

References Cited (Backward Citations)

US2837693A Cited
US3155593A Cited
GB959150A Cited
US3660715A Cited
GB1348562A Cited
US3999072A Cited
US4213043A Cited
US4468564A Cited
US4661710A Cited
US4645977A Cited
US4682026A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1991-04-19 1991-10-19 1992-04-19 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1995-04-19 1995-10-19 1996-04-19 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1999-04-19 1999-10-19 2000-04-19 $7700.00 Window Closed / Lapsed

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