US4737973A
Expired / Lapsed
US
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Crystal monochromator
Assignee: Hitachi Ltd
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Filing: 1986-12-15
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Granted: 1988-04-12
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Expires: 2006-12-15
Abstract
Abstract A focusing X-ray crystal monochromator in which one or more crystal layers having different spacings of lattice plane are stacked on a crystal base. Due to different spacings of lattice plane, the angle of reflection and diffraction of a diverging incident X-ray beam can be so changed that the beam takes a parallel or focusing direction for monochromatization. Thus, the monochromator of the present invention can be applied to the X-ray lithography for transferring a pattern of high resolution or the X-ray analysis such as the fine X-ray diffraction.
Inventors
- 👤 Taro Ogawa
- 👤 Shinji Kuniyoshi
- 👤 Yoshinori Nakayama
- 👤 Takeshi Kimura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 23:12
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/7015; G03F7/70158; B; B82; B82Y; B82Y10/00; G03F7/70483; G03F7/7055; G03F7/70575; G21; G21K; G21K1/00; G21K1/06; G21K1/062; G21K2201/00; G21K2201/06; G21K2201/061; G21K2201/062; G21K2201/067
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
55 words
A crystal monochromator for monochromating X-rays comprising a base crystal layer and a plurality of crystal layers stacked on said base crystal layer, an upper crystal layer of said plurality of stacked crystal layers having a larger spacing of lattice plane than that of each lower crystal layer of said plurality of stacked crystal layers.
Claim 2
Dependent Claim
55 words
A crystal monochromator for monochromating X-rays comprising a base crystal layer and a plurality of crystal layers stacked on said base crystal layer, an upper crystal layer of said plurality of stacked crystal layers having a larger spacing of lattice plane than that of each lower crystal layer of said plurality of stacked crystal layers.
Claim 3
Dependent Claim
41 words
A crystal monochromator according to claim 1, wherein each upper crystal layer of said plurality of stacked crystal layers has a larger spacing of lattice plane than that of the adjacent lower crystal layer of said plurality of stacked crystal layers.
Claim 4
Dependent Claim
35 words
A crystal monochromator according to claim 2, wherein said upper crystal layer has a larger spacing of lattice plane than that of said adjacent lower crystal layer by 4×10 -3 % to 1×10 -1 %.
Claim 5
Dependent Claim
30 words
A crystal monochromator according to claim 1, wherein materials of said base crystal layer and said plurality of stacked crystal layers are a crystal of GaXIn 1-x PyAs 1-y .
Claim 6
Dependent Claim
29 words
A crystal monochromator according to claim 1, wherein a material of said base crystal layer is selected from a group conssiting of Si, Ge, emerald, quartz, garnet and InSb.
Claim 7
Dependent Claim
34 words
A crystal monochromator according to claim 1, wherein each of said crystal layers of said plurality of stacked crystal layers has a larger spacing of lattice plane than that of said base crystal layer.
References Cited (Backward Citations)
US4261771A
Cited
JPS6049231A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-04-12 | 1991-10-12 | 1992-04-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-04-12 | 1995-10-12 | 1996-04-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-04-12 | 1999-10-12 | 2000-04-12 | $7700.00 | Window Closed / Lapsed |