US4737384A
Expired / Lapsed
US
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Deposition of thin films using supercritical fluids
Assignee: Honeywell International Inc
•
Filing: 1985-11-01
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Granted: 1988-04-12
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Expires: 2005-11-01
Abstract
Abstract A process of depositing thin film onto a substrate using super-critical fluids.
Inventors
- 👤 Andiappan K. S. Murthy
- 👤 Alex Y. Bekker
- 👤 Kundanbhai M. Patel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 15:35
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/18; B05D2401/00; B05D2401/90
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
97 words
A process for depositing a thin coating of a metallic or non-metallic material onto a substrate which comprises the steps of: exposing a substrate, at a super critical temperature and pressure, to a solution of the material dissolved in water or an organic solvent, said material being substantially insoluble in said solvent under sub critical temperatures, pressures or temperatures and pressures and substantially soluble in said solvent under super critical temperatures and pressures; and reducing the pressure, or temperature and pressure, to sub critical values depositing a substantially uniform thin coating of said material on said substrate.
Claim 2
Dependent Claim
97 words
A process for depositing a thin coating of a metallic or non-metallic material onto a substrate which comprises the steps of: exposing a substrate, at a super critical temperature and pressure, to a solution of the material dissolved in water or an organic solvent, said material being substantially insoluble in said solvent under sub critical temperatures, pressures or temperatures and pressures and substantially soluble in said solvent under super critical temperatures and pressures; and reducing the pressure, or temperature and pressure, to sub critical values depositing a substantially uniform thin coating of said material on said substrate.
Claim 3
Dependent Claim
12 words
A process according to claim 1 wherein said material is a metal.
Claim 4
Dependent Claim
11 words
A process according to claim 2 wherein said metal is selenium.
Claim 5
Dependent Claim
13 words
A process according to claim 1 wherein said material is a non-metallic material.
Claim 6
Dependent Claim
14 words
A process according to claim 4 wherein said non-metallic material is a polymeric material.
Claim 7
Dependent Claim
13 words
A process according to claim 1 wherein said material is dissolved in water.
Claim 8
Dependent Claim
15 words
A process according to claim 1 wherein said material is dissolved in an organic solvent.
Claim 9
Dependent Claim
21 words
A process according to claim 7 wherein the critical pressure of said solvent is from about 10 to about 200 atmospheres.
Claim 10
Dependent Claim
17 words
A process according to claim 7 wherein said pressure is from about 20 to about 150 atmospheres.
Claim 11
Dependent Claim
13 words
A process according to claim 9 wherein said solvent is an aromatic solvent.
Claim 12
Dependent Claim
11 words
A process according to claim 10 wherein said solvent is benzene.
Claim 13
Dependent Claim
54 words
A process according to claim 1 wherein the solubility of said material in the solvent in the super-critical state is at least about 0.1 mole % based on the total moles of solvent and material and the solubility in a sub-critical state is not greater than about 0.01 mole % on the afore-mentioned basis.
Claim 14
Dependent Claim
35 words
A process according to claim 12 wherein said solubility in the super-critical state is at least about 1 mole % and the solubility in some sub-critical state is not greater than about 0.01 mole %.
Claim 15
Dependent Claim
33 words
A process according to claim 13 wherein said solubility in the super-critical state is about 10 mole % and the solubility in some sub-critical state is not greater than about 0.001 mole %.
Claim 16
Dependent Claim
27 words
A process according to claim 1 wherein the vapor pressure of said material is at least about 1 mm Hg at the critical temperature of said solvent.
Claim 17
Dependent Claim
17 words
A process according to claim 15 wherein said vapor pressure is at least about 5 mm Hg.
Claim 18
Dependent Claim
17 words
A process according to claim 16 wherein said vapor pressure is at least about 10 mm Hg.
References Cited (Backward Citations)
DE2853066A1
Cited
US4582731A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-04-12 | 1991-10-12 | 1992-04-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-04-12 | 1995-10-12 | 1996-04-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-04-12 | 1999-10-12 | 2000-04-12 | $7700.00 | Window Closed / Lapsed |