US4732483A
Expired / Lapsed
US
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Interferometric surface profiler
Assignee: Zygo Corp
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Filing: 1987-03-19
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Granted: 1988-03-22
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Expires: 2007-03-19
Abstract
Abstract An interferometric profiler capable of accurately measuring the topography of a surface under test (48) employs a laser source (10), with the surface under test (48) ultimately being imaged onto the photosensitive elements (58) of a solid state array camera (56) by an objective lens (34). In accomplishing this, the input beam (12) is transformed by a lens (14) into a spherically converging wavefront (16) which is focused onto a rotating diffuser disk (18) to significantly reduce the spatial coherence of the resultant spherically diverging wavefront (22) which is transformed by a lens (26) into a spherically converging wavefront (28) which is totally reflected by a polarizing beamsplitter (30) to produce a diverging wavefront (32). This wavefront (32) is transformed into a collimated wavefront (36) by the lens (34) and enters a quarter-wave phase retardation plate (38) which has an antireflection coating on this surface (40) with the other surface (42) being a flat reference surface. Objective lens (34) transforms the resulting wavefronts (52R) and (52M) into spherical wavefronts (53R) and (52M) which are transmitted as wavefronts (54R) and (54M) by beamsplitter (30) and fall onto the elements (58) of the imaging device (56).
Inventors
- 👤 James F. Biegen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 02:02
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/24; G01B11/2441; G01B9/00; G01B9/02; G01B9/02055; G01B9/02056; G01B9/02057; G01B9/0209; G01B2290/00; G01B2290/70
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
240 words
An interferometric profiler capable of measuring the topography of a surface under test comprising a source of a first spatially coherent linearly polarized input beam; means optically aligned with said input beam for significantly reducing the spatial coherence of said input beam; means optically aligned with said coherence reduced input beam for producing a linearly polarized collimated second beam which has significantly reduced spatial coherence; means optically aligned with said surface under test and said second beam for splitting said second beam into a linearly polarized, reflected reference wavefront and a circularly polarized, transmitted measurement wavefront; said second beam splitting means including a flat reference surface spaced from said surface under test; means for varying the spacing between said reference surface and said surface under test; means optically aligned with said reference surface and sa id surface under test for recombining said reference wavefront and said measurement wavefront after it interacts with said surface under test; an imaging device optically aligned with said surface under test for photosensing and viewing either alignment spots or an interference pattern produced from said recombined reference and measurement wavefronts; means for imaging said surface under test onto said photosensitive elements; said imaging means comprising means for bringing a very smooth surface under test into focus onto said photosensitive elements; and means operatively connected to said imaging means for processing the output of said imaging device for providing a profile of said surface under test.
Claim 2
Dependent Claim
240 words
An interferometric profiler capable of measuring the topography of a surface under test comprising a source of a first spatially coherent linearly polarized input beam; means optically aligned with said input beam for significantly reducing the spatial coherence of said input beam; means optically aligned with said coherence reduced input beam for producing a linearly polarized collimated second beam which has significantly reduced spatial coherence; means optically aligned with said surface under test and said second beam for splitting said second beam into a linearly polarized, reflected reference wavefront and a circularly polarized, transmitted measurement wavefront; said second beam splitting means including a flat reference surface spaced from said surface under test; means for varying the spacing between said reference surface and said surface under test; means optically aligned with said reference surface and sa id surface under test for recombining said reference wavefront and said measurement wavefront after it interacts with said surface under test; an imaging device optically aligned with said surface under test for photosensing and viewing either alignment spots or an interference pattern produced from said recombined reference and measurement wavefronts; means for imaging said surface under test onto said photosensitive elements; said imaging means comprising means for bringing a very smooth surface under test into focus onto said photosensitive elements; and means operatively connected to said imaging means for processing the output of said imaging device for providing a profile of said surface under test.
Claim 3
Dependent Claim
43 words
An interferometric profiler in accordance with claim 1 further comprising means for focusing said reference wavefront and said measurement wavefront after it interacts with said surface under test as spots for achieving angular alignment of said surface under test and said reference surface.
Claim 4
Dependent Claim
16 words
An interferometric profiler in accordance with claim 2 wherein said input beam source is a laser.
Claim 5
Dependent Claim
73 words
An interferometric profiler in accordance with claim 2 wherein said means for significantly reducing said input beam spatial coherence comprises lens means for transforming said input beam into a spherically converging wavefront, a diffuser disk, said lens focusing said spherically converging wavefront on to said disk for producing a wavefront which is scattered from said disk, and means for rotating said disk for significantly reducing the spatial coherence of said spherically diverging wavefront.
Claim 6
Dependent Claim
56 words
An interferometric profiler in accordance with claim 4 wherein said second beam producing means comprises a lens for transforming said spherically diverging wavefront into a spherically converging wavefront, a polarizing beamsplitter for totally reflecting said spherically converging wavefront for producing a diverging wavefront and an objective lens for transforming said diverging wavefront into said collimated wavefront.
Claim 7
Dependent Claim
47 words
An interferometric profiler in accordance with claim 5 wherein said second beam splitting means comprises a quarter-wave retardation plate having a first surface having an antireflection coating and a second surface which is closest to said surface under test, said second surface comprising said flat reference surface.
Claim 8
Dependent Claim
18 words
An interferometric profiler in accordance with claim 6 wherein said surface spacing varying means comprises a piezoelectric transducer.
Claim 9
Dependent Claim
17 words
An interferometric profiler in accordance with claim 7 wherein said imaging device comprises a solid-state array camera.
Claim 10
Dependent Claim
30 words
An interferometric profiler in accordance with claim 8 wherein said means for bringing said very smooth surface under test into focus onto said photosensitive elements comprises a variable aperture iris.
Claim 11
Dependent Claim
16 words
An interferometric profiler in accordance with claim 1 wherein said input beam source is a laser.
Claim 12
Dependent Claim
73 words
An interferometric profiler in accordance with claim 10 wherein said means for significantly reducing said input beam spatial coherence comprises lens means for transforming said input beam into a spherically converging wavefront, a diffuser disk, said lens focusing said spherically converging wavefront on to said disk for producing a wavefront which is scattered from said disk, and means for rotating said disk for significantly reducing the spatial coherence of said spherically diverging wavefront.
Claim 13
Dependent Claim
56 words
An interferometric profiler in accordance with claim 11 wherein said second beam producing means comprises a lens for transforming said spherically diverging wavefront into a spherically converging wavefront, a polarizing beamsplitter for totally reflecting said spherically converging wavefront for producing a diverging wavefront and an objective lens for transforming said diverging wavefront into said collimated wavefront.
Claim 14
Dependent Claim
47 words
An interferometric profiler in accordance with claim 12 wherein said second beam splitting means comprises a quarterwave retardation plate having a first surface having an antireflection coating and a second surface which is closest to said surface under test, said second surface comprising said flat reference surface.
Claim 15
Dependent Claim
18 words
An interferometric profiler in accordance with claim 13 wherein said surface spacing varying means comprises a piezoelectric transducer.
Claim 16
Dependent Claim
17 words
An interferometric profiler in accordance with claim 14 wherein said imaging device comprises a solid-state array camera.
Claim 17
Dependent Claim
30 words
An interferometric profiler in accordance with claim 15 wherein said means for bringing said very smooth surface under test into focus onto said photosensitive elements comprises a variable aperture iris.
Claim 18
Dependent Claim
17 words
An interferometric profiler in accordance with claim 1 wherein said imaging device comprises a solid-state array camera.
Claim 19
Dependent Claim
30 words
An interferometric profiler in accordance with claim 17 wherein said means for bringing said very smooth surface under test into focus onto said photosensitive elements comprises a variable aperture iris.
Claim 20
Dependent Claim
30 words
An interferometric profiler in accordance with claim 1 wherein said means for bringing said very smooth surface under test into focus onto said photosensitive elements comprises a variable aperture iris.
Claim 21
Dependent Claim
16 words
An interferometric profiler in accordance with claim 19 wherein said input beam source is a laser.
Claim 22
Dependent Claim
17 words
An interferometric profiler in accordance with claim 20 wherein said imaging device comprises a solid-state array camera.
Claim 23
Dependent Claim
43 words
An interferometric profiler in accordance with claim 21 further comprising means for focusing said reference wavefront and said measurement wavefront after it interacts with said surface under test as spots for achieving angular alignment of said surface under test and said reference surface.
Claim 24
Dependent Claim
73 words
An interferometric profiler in accordance with claim 1 wherein said means for significantly reducing said input beam spatial coherence comprises lens means for transforming said input beam into a spherically converging wavefront, a diffuser disk, said lens focusing said spherically converging wavefront on to said disk for producing a wavefront which is scattered from said disk, and means for rotating said disk for significantly reducing the spatial coherence of said spherically diverging wavefront.
Claim 25
Dependent Claim
56 words
An interferometric profiler in accordance with claim 23 wherein said second beam producing means comprises a lens for transforming said spherically diverging wavefront into a spherically converging wavefront, a polarizing beamsplitter for totally reflecting said spherically converging wavefront for producing a diverging wavefront and an objective lens for transforming said diverging wavefront into said collimated wavefront.
Claim 26
Dependent Claim
47 words
An interferometric profiler in accordance with claim 24 wherein said second beam splitting means comprises a quarter-wave retardation plate having a first surface having an antireflection coating and a second surface which is closest to said surface under test, said second surface comprising said flat reference surface.
Claim 27
Dependent Claim
18 words
An interferometric profiler in accordance with claim 1 wherein said surface spacing varying means comprises a piezoelectric transducer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-03-22 | 1991-09-21 | 1992-03-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-03-22 | 1995-09-21 | 1996-03-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-03-22 | 1999-09-21 | 2000-03-22 | $7700.00 | Window Closed / Lapsed |