US4729970A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Conversion process for passivating short circuit current paths in semiconductor devices
Assignee: United Solar Systems Corp
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Filing: 1986-09-15
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Granted: 1988-03-08
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Expires: 2006-09-15
Abstract
Abstract An electronic device of the type including a thin film body having a superposed electrode has short circuit defects therein passivated by a conversion process in which the electrical resistivity of the electrode material is increased proximate the defect regions. Conversion is accomplished by exposing the electrode material to a conversion reagent and activating the reagent proximate the defect regions. The process may be utilized for a variety of differently configured devices, and may be readily adapted for use in a roll-to-roll device fabrication process.
Inventors
- 👤 Prem Nath
- 👤 Craig Vogeli
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 02:01
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/20; H10F77/244; H10D; H10D64/00; H10D64/01; H10D64/011; H10F71/00; H10F71/10; H10F71/129; H10F71/135; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02P; Y02P70/00; Y02P70/50; Y10; Y10S; Y10S136/00; Y10S136/29
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
112 words
A method of passivating short circuit defects in an electronic device of the type including a thin film body having a superposed electrode comprised of a layer of transparent, electrically conductive oxide material, said method including the steps of: providing a conversion reagent in contact with at least those portions of the electrode proximate said defects, said reagent adapted to convert the electrically conductive electrode material to a material of higher electrical resistivity; and activating said conversion reagent proximate said defects so as to alter the stoichiometry of the transparent conductive oxide material to the higher resistivity form, whereby said defect regions are substantially electrically isolated from the remainder of said electrode.
Claim 2
Independent Claim
112 words
A method of passivating short circuit defects in an electronic device of the type including a thin film body having a superposed electrode comprised of a layer of transparent, electrically conductive oxide material, said method including the steps of: providing a conversion reagent in contact with at least those portions of the electrode proximate said defects, said reagent adapted to convert the electrically conductive electrode material to a material of higher electrical resistivity; and activating said conversion reagent proximate said defects so as to alter the stoichiometry of the transparent conductive oxide material to the higher resistivity form, whereby said defect regions are substantially electrically isolated from the remainder of said electrode.
Claim 3
Dependent Claim
33 words
A method as in claim 1, wherein the step of activating the conversion reagent to alter the stoichiometry of the oxide material includes changing the number of oxygen vacancies in said oxide material.
Claim 4
Dependent Claim
24 words
A method as in claim 2, wherein the step of changing the number of oxygen vacancies comprises exposing said oxide material to reducing conditions.
Claim 5
Dependent Claim
24 words
A method as in claim 2, wherein the step of changing the number of oxygen vacancies comprises exposing said oxide material to oxidizing conditions.
Claim 6
Dependent Claim
48 words
A method as in claim 1, wherein the step of activating the conversion reagent includes the further step of passing an electrical current through at least the defect regions of the thin film body and into the superposed electrode so as to activate the conversion reagent proximate thereto.
Claim 7
Dependent Claim
45 words
A method as in claim 5, including the further steps of providing a counter-electrode disposed in electrical communication with the conversion reagent and the electrode of the device; and, providing a source of electrical current in electrical communication with the semiconductor body and the counter-electrode.
Claim 8
Dependent Claim
24 words
A method as in claim 1, wherein the step of activating the conversion reagent includes the step of heating the reagent proximate said defects.
Claim 9
Dependent Claim
25 words
A method as in claim 1, wherein the step of activating the conversion reagent includes the step of illuminating the conversion reagent proximate said defects.
Claim 10
Independent Claim
112 words
A method of passivating short circuit defects in an electronic device of the type including a thin film body having a superposed electrode comprised of a layer of electrically conductive material, said method including the steps of: providing a conversion reagent, including therein a Lewis Acid, in contact with at least those portions of the electrode proximate said defects, said reagent adapted to convert the electrically conductive electrode material to a material of higher electrical resistivity; and activating said conversion reagent proximate said defects so as to facilitate conversion of the electrode material to the higher resistivity form, whereby said defect regions are substantially electrically isolated from the remainder of said electrode.
Claim 11
Independent Claim
112 words
A method of passivating short circuit defects in an electronic device of the type including a thin film body having a superposed electrode comprised of a layer of electrically conductive material, said method including the steps of: providing a conversion reagent, including therein a Lewis Acid, in contact with at least those portions of the electrode proximate said defects, said reagent adapted to convert the electrically conductive electrode material to a material of higher electrical resistivity; and activating said conversion reagent proximate said defects so as to facilitate conversion of the electrode material to the higher resistivity form, whereby said defect regions are substantially electrically isolated from the remainder of said electrode.
Claim 12
Independent Claim
115 words
A method of passivating short circuit defects in an electronic device of the type including a thin film body having a superposed electrode comprised of a layer of electrically conductive material, said method including the steps of: providing a conversion reagent, including therein a salt of an amphoteric element, in contact with at least those portions of the electrode proximate said defects, said reagent adapted to convert the electrically conductive electrode material to a material of higher electrical resistivity; and activating said conversion reagent proximate said defects so as to facilitate conversion of the electrode material to the higher resistivity form, whereby said defect regions are substantially electrically isolated from the remainder of said electrode.
Claim 13
Independent Claim
115 words
A method of passivating short circuit defects in an electronic device of the type including a thin film body having a superposed electrode comprised of a layer of electrically conductive material, said method including the steps of: providing a conversion reagent, including therein a salt of an amphoteric element, in contact with at least those portions of the electrode proximate said defects, said reagent adapted to convert the electrically conductive electrode material to a material of higher electrical resistivity; and activating said conversion reagent proximate said defects so as to facilitate conversion of the electrode material to the higher resistivity form, whereby said defect regions are substantially electrically isolated from the remainder of said electrode.
Claim 14
Dependent Claim
38 words
A method as in claim 10, including the further step of selecting said salt from the group consisting essentially of: AlCl 3 , ZnCl 2 , SnCl 4 , SnCl 2 , TiCl 4 , and combinations thereof.
Claim 15
Dependent Claim
20 words
A method as in claim 10, wherein the step of providing a conversion reagent comprises providing an aqueous conversion reagent.
Claim 16
Dependent Claim
23 words
A method as in claim 10, wherein the step of providing a conversion reagent comprises providing a reagent including a non-aqueous solvent therein.
Claim 17
Dependent Claim
41 words
A method as in claim 10, wherein the electronic device includes at least one latent defect therein, said method including the further step of: activating said at least one latent defect so as to convert it to a short circuit defect.
Claim 18
Dependent Claim
21 words
A method as in claim 14, wherein the step of activating latent defects includes passing an electrical current through said defects.
Claim 19
Dependent Claim
20 words
A method as in claim 14, wherein said latent defects are activated prior to the activation of said conversion reagent.
Claim 20
Dependent Claim
20 words
A method as in claim 14, wherein said latent defects are activated concomitant with the activation of said conversion reagent.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-03-08 | 1991-09-07 | 1992-03-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-03-08 | 1995-09-07 | 1996-03-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-03-08 | 1999-09-07 | 2000-03-08 | $7700.00 | Window Closed / Lapsed |