US4728529A
Expired / Lapsed
US
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Method of producing diamond-like carbon-coatings
Assignee: Battelle-Institut
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Filing: 1985-06-07
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Granted: 1988-03-01
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Expires: 2005-06-07
Abstract
Abstract Diamond-like, transparent, clear and uncolored carbon coatings with low internal stresses are generated on substrates by plasma discharge from the gas phase. For this purpose, a hydrocarbon gas or a mixture of hydrocarbon gases and pure hydrogen is admitted onto the substrate to be coated which is at room temperature. Around the substrate an oxygen-free plasma discharge is produced by high-frequency excitation which is sustained by the gases admitted. The gases are excited, dissociated ionized and accelerated toward the substrate during plasma discharge.
Inventors
- 👤 Heinz-Werner Etzkorn
- 👤 Werner Ronge
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 05:10
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/22; C23; C23C; C23C16/00; C23C16/22; C23C16/26; G; G02; G02B; G02B1/00; G02B1/10; G02B1/11; G02B1/111; G02B1/14; C03C2217/00; C03C2217/20; C03C2217/28; C03C2217/282; C03C2218/00; C03C2218/10; C03C2218/15; C03C2218/152; C03C2218/153
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
130 words
Method of producing diamond-like carbon coatings in which hydrocarbons and hydrogen, possible in the presence of a noble gas, are ionized by plasma discharge, comprising placing a substrate to be coated in a coating apparatus and evacuating the apparatus to a residual gas pressure of below 2×10 -5 mbar, then passing a hydrocarbon gas or a mixture of hydrocarbon gases and pure hydrogen onto the substrate to be coated which is at room temperature or cooled down to -100° C., and producing around the substrate an oxygen-free plasma discharge by high-frequency excitation which is sustained by the gases admitted, the gases being excited, dissociated, ionized and accelerated toward the substrate during the plasma discharge, wherein the partial pressure of the hydrocarbon gas is adjusted between 10 -3 and 1 mbar.
Claim 2
Dependent Claim
130 words
Method of producing diamond-like carbon coatings in which hydrocarbons and hydrogen, possible in the presence of a noble gas, are ionized by plasma discharge, comprising placing a substrate to be coated in a coating apparatus and evacuating the apparatus to a residual gas pressure of below 2×10 -5 mbar, then passing a hydrocarbon gas or a mixture of hydrocarbon gases and pure hydrogen onto the substrate to be coated which is at room temperature or cooled down to -100° C., and producing around the substrate an oxygen-free plasma discharge by high-frequency excitation which is sustained by the gases admitted, the gases being excited, dissociated, ionized and accelerated toward the substrate during the plasma discharge, wherein the partial pressure of the hydrocarbon gas is adjusted between 10 -3 and 1 mbar.
Claim 3
Dependent Claim
20 words
Methods as claimed in claim 1 wherein the ratio of the partial pressures of hydrocarbons:hydrogen being between 0.05 and 20.
Claim 4
Dependent Claim
20 words
Method as claimed in claim 1 wherein the ratio of the partial pressures of hydrocarbon:hydrogen being between 0.5 and 10.
Claim 5
Dependent Claim
21 words
Method as claimed in claim 1 wherein the ratio of the partial pressures of hydrocarbon:noble gas ranges between 0.1 and 10.
Claim 6
Dependent Claim
26 words
Method as claimed in claim 4 wherein the noble gas is argon and the ratio for the partial pressures of hydrocarbon:argon is between 1 and 5.
Claim 7
Dependent Claim
18 words
Method as claimed in claim 1 wherein the substrate to be coated is cooled down to -100° C.
Claim 8
Dependent Claim
20 words
Method as claimed in claim 6 wherein the substrate to be coated is cooled down to 10° to 20° C.
Claim 9
Dependent Claim
20 words
Method as claimed in claim 1 wherein plasma discharge is carried out at a voltage of 50 to 600 V.
Claim 10
Dependent Claim
20 words
Method as claimed in claim 8 wherein plasma discharge is carried out at a voltage of 150 to 250 V.
Claim 11
Dependent Claim
26 words
Method as claimed in claim 1 wherein frequencies in the kilohertz to megahertz range, preferably between 30 KHz and 14 MHz, are used for plasma discharge.
Claim 12
Dependent Claim
19 words
Method as claimed in claim 10 wherein frequencies between 30 KHz and 14 MHz are used for plasma discharge.
Claim 13
Dependent Claim
36 words
Method as claimed in claim 1 wherein coating is carried out intermittently, during the temporary interruptions of the coating process the hydrocarbon supply being discontinued so that the substrate is bombarded with noble gas and/or hydrogen.
Claim 14
Dependent Claim
43 words
Method as claimed in claim 1 wherein the substrate is coated during 1 s. to 20 min., that the admission of hydrocarbons is interrupted during 1 s. to 10 min. and that this procedure is repeated until the desired film thickness is achieved.
Claim 15
Dependent Claim
43 words
Method as claimed in claim 13 wherein the substrate is coated during 2 s. to 2 min., that the admission of hydrocarbons is interrupted during 1 s. to 1 min. and that this procedure is repeated until the desired film thickness is achieved.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-03-01 | 1991-08-31 | 1992-03-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-03-01 | 1995-08-31 | 1996-03-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-03-01 | 1999-08-31 | 2000-03-01 | $7700.00 | Window Closed / Lapsed |