Ground corona comb

Claim 2

A ground corona comb in an ionized fluid cleaning apparatus, the ionized fluid cleaning apparatus including a nozzle for directing a jet of ionized fluid toward a workpiece carrying debris, and a suction pipe having an opening therein for withdrawing the debris dislodged by the jet of ionized fluid, said ground corona comb comprising: a plate, formed of electrically conductive material, having a jagged edge disposed adjacent to and separated from the workpiece; and grounding means for electrically grounding said plate.

Claim 3

A ground corona comb as recited in claim 1, wherein said plate is disposed downstream of the nozzle supplying the jet of ionized fluid.

Claim 4

A ground corona comb as recited in claim 2, further comprising attachment means for attaching said plate to the suction pipe adjacent the opening therein.

Claim 5

A ground corona comb as recited in claim 3, wherein the jet of ionized fluid is deflected by the workpiece into a deflected stream, and wherein said plate is disposed in a position channeling the deflected stream toward the opening in said suction pipe.

Claim 6

A ground corona comb as recited in claim 4, wherein the ionized fluid cleaning apparatus further comprises additional nozzles, providing jets of ionized fluid, having tips aligned along a line, and wherein said plate is substantially parallel to the line of the tips of the additional nozzles.

Claim 7

A ground corona comb as recited in claim 4, wherein the workpiece has a deflection surface deflecting the jet of ionized fluid, and wherein the jagged edge of said plate conforms to the deflection surface of the workpiece.

Claim 8

An ionized fluid cleaning apparatus for removing debris from a workpiece, comprising: pressurized means for directing jets of ionized fluid at the workpiece to dislodge the debris; vacuum means for suctioning the debris dislodged by the jets of ionized fluid; and a ground corona comb, formed from electrically conductive material and operatively connected to electrical ground, having a jagged edge disposed adjacent to and separate from the workpiece.

Claim 9

An ionized fluid cleaning apparatus for removing debris from a workpiece, comprising: pressurized means for directing jets of ionized fluid at the workpiece to dislodge the debris; vacuum means for suctioning the debris dislodged by the jets of ionized fluid; and a ground corona comb, formed from electrically conductive material and operatively connected to electrical ground, having a jagged edge disposed adjacent to and separate from the workpiece.

Claim 10

An ionized fluid cleaning apparatus as recited in claim 7, wherein said ground corona comb comprises: a plate having a first edge providing the jagged edge and a second edge opposite the first edge; and grounding means for electrically grounding said plate.

Claim 11

An ionized fluid cleaning apparatus as recited in claim 8, wherein said pressurized means directs the jets of ionized fluid along a first plane until deflected by a deflection surface of the workpiece, and wherein said plate is disposed in a second plane intersecting the first plane along an intersection line located upstream from the deflection surface.

Claim 12

An ionized fluid cleaning apparatus as recited in claim 9, wherein the intersection line is substantially parallel to the workpiece.

Claim 13

An ionized fluid cleaning apparatus as recited in claim 9, wherein the workpiece is conveyed through said ionized fluid cleaning apparatus in a conveyance direction from an entrance to an exit, wherein the jets of ionized fluid are directed along vectors, each having a first component in a first direction toward the workpiece and a second component in a second direction opposite to the conveyance direction, and wherein said plate is disposed at a first distance from the entrance and the deflection surface is located at a second distance, greater than the first distance, from the entrance.

Claim 14

An ionized fluid cleaning apparatus as recited in claim 9, wherein the jagged edge of said plate conforms to the deflection surface of the workpiece.

Claim 15

An ionized fluid cleaning apparatus as recited in claim 7, wherein the workpiece is rotated around a rotation axis within said ionized fluid cleaning apparatus, wherein said vacuum means is disposed symmetrically around the rotation axis of the workpiece, and wherein said ground corona comb comprises a band of metal having a jagged inner edge and an outer edge attached to said vacuum means.

Claim 16

An ionized fluid cleaning apparatus as recited in claim 13, wherein the workpiece is disk-shaped, wherein said vacuum means comprises: a vacuum source for providing suction; and a fluid conduit, coupled to said vacuum source, having a thick pancake shape with top and bottom surfaces and a central opening symmetrically formed around the rotation axis, the workpiece being substantially aligned during cleaning with the bottom surface of said fluid conduit, the outer edge of said ground corona comb being attached to the top surface of said fluid conduit, and wherein said pressurized means comprises: a pair of pipes, disposed above the top surface of said fluid conduit, having parallel central axes defining a plane substantially perpendicular to the rotation axis, the central axes of said pair of pipes disposed substantially equidistant from the rotational axis at a distance smaller than the radius of the disk-shaped workpiece; and nozzles, coupled to said pair of pipes substantially perpendicular to the central axes of said pair of pipes, for directing the jets of ionized fluid nonperpendicularly toward the workpiece.

Claim 17

An ionized fluid cleaning apparatus for removing debris from workpieces, having upper and lower surfaces, said apparatus comprising: conveyance means for conveying the workpieces through said ionized fluid cleaning apparatus in a conveyance direction from an entrance to an exit; first and second pressurized means disposed above the conveyance means for directing jets of ionized fluid along substantially parallel first and second planes toward the workpieces to dislodge the debris from the upper surface of the workpieces, said second pressurized means following said first pressurized means in the conveyance direction; first, second and third vacuum means, disposed above said conveyance means, said first vacuum means preceding said first pressurized means in the conveyance direction, said second vacuum means disposed between said first and second pressurized means and said third vacuum means following said second pressurized means in the conveyance direction; third pressurized means disposed below said conveyance means, for dislodging debris from the lower surface of the workpieces; fourth vacuum means, disposed below said conveyance means and preceding said third pressurized means in the conveyance direction, for suctioning the debris dislodged by the jets of ionized fluid issuing from said third pressurized means; and ground corona combs, attached to said first through fourth vacuum means, formed from electrically conductive material and operatively connected to electrical ground, having a jagged edge disposed adjacent to and separated from the workpieces.

Claim 18

An ionized fluid cleaning apparatus for removing debris from workpieces, having upper and lower surfaces, said apparatus comprising: conveyance means for conveying the workpieces through said ionized fluid cleaning apparatus in a conveyance direction from an entrance to an exit; first and second pressurized means disposed above the conveyance means for directing jets of ionized fluid along substantially parallel first and second planes toward the workpieces to dislodge the debris from the upper surface of the workpieces, said second pressurized means following said first pressurized means in the conveyance direction; first, second and third vacuum means, disposed above said conveyance means, said first vacuum means preceding said first pressurized means in the conveyance direction, said second vacuum means disposed between said first and second pressurized means and said third vacuum means following said second pressurized means in the conveyance direction; third pressurized means disposed below said conveyance means, for dislodging debris from the lower surface of the workpieces; fourth vacuum means, disposed below said conveyance means and preceding said third pressurized means in the conveyance direction, for suctioning the debris dislodged by the jets of ionized fluid issuing from said third pressurized means; and ground corona combs, attached to said first through fourth vacuum means, formed from electrically conductive material and operatively connected to electrical ground, having a jagged edge disposed adjacent to and separated from the workpieces.

Claim 19

An ionized fluid cleaning apparatus as recited in claim 15, wherein said first through third pressure means and said first through fourth vacuum means all comprise pipes substantially parallel to each other and perpendicular to the conveyance direction.

Claim 20

A ground corona comb in an ionized fluid cleaning apparatus, the ionized fluid cleaning apparatus including a nozzle for directing a jet of ionized fluid toward a workpiece carrying charged debris, and a suction pipe having an opening therein for withdrawing the charged debris dislodged by the jet of ionized fluid, said ground corona comb comprising: a plate, formed of electrically conductive material, having a jagged edge disposed adjacent to and separated from the workpiece; and grounding means for electrically grounding said plate to accelerate electrical discharge of the ionized fluid and for forming a dense electrical field around the jagged edges of said plate, the dense electrical field having a polarity opposite to that of the charged debris dislodged by the jet of ionized fluid.

Claim 21

A ground corona comb in an ionized fluid cleaning apparatus, the ionized fluid cleaning apparatus including a nozzle for directing a jet of ionized fluid toward a workpiece carrying charged debris, and a suction pipe having an opening therein for withdrawing the charged debris dislodged by the jet of ionized fluid, said ground corona comb comprising: a plate, formed of electrically conductive material, having a jagged edge disposed adjacent to and separated from the workpiece; and grounding means for electrically grounding said plate to accelerate electrical discharge of the ionized fluid and for forming a dense electrical field around the jagged edges of said plate, the dense electrical field having a polarity opposite to that of the charged debris dislodged by the jet of ionized fluid.