Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
202 words
Wafer processing cassette comprising: a. inwardly angled, downwardly extending sides, each of which includes at least one horizontal support and at least two rows of wash slots being located at different horizontal levels a plurality of opposing dividers each having a tooth-shaped cross section and extending inwardly from each of said sides, said wash slots extending vertically between each of said dividers, lower edge members secured to each of said sides, each of said edge members including a conforming radius seat area for accepting a specific radius size of the wafer, each of said dividers having an upper portion located at upper wash slots and having a lower portion located at lower wash slots, the cross section of the upper portion being longer than the cross section of the lower portion, the cross section of the upper portion having facing interior side surfaces that are oriented at a smaller angle than facing interior side surfaces of the cross section of the lower portion; b. a rear end extending between said two sides and including an inverted large reversed arch extending downwardly; and, c. a front end member extending horizontally between said two sides, and including a partial section of a cylindrical rod.
Claim 2
Dependent Claim
202 words
Wafer processing cassette comprising: a. inwardly angled, downwardly extending sides, each of which includes at least one horizontal support and at least two rows of wash slots being located at different horizontal levels a plurality of opposing dividers each having a tooth-shaped cross section and extending inwardly from each of said sides, said wash slots extending vertically between each of said dividers, lower edge members secured to each of said sides, each of said edge members including a conforming radius seat area for accepting a specific radius size of the wafer, each of said dividers having an upper portion located at upper wash slots and having a lower portion located at lower wash slots, the cross section of the upper portion being longer than the cross section of the lower portion, the cross section of the upper portion having facing interior side surfaces that are oriented at a smaller angle than facing interior side surfaces of the cross section of the lower portion; b. a rear end extending between said two sides and including an inverted large reversed arch extending downwardly; and, c. a front end member extending horizontally between said two sides, and including a partial section of a cylindrical rod.
Claim 3
Dependent Claim
20 words
Cassette of claim 1 wherein said horizontal supports include an upper and a lower horizontal support, each beveled in cross-section.
Claim 4
Dependent Claim
16 words
Cassette of claim 2 wherein said wash slots comprise three horizontal groups between said horizontal supports.
Claim 5
Dependent Claim
23 words
Cassette of claim 2 wherein said lower horizontal support is a rod extending adjacent to the outer edge of each of said dividers.
Claim 6
Dependent Claim
18 words
Cassette of claim 1 including a plurality of drains positioned at a lower portion of said rear end.
Claim 7
Dependent Claim
27 words
Cassette of claim 1 comprising integral channel means positioned on an interior side of said rear end for channeling fluid from said rear end to said drains.
Claim 8
Dependent Claim
16 words
Cassette of claim 1 comprising a plurality of fluid drainage slots in said lower edge members.
Claim 9
Dependent Claim
17 words
Cassette of claim 1 wherein said inwardly extending teeth of each of said dividers are radiusly vertexed.
Claim 10
Dependent Claim
18 words
Cassette of claim 1 wherein all surfaces are rounded and smooth, providing for rapid fluid flow and transfer.