US4723507A
Expired / Lapsed
US
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Isolation passageway including annular region
Assignee: United Solar Systems Corp
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Filing: 1986-01-16
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Granted: 1988-02-09
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Expires: 2006-01-16
Abstract
Abstract A passageway which includes an annular region, the passageway adapted to isolate the gaseous contents of one of a pair of adjacent, vacuumized environments from the other of the pair while providing for the movement of a substrate therebetween.
Inventors
- 👤 Herbert L. Ovshinsky
- 👤 David A. Gattuso
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 05:53
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0478; C; C23; C23C; C23C16/00; C23C16/44; C23C16/54; C23C16/545; H10P72/0402; H10P72/0441; H10P72/0451; H10P72/0468; Y; Y10; Y10S; Y10S118/00; Y10S118/90
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
185 words
An isolation passageway for substantially preventing the diffusion of gases from the first of a pair of adjacent vacuumized environments into the second of said pair of vacuumized environments, said first environment differing from the second by the presence of at least one element: said passageway: (1) defined by closely spaced walls; (2) adapted to provide for the movement of a substrate therethrough along a path interconnecting said environments; (3) being substantially annular in a cross-section of a central region of said passageway, said cross-section taken in a plane extending in the direction of said path; one boundary of the annular region being formed by a cylindrical drum; (4) adapted to maintain at least a 10 4 ratio of the concentration of said at least one element in said first environment as compared to the concentration thereof in said second environment; (5) including means for urging one surface of the substrate traveling through the passageway into contact with the circumferential surface of said drum; and (6) the circumferential surface of said drum having a plurality of circumferential grooves spacedly positioned across the longitudinal extent thereof.
Claim 2
Dependent Claim
185 words
An isolation passageway for substantially preventing the diffusion of gases from the first of a pair of adjacent vacuumized environments into the second of said pair of vacuumized environments, said first environment differing from the second by the presence of at least one element: said passageway: (1) defined by closely spaced walls; (2) adapted to provide for the movement of a substrate therethrough along a path interconnecting said environments; (3) being substantially annular in a cross-section of a central region of said passageway, said cross-section taken in a plane extending in the direction of said path; one boundary of the annular region being formed by a cylindrical drum; (4) adapted to maintain at least a 10 4 ratio of the concentration of said at least one element in said first environment as compared to the concentration thereof in said second environment; (5) including means for urging one surface of the substrate traveling through the passageway into contact with the circumferential surface of said drum; and (6) the circumferential surface of said drum having a plurality of circumferential grooves spacedly positioned across the longitudinal extent thereof.
Claim 3
Dependent Claim
30 words
A passageway as in claim 1, wherein the circumferential surface of said drum which contacts the surface of the substrate is fabricated from a low friction, low thermal conductivity material.
Claim 4
Dependent Claim
18 words
A passageway as in claim 2, wherein said circumferential surface of said drum is formd of borosilicate glass.
Claim 5
Dependent Claim
28 words
A passageway as in claim 3, wherein the substrate is formed from a magnetic material and the substrate is urged into contact with the glass by magnetic attraction.
Claim 6
Dependent Claim
35 words
A passageway as in claim 1, wherein each of the adjacent environments is developed and maintained in a dedicated chamber, each chamber adapted to deposit thim film layers of semiconductor alloy material onto the substrate.
Claim 7
Dependent Claim
22 words
A passageway as in claim 1, further including means for vacuumizing the environments to a pressure of about 0.25 to 1 torr.
Claim 8
Dependent Claim
20 words
A passageway as in claim 1, further including roller means for urging the substrate into contact with said circumferential surface.
Claim 9
Dependent Claim
25 words
A passageway as in claim 1, further including means for introducing sweep gas into a first flow channel formed between the grooves and the substrate.
Claim 10
Dependent Claim
45 words
A passageway as in claim 8, wherein the introducing means is adapted to initiate and sustain a flow of sweep gas at a velocity sufficient to substantially prevent the diffusion of process gas from the first environment to the second environment through said first channel.
Claim 11
Dependent Claim
36 words
A passageway as in claim 9, wherein the introducing means comprises a source of relatively inert gas and an introductory manifold; and said first channel includes aperture means for receiving sweep gas from said introductory manifold.
Claim 12
Dependent Claim
32 words
A passageway as in claim 8, further including means for introducing sweep gas into a second flow channel formed between the substrate and the surface of the passageway opposite said circumferential surface.
Claim 13
Dependent Claim
51 words
A passageway as in claim 11, wherein the introducing means is adapted to initiate and sustain a flow of sweep gas through the second channel of the passageway at a velocity sufficient to substantially prevent the diffusion of process gas from the first to the second environment through said second channel.
Claim 14
Dependent Claim
36 words
A passageway as in claim 12, wherein the introducing means comprises a source of relatively inert gas and an introductory manifold; and said second channel includes aperture means for receiving sweep gas from said introductory manifold.
Claim 15
Dependent Claim
34 words
A passageway as in claim 1, further including means for subjecting the surface of the substrate not urged into contact with said circumferential surface to a plasma as said substrate moves through said passageway.
Claim 16
Dependent Claim
46 words
A passageway as in claim 14, wherein the first environment is a first chamber adapted for the deposition of a first layer of semiconductor alloy material and the second environment is a second chamber adapted for the deposition of a second layer of semiconductor alloy material.
Claim 17
Dependent Claim
32 words
A passageway as in claim 15, wherein the subjecting means is adapted to develop and sustain a hydrogen plasma for capping the surface of the previously deposited layer of semiconductor alloy material.
Claim 18
Dependent Claim
24 words
A passageway as in claim 16, wherein the subjecting means includes a cathode operatively coupled to an r.f. power supply for developing said plasma.
Claim 19
Dependent Claim
25 words
A passageway as in claim 16, wherein the subjecting means includes an antenna operatively coupled to a source of microwave energy for developing said plasma.
Claim 20
Dependent Claim
20 words
A passageway as in claim 1, wherein the ends of the cylindrical drum are leak-proofed by an annularly-shaped end seal.
Claim 21
Dependent Claim
18 words
A passageway as in claim 19, wherein each of the end seals include a pair of spaced O-rings.
Claim 22
Dependent Claim
20 words
A passageway as in claim 20, wherein a pump is provided to evacuate the space between each of the O-rings.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-02-08 | 1991-08-10 | 1992-02-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-02-08 | 1995-08-10 | 1996-02-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-02-08 | 1999-08-10 | 2000-02-09 | $7700.00 | Window Closed / Lapsed |