US4722298A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Modular processing apparatus for processing semiconductor wafers
Assignee: Machine Technology Inc
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Filing: 1986-05-19
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Granted: 1988-02-02
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Expires: 2006-05-19
Abstract
Abstract A self-contained modular processing apparatus is disclosed for processing workpieces, and in particular, silicon wafers. The apparatus is constructed of framed modules which plug into a service facility docking subassembly and interlock therewith to make up a complete modular processing system for wafer processing. Each module may be provided with its own wafer transporting mechanism and includes a built-in CPU such that each module is an independent, stand-alone processing unit. Each processing unit, by being capable of independent operation, functions as a building block to configure a modular processing system capable of handling wafer flow in multiple directions while performing a multitude of processing functions or operations. Individual modules are arranged along a line of single fold symmetry such that a single transport mechanism may be employed for transferring wafers among adjacent modules.
Inventors
- 👤 Richard H. Rubin
- 👤 Benjamin J. Petrone
- 👤 Richard C. Heim
- 👤 Scott M. Pawenski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 06:26
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/33; H10P72/3306; H10P72/04; H10P72/0451; H10P72/0452; H10P72/0462; H10P72/0464; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137; Y10S414/139
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
102 words
A modular processing apparatus comprising a chassis having a pair of diagonal axes, a module attached to said chassis for performing at least one operation on a workpiece to be processed, transfer means attached to said chassis for transferring said workpiece from said module to a location remote therefrom for performing at least another operation on said workpiece, said module and said transfer means arranged along one of said axes and asymmetrically with respect to another of said axes, whereby the distance between said module and said transfer means is substantially equal to the distance between said transfer means and said location.
Claim 2
Dependent Claim
102 words
A modular processing apparatus comprising a chassis having a pair of diagonal axes, a module attached to said chassis for performing at least one operation on a workpiece to be processed, transfer means attached to said chassis for transferring said workpiece from said module to a location remote therefrom for performing at least another operation on said workpiece, said module and said transfer means arranged along one of said axes and asymmetrically with respect to another of said axes, whereby the distance between said module and said transfer means is substantially equal to the distance between said transfer means and said location.
Claim 3
Dependent Claim
20 words
The modular processing apparatus of claim 1, wherein said transfer means is rotatable about its attached location on said chassis.
Claim 4
Dependent Claim
14 words
The modular processing apparatus of claim 1, wherein said workpiece comprises a silicon wafer.
Claim 5
Dependent Claim
24 words
The modular processing apparatus of claim 1, wherein said transfer means comprises an extendable arm having a free end adapted for engaging said workpiece.
Claim 6
Dependent Claim
23 words
The modular processing apparatus of claim 1, wherein said module and said transfer means are arranged symmetrically about said one of said axes.
Claim 7
Dependent Claim
137 words
A modular processing apparatus comprising a first chassis having a pair of diagonal axes, a first module attached to said first chassis for performing at least one operation on a workpiece to be processed, a second chassis having a pair of diagonal axes, a second module attached to said second chassis for performing at least one operation on said workpiece to be processed, and transfer means attached to one of said first or second chassis for transferring said workpiece between said first module and said second module, said first module, said second module and said transfer means arranged along one of said axes and asymmetrically with respect to another of said axes, whereby the distance between said first module and said transfer means is substantially equal to the distance between said transfer means and said second module.
Claim 8
Dependent Claim
137 words
A modular processing apparatus comprising a first chassis having a pair of diagonal axes, a first module attached to said first chassis for performing at least one operation on a workpiece to be processed, a second chassis having a pair of diagonal axes, a second module attached to said second chassis for performing at least one operation on said workpiece to be processed, and transfer means attached to one of said first or second chassis for transferring said workpiece between said first module and said second module, said first module, said second module and said transfer means arranged along one of said axes and asymmetrically with respect to another of said axes, whereby the distance between said first module and said transfer means is substantially equal to the distance between said transfer means and said second module.
Claim 9
Dependent Claim
27 words
The modular processing apparatus of claim 6, wherein said first module, said second module and said transfer means are arranged symmetrically about said one of said axes.
Claim 10
Dependent Claim
14 words
The modular processing apparatus of claim 6, wherein said workpiece comprises a silicon wafer.
Claim 11
Dependent Claim
24 words
The modular processing apparatus of claim 6, wherein said transfer means comprises an extendable arm having a free end adapted for engaging said workpiece.
Claim 12
Dependent Claim
20 words
The modular processing apparatus of claim 6, wherein said transfer means is rotatable about its attached location on said chassis.
Claim 13
Dependent Claim
28 words
The modular processing apparatus of claim 6, further including another of said transfer means attached to another of said first or second chassis for transferring said workpiece therebetween.
Claim 14
Dependent Claim
136 words
A modular processing apparatus comprising a first chassis having a pair of first diagonal axes, a first module attached to said first chassis and arranged symmetrically about one of said first diagonal axes, a second chassis having a pair of second diagonal axes, a second module attached to said second chassis and arranged symmetrically about one of said second diagonal axes, and transfer means attached to one of said first or second chassis and symmetrically arranged along the diagonal axis about which the corresponding first or second module is symmetrically arranged, said first module, said second module and said transfer means arranged asymmetrically with respect to another of said first diagonal axes and said second diagonal axes, whereby said transfer means transfers said workpiece between said first module and said second module over substantially equal distances.
Claim 15
Dependent Claim
136 words
A modular processing apparatus comprising a first chassis having a pair of first diagonal axes, a first module attached to said first chassis and arranged symmetrically about one of said first diagonal axes, a second chassis having a pair of second diagonal axes, a second module attached to said second chassis and arranged symmetrically about one of said second diagonal axes, and transfer means attached to one of said first or second chassis and symmetrically arranged along the diagonal axis about which the corresponding first or second module is symmetrically arranged, said first module, said second module and said transfer means arranged asymmetrically with respect to another of said first diagonal axes and said second diagonal axes, whereby said transfer means transfers said workpiece between said first module and said second module over substantially equal distances.
Claim 16
Dependent Claim
14 words
The modular processing apparatus of claim 12, wherein said workpiece comprises a silicon wafer.
Claim 17
Dependent Claim
31 words
The modular processing apparatus of claim 12, wherein the distance between said first module and said transfer means being equal to the distance between said transfer means and said second module.
Claim 18
Dependent Claim
28 words
The modular processing apparatus of claim 14, further including another of said transfer means attached to another of said first or second chassis for transferring said workpiece therebetween.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-02-01 | 1991-08-03 | 1992-02-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-02-01 | 1995-08-03 | 1996-02-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-02-01 | 1999-08-03 | 2000-02-02 | $7700.00 | Window Closed / Lapsed |