US4720938A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Dressing fixture
Assignee: Speedfam IPEC Corp
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Filing: 1986-07-31
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Granted: 1988-01-26
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Expires: 2006-07-31
Abstract
Abstract A fixture for dressing the polishing surfaces of a platen to maintain it in a planar condition, including a flexible carrier which is adapted to be rotated independently of the rotation of the surface to be dressed, with the carrier providing an opening for the placement therein of a dressing pad. About the edges of the opening there are provided a plurality of driving keys which will engage appropriate edge surfaces of the dressing pad for effecting rotation of the dressing pad with the flexible carrier relative to the surface to be dressed.
Inventors
- 👤 Anatoly Gosis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 15:10
CPC Classifications
B; B24; B24B; B24B53/00; B24B53/017
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
220 words
A fixture for dressing the surface of a circular platen mounted for rotation about a vertical axis comprising; (a) a substantially flat flexible circular carrier formed from a relatively thin material adapted to be placed upon the surface of the circular platen to be dressed, (b) said carrier provided with a central opening for receiving a surface dressing member within its periphery, (c) a substantially flat surface dressing member having a thickness greater than said circular carrier and a configuration corresponding to said center opening and of a size equal to said center opening so as to occupy the entire center opening so that one of its flat surfaces has full facial engagement with the surface to be dressed, (d) said dressing member being made from a metallic material and having it's full flat surfaces formed to provide a rasp face, (e) means for rotating said carrier and said dressing member about its vertical axis independently of the rotation of the surface to be dressed, and (f) a series of retaining blocks mounted on the exposed surface of said carrier each providing a substantially straight edge adapted to contact the exposed edges of said dressing member for drivingly rotating said dressing member with said carrier as said carrier is rotated about its vertical axis relative to the surface being dressed.
Claim 2
Dependent Claim
220 words
A fixture for dressing the surface of a circular platen mounted for rotation about a vertical axis comprising; (a) a substantially flat flexible circular carrier formed from a relatively thin material adapted to be placed upon the surface of the circular platen to be dressed, (b) said carrier provided with a central opening for receiving a surface dressing member within its periphery, (c) a substantially flat surface dressing member having a thickness greater than said circular carrier and a configuration corresponding to said center opening and of a size equal to said center opening so as to occupy the entire center opening so that one of its flat surfaces has full facial engagement with the surface to be dressed, (d) said dressing member being made from a metallic material and having it's full flat surfaces formed to provide a rasp face, (e) means for rotating said carrier and said dressing member about its vertical axis independently of the rotation of the surface to be dressed, and (f) a series of retaining blocks mounted on the exposed surface of said carrier each providing a substantially straight edge adapted to contact the exposed edges of said dressing member for drivingly rotating said dressing member with said carrier as said carrier is rotated about its vertical axis relative to the surface being dressed.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-01-25 | 1991-07-27 | 1992-01-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-01-25 | 1995-07-27 | 1996-01-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-01-25 | 1999-07-27 | 2000-01-26 | $7700.00 | Window Closed / Lapsed |