US4717587A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of producing metallic structures on non-conductors
Assignee: Atotech Deutschland GmbH and Co KG
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Filing: 1986-03-17
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Granted: 1988-01-05
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Expires: 2006-03-17
Abstract
Abstract A method of producing electrically conductive structures on non-conductors, in which the deposition of metallic films on non-conductive substrates is carried out by disintegration of metallo-organic compositions in a glow discharge zone of a plasma reactor.
Inventors
- 👤 Harald Suhr
- 👤 Christian Oehr
- 👤 Ernst Feurer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 05:31
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/06; C23C16/18; H; H05; H05K; H05K3/00; H05K3/10; H05K3/14; H05K3/146; H05K3/22; H05K3/24; H05K2201/00; H05K2201/03; H05K2201/0332; H05K2201/0335; H05K2201/0347
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
83 words
A method of producing electrically-conductive structures on non-conductors, comprising the steps of providing a plasma reactor having a glow discharge zone; placing said non-conductors on an electrode of said plasma reactor; evacuating said plasma reactor to a given pressure; and then feeding into said glow discharge zone metallo-organic compositions together with a carrier inert gas so that a metallic film is deposited on said non-conductors by disintegration of metallo-organic compositions in said glow discharge zone, said carrier inert gas being argon or helium.
Claim 2
Independent Claim
83 words
A method of producing electrically-conductive structures on non-conductors, comprising the steps of providing a plasma reactor having a glow discharge zone; placing said non-conductors on an electrode of said plasma reactor; evacuating said plasma reactor to a given pressure; and then feeding into said glow discharge zone metallo-organic compositions together with a carrier inert gas so that a metallic film is deposited on said non-conductors by disintegration of metallo-organic compositions in said glow discharge zone, said carrier inert gas being argon or helium.
Claim 3
Dependent Claim
26 words
The method as defined in claim 1, wherein the metallic film, obtained in the glow discharge zone,is reinforced in a bath for a chemically-reductive metal deposition.
Claim 4
Dependent Claim
22 words
The method as defined in claim 2, wherein the reinforcing of the metallic film is carried out in a chemically-reductive copper bath.
Claim 5
Dependent Claim
22 words
The method as defined in claim 2, wherein the reinforcing of said metallic film is carried out in a chemically-reductive nickel bath.
Claim 6
Dependent Claim
26 words
The method as defined in claim 1, wherein said structures are pre-shaped before a treatment in said plasma reactor by application to said non-conductors of masks.
Claim 7
Dependent Claim
27 words
The method as defined in claim 1, wherein said structures are pre-shaped before a treatment in said plasma reactor by covering said non-conductors with screen printing lacquers.
Claim 8
Dependent Claim
26 words
The method as defined in claim 1, wherein said structures are pre-shaped before a treatment in said plasma reactor by covering said non-conductors with photo-sensitive lacquers.
Claim 9
Dependent Claim
23 words
The method as defined in claim 1, wherein said structures are made after a treatment in said plasma reactor by means of photoresistors.
Claim 10
Dependent Claim
24 words
The method as defined in claim 1, wherein said structures are made after a treatment in said plasma reactor by means of photo-sensitive lacquers.
Claim 11
Dependent Claim
25 words
The method as defined in claim 1, wherein said structures are made after a treatment in said plasma reactor by means of screen printing lacquers.
Claim 12
Dependent Claim
18 words
The method as defined in claim 1, wherein organic copper compositions are used for depositing a metallic film.
Claim 13
Dependent Claim
18 words
The method as defined in claim 1, wherein organic tin compositions are used for depositing a metallic film.
Claim 14
Dependent Claim
18 words
The method as defined in claim 1, wherein organic palladium compositions are used for depositing a metallic film.
References Cited (Backward Citations)
US2919207A
Cited
US3243363A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-01-04 | 1991-07-06 | 1992-01-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-01-04 | 1995-07-06 | 1996-01-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-01-04 | 1999-07-06 | 2000-01-05 | $7700.00 | Window Closed / Lapsed |