US4716331A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrically variable piezoelectric hybrid capacitor
Assignee: Motorola Solutions Inc
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Filing: 1987-03-13
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Granted: 1987-12-29
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Expires: 2007-03-13
Abstract
Abstract An electrically variable three terminal monomorphic piezoelectric capacitor is manufactured with thick or thin film hybrid microelectronic circuit technology. A first capacitor plate and a ridge, which substantially surrounds and extends above the first capacitor plate, are formed on the surface of a substrate. A monomorphic piezoelectric wafer having a control plate and a second capacitor plate on opposing surfaces is bonded to the upper surface of the ridge. During bonding, a force is applied at the center of the wafer which fixes a permanent bow in the wafer in the direction of the first capacitor plate. A four terminal monomorphic embodiment and three and four terminal bimorphic embodiments are also described.
Inventors
- 👤 Robert J. Higgins, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 11:55
CPC Classifications
H; H01; H01G; H01G5/00; H01G5/16; H01G5/18; Y; Y10; Y10T; Y10T29/00; Y10T29/42; Y10T29/43
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
96 words
An electrically variable piezoelectric hybrid microelectronic circuit capacitor, comprising in combination: a substrate; a first capacitor plate formed on a surface of said substrate; a ridge formed by a hybrid microelectronic circuit manufacturing process on said surface of said substrate, said ridge having an upper surface positioned a predetermined distance above said first capacitor plate; an arch or dome shaped piezoelectric wafer connected to said upper surface of said ridge; a second capacitor plate formed on a first surface of said piezoelectric wafer; a first control plate formed on a second surface of said piezoelectric wafer.
Claim 2
Dependent Claim
96 words
An electrically variable piezoelectric hybrid microelectronic circuit capacitor, comprising in combination: a substrate; a first capacitor plate formed on a surface of said substrate; a ridge formed by a hybrid microelectronic circuit manufacturing process on said surface of said substrate, said ridge having an upper surface positioned a predetermined distance above said first capacitor plate; an arch or dome shaped piezoelectric wafer connected to said upper surface of said ridge; a second capacitor plate formed on a first surface of said piezoelectric wafer; a first control plate formed on a second surface of said piezoelectric wafer.
Claim 3
Dependent Claim
155 words
An electrically variable piezoelectric hybrid microelectronic circuit capacitor, comprising in combination: a ceramic substrate; a first capacitor plate formed on a surface of said ceramic substrate; a substantially circular supporting ridge formed by a hybrid microelectronic circuit manufacturing process on said surface of said ceramic substrate, said ridge having an upper surface positioned a predetermined distance above said first capacitor plate; a substantially dome shaped piezoelectric wafer having a convex surface adjacent said first capacitor plate and a concave surface opposed to said convex surface, said wafer being connected to said upper surface of said ridge at the perimeter of said wafer; a second capacitor plate formed on said convex surface of said piezoelectric wafer; and a control plate formed on said concave surface of said piezoelectric wafer; whereby, the capacitance between said first and second capacitor plates is a function of the control voltage applied between said control plate and said second capacitor plate.
Claim 4
Dependent Claim
155 words
An electrically variable piezoelectric hybrid microelectronic circuit capacitor, comprising in combination: a ceramic substrate; a first capacitor plate formed on a surface of said ceramic substrate; a substantially circular supporting ridge formed by a hybrid microelectronic circuit manufacturing process on said surface of said ceramic substrate, said ridge having an upper surface positioned a predetermined distance above said first capacitor plate; a substantially dome shaped piezoelectric wafer having a convex surface adjacent said first capacitor plate and a concave surface opposed to said convex surface, said wafer being connected to said upper surface of said ridge at the perimeter of said wafer; a second capacitor plate formed on said convex surface of said piezoelectric wafer; and a control plate formed on said concave surface of said piezoelectric wafer; whereby, the capacitance between said first and second capacitor plates is a function of the control voltage applied between said control plate and said second capacitor plate.
Claim 5
Dependent Claim
13 words
The capacitor of claim 1 wherein said ridge is tooled in said substrate.
Claim 6
Dependent Claim
13 words
The capacitor of claim 1 wherein said ridge is sputtered on said substrate.
Claim 7
Dependent Claim
13 words
The capacitor of claim 1 wherein said ridge is vacuum-deposited on said substrate.
Claim 8
Dependent Claim
13 words
The capacitor of claim 1 wherein said ridge is electroplated on said substrate.
Claim 9
Dependent Claim
13 words
The capacitor of claim 1 wherein said ridge is screened on said substrate.
Claim 10
Dependent Claim
17 words
The capacitor of claim 1 wherein said ridge is a preformed glass ring bonded to said substrate.
Claim 11
Dependent Claim
19 words
The capacitor of claim 1 further comprising a second control plate on said first surface of said piezoelectric wafer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-12-28 | 1991-06-29 | 1991-12-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-12-28 | 1995-06-29 | 1995-12-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-12-28 | 1999-06-29 | 1999-12-29 | $7700.00 | Window Closed / Lapsed |