US4715940A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Mask for patterning electrode structures in thin film EL devices
Assignee: Osram Sylvania Inc
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Filing: 1985-10-23
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Granted: 1987-12-29
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Expires: 2005-10-23
Abstract
Abstract A shadow mask is provided which can provide a precise patterning to a deposit at process temperature without destruction of the shadow mask itself. The shadow mask consists of a plurality of metallic strips having a series of interconnecting small arched bridges that hold the strips of the mask together. The shadow mask is used in a process for depositing electrode structures in an electroluminescent device wherein the mask is positioned over a substrate surface to be coated and deposit electrode material is sprayed from a geometrically broad source, through the mask and onto the substrate. Deposition occurs beneath the arched bridges resulting in a pattern deposition that does not readily reveal the presence of bridges because sufficient material is coated beneath to provide cosmetic and electrical continuity between areas separated by the bridges. This invention is particularly suited for a mask designed to provide a fine pattern of closely spaced parallel lines or electrode structures.
Inventors
- 👤 Robert A. Boudreau
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 09:30
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/45; C04B41/4572; C04B41/80; C04B41/81; C23; C23C; C23C14/00; C23C14/04; C23C14/042; C23C16/00; C23C16/04; C23C16/042; H; H05; H05B; H05B33/00; H05B33/12; H05B33/26; H05B33/28; C04B2111/00; C04B2111/00474; C04B2111/00844; H05K; H05K3/00; H05K3/10; H05K3/14; H05K3/143
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
173 words
A mask for the patterning of electrode structures for a thin film device having at least a substrate, said mask comprising a plurality of metallic strips which extend across said mask are are substantially parallel to each other, each strip having an equal thickness, T S , and a first major surface and an opposed second major surface, the second surface being adapted for disposition upon solid substrate; a series of metallic interconnecting bridges which extend across said mask and are perpendicular to said strips and said bridges defining a predetermined pattern of elongated apertures having rounded profiles, each of said bridges having an equal thickness, T B , and a first surface and an opposed second surface, the first surface of each bridge and the first major surface of each strip being coplanar, and the thickness, T S , of each strip being greater than the thickness, T B , of each bridge, whereby an opening is provided between the bridge and the substrate when the mask is disposed against the substrate.
Claim 2
Dependent Claim
173 words
A mask for the patterning of electrode structures for a thin film device having at least a substrate, said mask comprising a plurality of metallic strips which extend across said mask are are substantially parallel to each other, each strip having an equal thickness, T S , and a first major surface and an opposed second major surface, the second surface being adapted for disposition upon solid substrate; a series of metallic interconnecting bridges which extend across said mask and are perpendicular to said strips and said bridges defining a predetermined pattern of elongated apertures having rounded profiles, each of said bridges having an equal thickness, T B , and a first surface and an opposed second surface, the first surface of each bridge and the first major surface of each strip being coplanar, and the thickness, T S , of each strip being greater than the thickness, T B , of each bridge, whereby an opening is provided between the bridge and the substrate when the mask is disposed against the substrate.
Claim 3
Dependent Claim
18 words
The mask according to claim 1 wherein each of said strips has a thickness of about 0.005 inch.
Claim 4
Dependent Claim
18 words
The mask according to claim 2 wherein each of said strips has a width of about 0.007 inch.
Claim 5
Dependent Claim
17 words
The mask according to claim 1 wherein said metallic strips have a predetermined center to center pitch.
Claim 6
Dependent Claim
16 words
The mask according to claim 4 wherein said center to center pitch is about 0.015 inch.
Claim 7
Dependent Claim
23 words
The mask according to claim 1 wherein said predetermined pattern of apertures comprise an electrode forming portion and an electrode pad forming portion.
Claim 8
Dependent Claim
22 words
The mask according to claim 6 wherein said electrode forming portion has a predetermined number of electrodes per linear inch forming capability.
Claim 9
Dependent Claim
17 words
The mask according to claim 7 wherein said number of electrodes per linear inch is about 66.
Claim 10
Dependent Claim
28 words
The mask according to claim 6 wherein said electrode pad forming portion has about half the number of apertures as does said electrode forming portion of said mask.
Claim 11
Dependent Claim
18 words
The mask according to claim 9 wherein each of said apertures has a width of about 0.008 inch.
Claim 12
Dependent Claim
15 words
The mask according to claim 1 wherein said thin film device is an electroluminescent device.
Claim 13
Dependent Claim
16 words
The mask of claim 1 wherein each of the metallic strips are of substantially equal width.
Claim 14
Dependent Claim
24 words
The mask of claim 1 wherein the mask further includes a border portion disposed about and in contact with the plurality of metallic strips.
Claim 15
Dependent Claim
15 words
The mask of claim 1 wherein each of the bridges are of substantially equal width.
Claim 16
Dependent Claim
19 words
The mask of claim 14 wherein the width of the bridges is less than the thickness of the strips.
Claim 17
Dependent Claim
24 words
The mask according to claim 14 wherein said bridge width and thickness are in the range of about 0.0015 inch to about 0.0025 inch.
Claim 18
Independent Claim
254 words
A method of depositing a pattern of electrode structures for a thin film device having at least a substrate, said method comprising the steps of: providing a mask having a plurality of metallic strips which extend across said mask that are substantially parallel to each other, each strip having a thickness, T S , and a first major surface and an opposed second major surface, the second surface being adapted for disposition upon said substrate, and a series of metallic interconnecting bridges which extend across said mask that are perpendicular to said strips and are in contact with said strips, said strips and bridges defining a predetermined pattern of elongated apertures having rounded profiles, each of said bridges having a thickness, T B , and a first surface and an opposed second surface, the first surface of each bridge and the first major surface of each strip being coplanar, and the thickness, T S , of each strip being greater than the thickness, T B , of each bridge, whereby an opening is provided between the bridge and the substrate when the mask is disposed against the substrate; positioning said mask against one side of said substrate; positioning a magnet adjacent the side of said substrate opposite said mask such that the second surface of each of said metallic strips is held in operative contact with said substrate; and vacuum depositing electrode material through said apertures of said mask, thereby forming said electrode structures on said substrate, the deposited material having a rounded profile.
Claim 19
Independent Claim
254 words
A method of depositing a pattern of electrode structures for a thin film device having at least a substrate, said method comprising the steps of: providing a mask having a plurality of metallic strips which extend across said mask that are substantially parallel to each other, each strip having a thickness, T S , and a first major surface and an opposed second major surface, the second surface being adapted for disposition upon said substrate, and a series of metallic interconnecting bridges which extend across said mask that are perpendicular to said strips and are in contact with said strips, said strips and bridges defining a predetermined pattern of elongated apertures having rounded profiles, each of said bridges having a thickness, T B , and a first surface and an opposed second surface, the first surface of each bridge and the first major surface of each strip being coplanar, and the thickness, T S , of each strip being greater than the thickness, T B , of each bridge, whereby an opening is provided between the bridge and the substrate when the mask is disposed against the substrate; positioning said mask against one side of said substrate; positioning a magnet adjacent the side of said substrate opposite said mask such that the second surface of each of said metallic strips is held in operative contact with said substrate; and vacuum depositing electrode material through said apertures of said mask, thereby forming said electrode structures on said substrate, the deposited material having a rounded profile.
Claim 20
Dependent Claim
21 words
The method according to claim 17 wherein substantially all of said metallic strips of said mask are of substantially equal width.
Claim 21
Dependent Claim
20 words
The method according to claim 18 wherein said metallic strips of said mask have a predetermined center to center pitch.
Claim 22
Dependent Claim
29 words
The method according to claim 18 wherein substantially all of said bridges of said mask are of substantially equal width, said width being less than said metallic strip thickness.
Claim 23
Dependent Claim
22 words
The method according to claim 17 wherein said pattern of apertures comprise an electrode forming portion and an electrode pad forming portion.
Claim 24
Dependent Claim
25 words
The method according to claim 17 wherein said mask further includes a border portion disposed about and in contact with said plurality of metallic strips.
Claim 25
Dependent Claim
20 words
The method according to claim 17 wherein said step of vacuum depositing includes sputtering, vapor deposition or chemical vapor deposition.
Claim 26
Dependent Claim
16 words
The method according to claim 17 wherein said electrode material includes a transparent electrically conductive material.
Claim 27
Dependent Claim
15 words
The method according to claim 24 wherein said electrically conductive material includes indium tin oxide.
Claim 28
Dependent Claim
14 words
The method according to claim 24 wherein said electrically conductive material includes tin oxide.
Claim 29
Dependent Claim
14 words
The method according to claim 17 wherein said electrode material includes a metallic material.
Claim 30
Dependent Claim
12 words
The method according to claim 27 wherein said metallic material includes aluminum.
Claim 31
Dependent Claim
12 words
The method according to claim 27 wherein said electrode material includes nickel.
Claim 32
Dependent Claim
20 words
The method according to claim 17 wherein said method of depositing said electrode structures is performed in an in-line system.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-12-28 | 1991-06-29 | 1991-12-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-12-28 | 1995-06-29 | 1995-12-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-12-28 | 1999-06-29 | 1999-12-29 | $7700.00 | Window Closed / Lapsed |