US4715764A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Gate valve for wafer processing system
Assignee: Varian Semiconductor Equipment Associates Inc
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Filing: 1986-04-28
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Granted: 1987-12-29
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Expires: 2006-04-28
Abstract
Abstract A modular wafer processing system requires a gate valve of minimum thickness. A gate valve is provided in which the gate is an assymetric wedge on an assymetrically mounted drive shaft.
Inventors
- 👤 Martin A. Hutchinson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 16:56
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0441; H10P72/30; H10P72/33; H10P72/3302; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/136; Y10S414/137; Y10S414/138; Y10S414/139; Y10S414/14; Y10S414/141
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
245 words
A valve comprising: a valve body having a passage therethrough; a valve gate having a first position in which said passage is open and a second position in which a first portion and a second portion of the surface of said valve gate each extend across said passage thereby dividing said passage into a first region and a second region; sealing means, between said valve body and said first portion of said surface of said valve gate when said valve gate is in said second position, for providing a vacuum seal between said first region and said second region, a rotational moment being generated on said valve body by said sealing means being pressed between said first portion of said surface and said valve body when said valve gate is in said second position; means between said second portion of said surface and said valve body when said valve gate is in said second position, for providing a rotational moment opposed to said rotational moment generated on said valve gate by said sealing means being pressed between said first portion of said surface and said valve body when said valve gate is in said second position, said means for providing a rotational moment not providing a vacuum seal between said first region and said second region; and means connected to said valve gate for translating said valve gate from said first position to said second position and from said second position to said first position.
Claim 2
Dependent Claim
245 words
A valve comprising: a valve body having a passage therethrough; a valve gate having a first position in which said passage is open and a second position in which a first portion and a second portion of the surface of said valve gate each extend across said passage thereby dividing said passage into a first region and a second region; sealing means, between said valve body and said first portion of said surface of said valve gate when said valve gate is in said second position, for providing a vacuum seal between said first region and said second region, a rotational moment being generated on said valve body by said sealing means being pressed between said first portion of said surface and said valve body when said valve gate is in said second position; means between said second portion of said surface and said valve body when said valve gate is in said second position, for providing a rotational moment opposed to said rotational moment generated on said valve gate by said sealing means being pressed between said first portion of said surface and said valve body when said valve gate is in said second position, said means for providing a rotational moment not providing a vacuum seal between said first region and said second region; and means connected to said valve gate for translating said valve gate from said first position to said second position and from said second position to said first position.
Claim 3
Dependent Claim
67 words
A valve as in claim 1 wherein said passage through said valve body has a central plane and wherein the orthogonal projection of said second portion of said surface onto said central plane is narrower than the orthogonal projection of said first portion of said surface on said central plane as measured along an axis in said central plane connecting said first region to said second region.
Claim 4
Dependent Claim
22 words
A valve as in claim 2 wherein said first portion includes a planar surface and said second portion includes a planar surface.
Claim 5
Dependent Claim
27 words
A valve as in claim 3 wherein said planar surface of said first portion makes an angle less than or equal to 45° with said central plane.
Claim 6
Dependent Claim
32 words
A valve as in claim 3 wherein said planar surface of said second portion includes a first and a second planar surface, said second planar surface being perpendicular to said central plane.
Claim 7
Dependent Claim
104 words
A valve as in claim 1 wherein said valve gate has a first side and a second side parallel to said first side and wherein said valve gate is the union of a first gate region containing said first portion and said first side and a second gate region containing said second portion and said second side, said first gate region and said second gate region meeting in a common plane parallel to said first side and said second side wherein the distance between said common plane and said second side is less than the distance between said first side and said common plane.
Claim 8
Dependent Claim
26 words
A valve as in claim 6 wherein said first gate region has a trapezoidal cross section and said second gate region has a trapezoidal cross section.
Claim 9
Dependent Claim
20 words
A valve as in claim 6 wherein said second side includes a portion of said second portion of said surface.
Claim 10
Dependent Claim
18 words
A valve as in claim 6 further including bearing means contacting said first side and said second side.
Claim 11
Dependent Claim
18 words
A valve as in claim 1 wherein said means for providing a rotational moment comprises an elastomeric strip.
Claim 12
Dependent Claim
42 words
A valve as in claim 1 wherein said means for translating is positioned so that said rotational moment opposed to said rotational moment generated by said sealing means has the same absolute value as said rotational moment generated by said sealing means.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-12-28 | 1991-06-29 | 1991-12-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-12-28 | 1995-06-29 | 1995-12-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-12-28 | 1999-06-29 | 1999-12-29 | $7700.00 | Window Closed / Lapsed |