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US4712012A Expired / Lapsed US ⏱️ 0.0 years remaining

Charge conversion unit for negative ion source

Assignee: Varian Semiconductor Equipment Associates Inc
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Filing: 1985-07-26
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Granted: 1987-12-08
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Expires: 2005-07-26
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Abstract

Abstract Apparatus for generating negative ions, specifically He - ions. Positive ions at a predetermined energy level from a conventional ion source are directed to a permanent magnet channel that utilizes two, spaced permanent magnet assemblies to analyze the ions and, with double focusing, to direct them to a focal point located in a lithium vapor canal. As the positive ion beam passes through a lithium vapor of constant density in a predetermined volume at the central region of the canal, electrons transfer to the ions and produce He - ions. The canal is constructed to efficiently condense and collect lithium vapor as it escapes the predetermined volume. The beam of negative ions then passes to another permanent magnet assembly that corrects any astigmatism in the emerging beam and that directs the beam, with appropriate optical properties, onto an injection axis for another accelerating structure.

Inventors

  • 👤 Harry Naylor

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 21:10
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/028; G; G21; G21K; G21K1/00; G21K1/14

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 147 words
A charge conversion apparatus for converting positive ions to negative ions by passing the positive ions through a converting material in the vapor state, said apparatus including: A. a supporting structure, B. a housing with a central portion having barriers thereby to form a substantially isothermal volume and apertures in the wall thereof through which the ion beam passes, C. a reservoir at the bottom of said central portion for accumulating the converting material in the liquid state, D. heater means located in the central portion for continuously vaporizing the converting material in the reservoir, E. thermally conductive conical sections extending from said central region thereby to produce a thermal gradient to a supporting structure, and; F. a plurality of transverse baffles within said conical sections, each having an aperture aligned on the beam axis for condensing the vapor, the liquid returning to the reservoir through gravity.
Claim 2
Dependent Claim 147 words
A charge conversion apparatus for converting positive ions to negative ions by passing the positive ions through a converting material in the vapor state, said apparatus including: A. a supporting structure, B. a housing with a central portion having barriers thereby to form a substantially isothermal volume and apertures in the wall thereof through which the ion beam passes, C. a reservoir at the bottom of said central portion for accumulating the converting material in the liquid state, D. heater means located in the central portion for continuously vaporizing the converting material in the reservoir, E. thermally conductive conical sections extending from said central region thereby to produce a thermal gradient to a supporting structure, and; F. a plurality of transverse baffles within said conical sections, each having an aperture aligned on the beam axis for condensing the vapor, the liquid returning to the reservoir through gravity.
Claim 3
Dependent Claim 78 words
A charge conversion apparatus as recited in claim 1 wherein the central portion of said housing is exposed to vacuum and said heater means includes a tube located in said portion extending into the reservoir, said tube being sealed to said central portion to form a vacuum barrier, and a heater assembly located in said tube whereby said heater assembly is external to the vacuum and heat is conducted through the tube into the reservoir for said vaporizing.
Claim 4
Dependent Claim 21 words
A charge conversion apparatus as recited in claim 1 wherein said thermally conductive conical sections are composed of a copper-clad material.
Claim 5
Dependent Claim 18 words
A charge conversion apparatus as recited in claim 1 wherein said conical sections are formed as frusto-conical sections.

References Cited (Backward Citations)

US2816243A Cited
US3395302A Cited
US3617789A Cited
US4616157A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-12-07 1991-06-08 1991-12-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-12-07 1995-06-08 1995-12-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-12-07 1999-06-08 1999-12-08 $7700.00 Window Closed / Lapsed

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