Patent US3910875A successfully refreshed from Google Patents.
US4701347A
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Method for growing patterned metal layers
Assignee: Nokia Bell Labs
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Filing: 1986-04-18
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Granted: 1987-10-20
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Expires: 2006-04-18
Abstract
Abstract Patterned metal growth is obtained on a substrate by illuminating the substrate in the presence of a metal containing molecule adsorbed on the substrate. After initial illumination, the photoreacted molecules catalyze further metal growth without further illumination.
Inventors
- 👤 Gregg S. Higashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 21:59
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/40; H10P14/412; C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/483; H10D; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/0116; Y; Y10; Y10S; Y10S438/00; Y10S438/903
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
97 words
A method of semiconductor device fabrication including the step of forming patterned metal on a surface, said forming step comprising the steps of forming an adsorbed layer of metal containing molecules on said surface from a gaseous atmosphere containing said molecules, said molecules having a partial pressure less than one atmosphere and said surface heated to an elevated temperature; imaging the desired pattern on said substrate by radiation thereby photolytically decomposing said molecules and leaving metal on said surface; and catalytically growing an additional quantity of the same metal from said atmosphere on the photolytically deposited metal.
Claim 2
Independent Claim
97 words
A method of semiconductor device fabrication including the step of forming patterned metal on a surface, said forming step comprising the steps of forming an adsorbed layer of metal containing molecules on said surface from a gaseous atmosphere containing said molecules, said molecules having a partial pressure less than one atmosphere and said surface heated to an elevated temperature; imaging the desired pattern on said substrate by radiation thereby photolytically decomposing said molecules and leaving metal on said surface; and catalytically growing an additional quantity of the same metal from said atmosphere on the photolytically deposited metal.
Claim 3
Dependent Claim
20 words
A method as recited in claim 1 in which said metal containing molecule is a molecule which decomposes surface catalytically.
Claim 4
Dependent Claim
22 words
A method as recited in claim 2 in which said metal is selected from the group consisting of Al, Ti and W.
Claim 5
Dependent Claim
36 words
A method as recited in claim 1 in which said surface comprises at least one material selected from the group consisting of GaAs, SiO 2 , Si, Al, Au, Cr and Al 2 O 3 .
Claim 6
Dependent Claim
13 words
A method as recited in claim 3 in which said metal comprises Al.
Claim 7
Dependent Claim
15 words
A method as recited in claim 5 in which said metal containing molecule comprises triisobutylaluminum.
Claim 8
Dependent Claim
16 words
A method as recited in claim 2 in which said metal is left in irradiated areas.
Claim 9
Dependent Claim
16 words
A method as recited in claim 2 in which said metal is left in non-irradiated areas.
Claim 10
Dependent Claim
21 words
A method as recited in claim 5 in which said surface comprises Al and a portion of multi-level interconnects are formed.
Claim 11
Dependent Claim
21 words
A method as recited in claim 5 in which said Al forms source and drain controls of a field effect transistor.
Claim 12
Dependent Claim
16 words
A method as recited in claim 10 comprising the further step of annealing said deposited Al.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-10-19 | 1991-04-20 | 1991-10-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-10-19 | 1995-04-20 | 1995-10-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-10-19 | 1999-04-20 | 1999-10-20 | $7700.00 | Window Closed / Lapsed |