High-purity nitrogen gas production equipment
Abstract
Abstract There is disclosed a high-purity nitrogen gas production equipment for production of ultra-high-purity nitrogen gas for use in the electronics and other industries, for example in connection with the production of silicon semiconductors. The conventional nitrogen gas production equipment of cryogenic air separation type tends to develop troubles and yields product nitrogen gas only at high cost and in comparatively low purity. The equipment according to the invention is such that a liquid nitrogen storage means (23) is connected via a feeding pipeline (24a) to a column segment (22) of a distillation column (15) which consists of a partial condenser segment (21) having a built-in condenser (21a) and the intermediate-pressure column segment (22) and the cryogenic compressed air supplied into the intermediate-pressure column segment (22) of the distillation column (15) via an air compression means (9) and heat exchange means (13), (14) is further chilled by the liquid nitrogen reflux liquid obtained in said partial condenser segment (21) and the heat of evaporation of the liquid nitrogen supplied from the liquid nitrogen storage means (23). By taking advantage of the difference in boiling point, the nitrogen is withdrawn as an intermediate-pressure gas from a top portion of the column segment (22) while oxygen is retained in liquid state. The resulting intermediate-pressure nitrogen gas is used as product nitrogen gas. By these features, low-cost, high-purity nitrogen gas can be produced without an energy loss due to pressure loss and without machine troubles.
Inventors
- 👤 Akira Yoshino
Bibliographic Details
Claims Analysis
Total Claims: 4References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1990-10-05 | 1991-04-06 | 1991-10-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-10-05 | 1995-04-06 | 1995-10-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-10-05 | 1999-04-06 | 1999-10-06 | $7700.00 | Window Closed / Lapsed |