US4695773A
Expired / Lapsed
US
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Field emission gun electrode geometry for improved focus stability
Assignee: Applied Materials Inc
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Filing: 1984-04-16
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Granted: 1987-09-22
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Expires: 2004-04-16
Abstract
Abstract In field emission systems having beam current regulation by use of modulating field strengths from a control or Wehnelt electrode adjacent the emission electrode, the varying field strengths produce a focus instability of the emitted beam. By the precise spacing of the emission tip, Wehnelt electrode and first accelerating electrode, and by the precise aperture diameters of the Wehnelt and first accelerating electrodes, the beam focus remains stabilized for modulating field strength variations.
Inventors
- 👤 Lee H. Veneklasen
- 👤 Guy G. Yagunoff
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 02:21
CPC Classifications
H; H01; H01J; H01J3/00; H01J3/02; H01J3/021; H01J37/00; H01J37/02; H01J37/04; H01J37/06; H01J37/073
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
232 words
A field emission gun having a coaxial triode electron beam forming structure including: an electron emission source; an accelerating anode having a first axial aperture therethrough, said first aperture having a diameter, D a , the spacing between said emission source and the proximate surface of said accelerating anode having the dimension, L c ; and a Wehnelt electrode between said emission source and said accelerating anode, said Wehnelt having an axial aperture of a diameter, D w , said Wehnelt being responsive to variable beam regulation signals for correspondingly varying the field strength of said emission source to produce a cathode lens effect, and also varying the emission from said source, said Wehnelt being parallel with and spaced from the proximate surface of said accelerating anode by a distance, L w , and producing an electric field with an associated anode lens effect; the dimensions for said D a , L c , D w and L w being selected in relationship to each other to provide focus stability to said field emission gun irrespective of variations in said beam regulation signals, by the placement of said Wehnelt electrode such that electric potential changes on said Wehnelt electrode produce a precise balance of each of said lens associated with said cathode emission source and said anode so that no axial shift in position of the image of said emission source results.
Claim 2
Dependent Claim
232 words
A field emission gun having a coaxial triode electron beam forming structure including: an electron emission source; an accelerating anode having a first axial aperture therethrough, said first aperture having a diameter, D a , the spacing between said emission source and the proximate surface of said accelerating anode having the dimension, L c ; and a Wehnelt electrode between said emission source and said accelerating anode, said Wehnelt having an axial aperture of a diameter, D w , said Wehnelt being responsive to variable beam regulation signals for correspondingly varying the field strength of said emission source to produce a cathode lens effect, and also varying the emission from said source, said Wehnelt being parallel with and spaced from the proximate surface of said accelerating anode by a distance, L w , and producing an electric field with an associated anode lens effect; the dimensions for said D a , L c , D w and L w being selected in relationship to each other to provide focus stability to said field emission gun irrespective of variations in said beam regulation signals, by the placement of said Wehnelt electrode such that electric potential changes on said Wehnelt electrode produce a precise balance of each of said lens associated with said cathode emission source and said anode so that no axial shift in position of the image of said emission source results.
Claim 3
Dependent Claim
37 words
The field emission gun claimed in claim 1 wherein said dimensions for focus stability are substantially equal to: D a =300 microns, L c =1.0 to 1.3 mm, D w =3.0 mm and L w =1.9 mm.
Claim 4
Dependent Claim
77 words
The field emission gun claimed in claims 1 or 2 wherein said first aperture in said accelerating anode extends through the surface of said anode proximate said emisssion source, and wherein the surface of said anode opposite said proximate surface is provided with a second aperture that is coaxial with said first aperture and communicates therewith, said second aperture having a diameter selected to suitably limit the diameter of the electron beam emerging from said accelerating anode.
Claim 5
Dependent Claim
24 words
The field emission gun claimed in claim 3 wherein the electrical polarities of said gun are reversed whereby said gun emits an ion beam.
References Cited (Backward Citations)
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| 3.5 Years (Year 4) | 1990-09-21 | 1991-03-23 | 1991-09-22 | $2000.00 | Window Closed / Lapsed |
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