US4694776A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Step and repeat apparatus
Assignee: CO-OORDINATE TECHNOLOGY Ltd
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Filing: 1985-06-21
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Granted: 1987-09-22
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Expires: 2005-06-21
Abstract
Abstract Step and repeat apparatus used for performance operations upon a generally planar component such as a microprocessor wafer comprises a support for a workpiece, the support being attached by means of an arm to a mechanism adapted to move the support in two dimensions, the arm being pivotally secured to said mechanism at a location remote from the support and lifting means arranged to move the support about the pivot in a plane perpendicular to said two dimensions.
Inventors
- 👤 Rex H. Sandbach
- 👤 Alan Poole
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 23:45
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
126 words
Step and repeat apparatus comprising a support for a workpiece and an arm, said support being attached by means of said arm to a movement control mechanism adapted to move said support in two dimensions, said arm having a pivot end and a movement end opposite said pivot end, said pivot end of said arm being secured to allow said arm to rotate about a horizontal pivotal axis at said pivot end, with said movement end of said arm secured to said movement control mechanism at a location remote from said support, said apparatus further comprising lifting means arranged to move the support about the pivot in a plane perpendicular to said two dimensions, said lifting means positioned substantially at said movement end of said arm.
Claim 2
Dependent Claim
126 words
Step and repeat apparatus comprising a support for a workpiece and an arm, said support being attached by means of said arm to a movement control mechanism adapted to move said support in two dimensions, said arm having a pivot end and a movement end opposite said pivot end, said pivot end of said arm being secured to allow said arm to rotate about a horizontal pivotal axis at said pivot end, with said movement end of said arm secured to said movement control mechanism at a location remote from said support, said apparatus further comprising lifting means arranged to move the support about the pivot in a plane perpendicular to said two dimensions, said lifting means positioned substantially at said movement end of said arm.
Claim 3
Dependent Claim
17 words
Apparatus as claimed in claim 1 the workpiece comprising a carrier for carrying a succession of devices.
References Cited (Backward Citations)
US3143791A
Cited
US4485387A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-09-21 | 1991-03-23 | 1991-09-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-09-21 | 1995-03-23 | 1995-09-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-09-21 | 1999-03-23 | 1999-09-22 | $7700.00 | Window Closed / Lapsed |