US4693799A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for producing plasma polymerized film
Assignee: Fujifilm Holdings Corp
•
Filing: 1986-03-19
•
Granted: 1987-09-15
•
Expires: 2006-03-19
Abstract
Abstract A process for producing a plasma polymerized film, which comprises forming a plasma polymerized film on the surface of a substrate placed in a reaction zone by subjecting an organic compound containing gas to plasma polymerization utilizing low temperature plasma formed by pulse discharging, in which the time for non-discharge condition is at least 1 msec. and the voltage rise time for gas breakdown is not longer than 100 msec. The plasma polymerized film obtained has a small coefficient of friction, high lubricity, durability and heat resistance and is useful as a solid lubricating film, etc.
Inventors
- 👤 Kenji Yanagihara
- 👤 Mituo Kimura
- 👤 Masahiro Niinomi
- 👤 Yasuo Nishikawa
- 👤 Yoshito Mukaida
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 20:03
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/62
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
79 words
A process for producing a plasma polymerized film, which comprises: forming a plasma polymerized film on the surface of a substrate placed in a reaction zone which is not in contact with an electrode by subjecting an organic compound containing gas to plasma polymerization utilizing low temperature plasma formed by pulse discharging, in which the time of the nondischarging condition is at least 1 msec. and the voltage rise time for gas breakdown is not longer than 100 msec.
Claim 2
Dependent Claim
79 words
A process for producing a plasma polymerized film, which comprises: forming a plasma polymerized film on the surface of a substrate placed in a reaction zone which is not in contact with an electrode by subjecting an organic compound containing gas to plasma polymerization utilizing low temperature plasma formed by pulse discharging, in which the time of the nondischarging condition is at least 1 msec. and the voltage rise time for gas breakdown is not longer than 100 msec.
Claim 3
Dependent Claim
29 words
The process according to claim 1, wherein the organic compound is at least one member selected from the group consisting of substituted or unsubstituted hydrocarbon compounds and organometallic compounds.
Claim 4
Dependent Claim
39 words
The process according to claim 1, wherein the organic compound is at least one member selected from the group consisting of alkanes and halogenated alkanes, and the voltage rise time for gas breakdown is 10 nsec. to 5 msec.
Claim 5
Dependent Claim
29 words
The process according to claim 1, wherein the organic compound is a halogenated unsaturated hydrocarbon and the voltage rise time for gas breakdown is 10 nsec. to 5 msec.
Claim 6
Dependent Claim
38 words
The process according to claim 1, wherein the organic compound is at least one member selected from the group consisting of aromatic hydrocarbon compounds and the voltage rise time for gas breakdown is 1 μsec. to 4 msec.
Claim 7
Dependent Claim
39 words
The process according to claim 1, wherein the organic compound is at least one member selected from the group consisting of organic amines and mercaptans and the voltage rise time for gas breakdown is 1 μsec. to 25 μsec.
Claim 8
Dependent Claim
28 words
The process according to claim 1, wherein the organic compound is an organometallic compound and the voltage rise time for gas breakdown is 1 nsec. to 1 μsec.
Claim 9
Dependent Claim
20 words
The process according to claim 1, wherein the voltage rise time for gas breakdown is 10 nsec. to 50 msec.
Claim 10
Dependent Claim
20 words
The process according to claim 1, the time of non-discharge condition in pulse discharging is 1 msec. to 10 sec.
Claim 11
Dependent Claim
26 words
The process according to claim 1, wherein the substrate is a magnetic recording medium substrate having a non-magnetic support and a magnetic recording layer provided thereon.
Claim 12
Dependent Claim
20 words
The process according to claim 1, wherein the plasma polymerized film has a thickness of 3 Å to 1 μm.
Claim 13
Dependent Claim
20 words
The process according to claim 11, wherein the thickness of said plasma polymerized film ranges from 3 to 50 Å.
Claim 14
Dependent Claim
51 words
The process according to claim 1, wherein the electron temperature of the plasma during discharging where the electrodes of the plasma polymerization vessel are about 1 to 3 cm apart in the vertical direction from the surface of the substrate is within the range of 0.5×10 4 to 8×10 4 K.
Claim 15
Dependent Claim
37 words
The process according to claim 1, wherein said organic compound is passed into the plasma polymerization reactor at a flow rate of 0.01 to 500 ml (STP)/min per 100 liters of volume of the plasma polymerization reactor.
References Cited (Backward Citations)
US3471316A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-09-14 | 1991-03-16 | 1991-09-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-09-14 | 1995-03-16 | 1995-09-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-09-14 | 1999-03-16 | 1999-09-15 | $7700.00 | Window Closed / Lapsed |