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US4693546A Expired / Lapsed US ⏱️ 0.0 years remaining

Guided-wave optical power divider

Assignee: United States Department of the Air Force
•
Filing: 1986-02-24
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Granted: 1987-09-15
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Expires: 2006-02-24
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Abstract

Abstract A guided-wave optical power divider having a body made entirely of crystalline silicon and wherein the crossover region of intersecting light guiding channels is doped with a predetermined amount of impurities. By appropriate use of impurities it is possible to create permanent optical power dividers in which a light beam is preselectively directed to follow a preselected path.

Inventors

  • 👤 Joseph P. Lorenzo
  • 👤 Richard A. Soref

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 07:41
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/29; G02F1/31; G02F1/313; G02F1/3137; G02F1/3138

Claims Analysis

Total Claims: 17
Claim 1
Independent Claim 80 words
A guided-wave optical power divider, comprising: a body made up entirely of crystalline silicon; an intersecting channel waveguide structure having a first leg and at least two other legs formed within said silicon body, said legs intersecting to form an intersection crossover region of predetermined size; and said crossover region being doped with a predetermined amount of impurities, said predetermined amount of impurities being sufficient to change the cross-coupling of light between said first leg and said two other legs.
Claim 2
Dependent Claim 80 words
A guided-wave optical power divider, comprising: a body made up entirely of crystalline silicon; an intersecting channel waveguide structure having a first leg and at least two other legs formed within said silicon body, said legs intersecting to form an intersection crossover region of predetermined size; and said crossover region being doped with a predetermined amount of impurities, said predetermined amount of impurities being sufficient to change the cross-coupling of light between said first leg and said two other legs.
Claim 3
Dependent Claim 28 words
A guided-wave optical power divider as defined in claim 1 wherein said predetermined amount of doping impurities within said crossover region is approximately 10 18 impurities/cm 3 .
Claim 4
Dependent Claim 30 words
A guided-wave optical power divider as defined in claim 2 wherein said crystalline silicon body is formed of an epitaxial layer of crystalline silicon grown on a crystalline silicon substrate.
Claim 5
Dependent Claim 29 words
A guided-wave optical power divider as defined in claim 3 wherein said crystalline silicon substrate is doped with impurities in the range of approximately 10 19 cm -3 .
Claim 6
Dependent Claim 31 words
A guided-wave optical power divider as defined in claim 4 wherein said crossover region has the following dimensions: a length of approximately 0.05 cm and a width of approximately 10-14 microns.
Claim 7
Dependent Claim 33 words
A guided-wave optical power divider as defined in claim 5 wherein said doping impurities have a doping depth of approximately 3 microns and said crossover region has a depth of approxixately 6 microns.
Claim 8
Dependent Claim 16 words
A guided-wave optical power divider as defined in claim 4 wherein said doping impurities are phosphorous.
Claim 9
Dependent Claim 16 words
A guided-wave optical power divider as defined in claim 4 wherein said doping impurities are boron.
Claim 10
Dependent Claim 16 words
A guided-wave optical power divider as defined in claim 4 wherein said doping impurities are antimony.
Claim 11
Dependent Claim 16 words
A guided-wave optical power divider as defined in claim 4 wherein said doping impurities are arsenic.
Claim 12
Dependent Claim 16 words
A guided-wave optical power divider as defined in claim 6 wherein said doping impurities are boron.
Claim 13
Dependent Claim 16 words
A guided-wave optical power divider as defined in claim 6 wherein said doping impurities are antimony.
Claim 14
Dependent Claim 16 words
A guided-wave optical power divider as defined in claim 6 wherein said doping impurities are arsenic.
Claim 15
Dependent Claim 20 words
A guided-wave optical power divider as defined in claim 4 wherein said intersection crossover region is of an X-like configuration.
Claim 16
Dependent Claim 33 words
A guided-wave optical power divider as defined in claim 14 wherein said legs are each of the same preselected width and said intersection crossover region has a width approximately twice said preselected width.
Claim 17
Dependent Claim 21 words
A guided-wave optical power divider as defined in claim 4 comprising a plurality of said intersecting channel waveguide structures interconnected together.

References Cited (Backward Citations)

US3810688A Cited
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US4003629A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-09-14 1991-03-16 1991-09-15 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-09-14 1995-03-16 1995-09-15 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-09-14 1999-03-16 1999-09-15 $7700.00 Window Closed / Lapsed

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