US4690872A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ceramic heater
Assignee: Niterra Co Ltd
•
Filing: 1986-06-16
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Granted: 1987-09-01
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Expires: 2006-06-16
Abstract
Abstract A ceramic heater comprising a ceramic substrate is described which has formed thereon a layer of a silicide of an element selected from groups IVa, Va and VIa of the periodic table. The heater has stable temperature vs. resistance characteristics, has high mechanical strength and produces the desired temperature in a very short period of time.
Inventors
- 👤 Norio Kato
- 👤 Shunkichi Nozaki
- 👤 Yukihiro Kimura
- 👤 Rokuro Kambe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:29
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/45; C04B41/50; C04B41/5053; C04B41/5062; C04B41/80; C04B41/81; C04B41/85; C04B41/87; C21; C21B; C21B9/00; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/42; H; H05; H05B; H05B3/00; H05B3/02; H05B3/06
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
57 words
A ceramic heater comprising an alumina or silicon nitride ceramic substrate of high mechanical strength and an electrode through which current is applied attached thereto, wherein said ceramic substrate has formed thereon, by deposition, an electrically conductive layer consisting essentially of a silicide of an element selected from groups IVb, Vb and VIb of the Periodic Table.
Claim 2
Dependent Claim
57 words
A ceramic heater comprising an alumina or silicon nitride ceramic substrate of high mechanical strength and an electrode through which current is applied attached thereto, wherein said ceramic substrate has formed thereon, by deposition, an electrically conductive layer consisting essentially of a silicide of an element selected from groups IVb, Vb and VIb of the Periodic Table.
Claim 3
Dependent Claim
23 words
A ceramic heater as in claim 1 wherein the silicide is that of an element selected from Group VIb of the Periodic Table.
Claim 4
Dependent Claim
15 words
A ceramic heater as in claim 1 wherein the layer is formed of molybdenum silicide.
Claim 5
Dependent Claim
15 words
A ceramic heater as in claim 1 wherein the layer is formed of tungsten silicide.
Claim 6
Dependent Claim
15 words
A ceramic heater as in claim 1, wherein the layer is formed by vapor deposition.
Claim 7
Dependent Claim
16 words
A ceramic heater as in claim 5, wherein the layer is formed by physical vapor deposition.
Claim 8
Dependent Claim
16 words
A ceramic heater as in claim 5, wherein the layer is formed by chemical vapor deposition.
Claim 9
Dependent Claim
23 words
A ceramic heater as claimed in claim 1, wherein said electrically conductive layer has a thickness of from about 2 to 5 μm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-08-31 | 1991-03-02 | 1991-09-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-08-31 | 1995-03-02 | 1995-09-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-08-31 | 1999-03-02 | 1999-09-01 | $7700.00 | Window Closed / Lapsed |