US4690591A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for transporting an article in vacuum
Assignee: Fujitsu Ltd
•
Filing: 1983-05-27
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Granted: 1987-09-01
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Expires: 2003-05-27
Abstract
Abstract A method for transporting an article disposed on an upper surface of a stage in a vacuum. Gas is ejected through a plurality of inclined nozzles formed in the stage so that the article is transported in the direction of inclination of the nozzles.
Inventors
- 👤 Masayasu Nagashima
- 👤 Nobuo Iijima
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 22:49
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/36; B; B65; B65G; B65G51/00; B65G51/02; B65G51/03
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
101 words
A method for transporting an article disposed on an upper surface of a stage, housed in an enclosed chamber, having a plurality of inclined nozzles, said method comprising the steps of: (a) reducing pressure of the enclosed chamber below atmospheric pressure; (b) injecting a gas through the plurality of inclined nozzles formed in the stage housed in the enclosed chamber, while the pressure is maintained below atmospheric pressure, so that the article is transported in the direction of inclination of said inclined nozzles; and (c) treating the article by a chemical reaction with the gas used in said injecting step (b).
Claim 2
Independent Claim
101 words
A method for transporting an article disposed on an upper surface of a stage, housed in an enclosed chamber, having a plurality of inclined nozzles, said method comprising the steps of: (a) reducing pressure of the enclosed chamber below atmospheric pressure; (b) injecting a gas through the plurality of inclined nozzles formed in the stage housed in the enclosed chamber, while the pressure is maintained below atmospheric pressure, so that the article is transported in the direction of inclination of said inclined nozzles; and (c) treating the article by a chemical reaction with the gas used in said injecting step (b).
Claim 3
Dependent Claim
17 words
A method as set forth in claim 1, wherein the upper surface of the stage is horizontal.
Claim 4
Dependent Claim
25 words
A method as set forth in claim 1, wherein the upper surface of the stage is inclined in the direction of transportation of the article.
Claim 5
Independent Claim
81 words
An apparatus for transporting an article in a vacuum, comprising: an enclosed chamber; exhaust means, connected to said enclosed chamber, for maintaining said enclosed chamber in the vacuum; and a stage, located in said enclosed chamber, for supporting the article, said stage including a plurality of inclined nozzles for injecting a gas while pressure in said enclosed chamber is reduced below atmospheric pressure, the article being transported and treated by a chemical reaction with said gas injected from said inclined nozzles.
Claim 6
Independent Claim
81 words
An apparatus for transporting an article in a vacuum, comprising: an enclosed chamber; exhaust means, connected to said enclosed chamber, for maintaining said enclosed chamber in the vacuum; and a stage, located in said enclosed chamber, for supporting the article, said stage including a plurality of inclined nozzles for injecting a gas while pressure in said enclosed chamber is reduced below atmospheric pressure, the article being transported and treated by a chemical reaction with said gas injected from said inclined nozzles.
Claim 7
Dependent Claim
21 words
An apparatus as set forth in claim 4, wherein said stage is inclined in the direction of transportation of the article.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-08-31 | 1991-03-02 | 1991-09-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-08-31 | 1995-03-02 | 1995-09-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-08-31 | 1999-03-02 | 1999-09-01 | $7700.00 | Window Closed / Lapsed |