US4688088A
Expired / Lapsed
US
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Position detecting device and method
Assignee: Canon Inc
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Filing: 1985-04-15
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Granted: 1987-08-18
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Expires: 2005-04-15
Abstract
Abstract An improved method and device for detecting a position of a mark formed on an object, by providing plural peaks in an image density distribution, wherein the image of the object having the mark is picked up to provide an image signal which in turn is processed to provide an integrated image-density distribution of the image in a predetermined direction and wherein the position of the mark is detected on the basis of the plural peaks in the integrated image-density distribution.
Inventors
- 👤 Bunei Hamazaki
- 👤 Naoki Ayata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:56
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7088; B; B23; B23Q; B23Q15/00; B23Q15/20; B23Q15/22; G03F9/7073; G03F9/7076
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
87 words
A device for detecting a mark having edges, said device comprising: image pickup means for picking up an image of the mark and producing an image signal corresponding thereto; extracting means having an extracting level for extracting a component from the image signal, each extracted component having a predetermined relation to the extracting level; and control means for controlling the extracting level in accordance with the width and the number of the signal components extracted, so as to obtain signals corresponding to the edges of the mark.
Claim 2
Independent Claim
87 words
A device for detecting a mark having edges, said device comprising: image pickup means for picking up an image of the mark and producing an image signal corresponding thereto; extracting means having an extracting level for extracting a component from the image signal, each extracted component having a predetermined relation to the extracting level; and control means for controlling the extracting level in accordance with the width and the number of the signal components extracted, so as to obtain signals corresponding to the edges of the mark.
Claim 3
Dependent Claim
42 words
A device according to claim 1, wherein said image pickup means includes an area sensor having plural picture elements and signal forming means adapted to accumulate the outputs of said picture elements in a predetermined direction to thereby form the image signal.
Claim 4
Dependent Claim
29 words
A device according to claim 1, wherein said extracting means is arranged for binary-coding the image signal with respect to the extracting level to thereby extract the signal component.
Claim 5
Dependent Claim
47 words
A device according to claim 1, wherein said control means is arranged first to temporally determine the extracting level in accordance with a total width of the signal component extracted, and then to determine the extracting level in accordance with the number of the extracted signal components.
Claim 6
Independent Claim
122 words
A method for detecting a mark having edges, the method comprising the steps of: picking up an image of the mark and producing an image signal corresponding thereto; extracting a component from the image signal, each extracted component having a predetermined relation with an extracting level; and controlling the extracting level in a first operation so that a signal component substantially of a predetermined width is obtained as a result of extraction with the controlled extracting level, and then controlling the extracting level in a second operation so that a predetermined number of signal components is obtained as a result of extraction with the controlled extracting level, such that signals corresponding to the edges of the mark are obtained by the extraction.
Claim 7
Independent Claim
122 words
A method for detecting a mark having edges, the method comprising the steps of: picking up an image of the mark and producing an image signal corresponding thereto; extracting a component from the image signal, each extracted component having a predetermined relation with an extracting level; and controlling the extracting level in a first operation so that a signal component substantially of a predetermined width is obtained as a result of extraction with the controlled extracting level, and then controlling the extracting level in a second operation so that a predetermined number of signal components is obtained as a result of extraction with the controlled extracting level, such that signals corresponding to the edges of the mark are obtained by the extraction.
Claim 8
Dependent Claim
46 words
A method according to claim 5, further comprising the step of detecting a position of the mark on the basis of the signals corresponding to the edges of the mark, when a signal component of substantially the predetermined width and of the predetermined number is obtained.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-08-17 | 1991-02-16 | 1991-08-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-08-17 | 1995-02-16 | 1995-08-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-08-17 | 1999-02-16 | 1999-08-18 | $7700.00 | Window Closed / Lapsed |