US4687541A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Dual deposition single level lift-off process
Assignee: Teledyne Scientific and Imaging LLC
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Filing: 1986-09-22
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Granted: 1987-08-18
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Expires: 2006-09-22
Abstract
Abstract A dual deposition liftoff process is provided for obtaining clearly defined, planar integrated circuit pattern definition. After developing a photoresist pattern on a substrate, a thin layer of sealing material which is compatible with the integrated circuit is deposited over the photoresist and the uncovered portions of the substrate. The sidewalls of the photoresist are then etched, thereby undercutting the sealing material and forming a lip which overhangs the sidewalls. A second layer of material is deposited on top of the thin layer to provide the required thickness for the integrated circuit. The overhanging lip protects the sidewalls from deposition and thus a good liftoff of the photoresist with its overlying layers is obtained.
Inventors
- 👤 James W. Penney
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 21:33
CPC Classifications
H; H10; H10P; H10P76/00; H10P76/20; H10P76/202; G; G03; G03F; G03F7/00; G03F7/26; G03F7/40; H05; H05K; H05K3/00; H05K3/10; H05K3/14; H05K3/143; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948; Y10S438/951
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
162 words
A dual deposition liftoff process for forming a pattern of an integrated circuit on a substrate, comprising the steps of: applying a photoresist to the substrate; exposing the photoresist to an image of the pattern; developing the photoresist to remove exposed portions of the photoresist and thereby form sidewalls which define the pattern on the substrate; depositing a thin layer of sealing material on top of the remaining photoresist and on uncovered portions of the substrate, the sealing material being suitable for incorporation into the integrated circuit; exposing the photoresist to an etchant whereby the sidewalls of the photoresist are etched and the thin layer of sealing material is undercut, thus forming a lip which overhangs the sidewall; depositing a layer of integrated circuit material on top of the thin layer but not on the sidewalls which are protected from deposition by the overhanging lip; and lifting off the photoresist with its overlying thin layer and its layer of integrated circuit material.
Claim 2
Dependent Claim
162 words
A dual deposition liftoff process for forming a pattern of an integrated circuit on a substrate, comprising the steps of: applying a photoresist to the substrate; exposing the photoresist to an image of the pattern; developing the photoresist to remove exposed portions of the photoresist and thereby form sidewalls which define the pattern on the substrate; depositing a thin layer of sealing material on top of the remaining photoresist and on uncovered portions of the substrate, the sealing material being suitable for incorporation into the integrated circuit; exposing the photoresist to an etchant whereby the sidewalls of the photoresist are etched and the thin layer of sealing material is undercut, thus forming a lip which overhangs the sidewall; depositing a layer of integrated circuit material on top of the thin layer but not on the sidewalls which are protected from deposition by the overhanging lip; and lifting off the photoresist with its overlying thin layer and its layer of integrated circuit material.
Claim 3
Dependent Claim
22 words
The process as claimed in claim 1 wherein the integrated circuit material is a metal and the sealing material is a metal.
Claim 4
Dependent Claim
22 words
The process as claimed in claim 1, wherein the integrated circuit material is a dielectric and the sealing material is a dielectric.
Claim 5
Dependent Claim
20 words
The process as claimed in claim 1, wherein the substrate is selected from the group consisting of GaAs and silicon.
Claim 6
Dependent Claim
24 words
The process as claimed in claim 1, wherein the thin layer has a thickness within the range of about 15 angstroms to 1000 angstroms.
Claim 7
Dependent Claim
17 words
The process as claimed in claim 1, wherein the thin layer is deposited by physical vapor deposition.
Claim 8
Dependent Claim
15 words
The process as claimed in claim 1, wherein the thin layer is deposited by sputtering.
Claim 9
Dependent Claim
25 words
The process as claimed in claim 1, wherein the step of exposing the photoresist to an etchant comprises exposing the photoresist to an oxygen plasma.
Claim 10
Dependent Claim
24 words
The process as claimed in claim 8, wherein the step of exposing the photoresist to an oxygen plasma is accomplished in a planar etcher.
Claim 11
Dependent Claim
25 words
The process as claimed in claim 8, wherein the step of exposing the photoresist to an oxygen plasma is accomplished in a reactive ion etcher.
Claim 12
Dependent Claim
14 words
The process as claimed in claim 1, wherein the image is a light image.
Claim 13
Dependent Claim
15 words
The process as claimed in claim 1, wherein the image is an electron beam image.
Claim 14
Dependent Claim
15 words
The process as claimed in claim 1, wherein the image is an x-ray lithography image.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-08-17 | 1991-02-16 | 1991-08-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-08-17 | 1995-02-16 | 1995-08-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-08-17 | 1999-02-16 | 1999-08-18 | $7700.00 | Window Closed / Lapsed |