US4685975A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for edge cleaning
Assignee: Texas Instruments Inc
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Filing: 1986-02-27
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Granted: 1987-08-11
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Expires: 2006-02-27
Abstract
Abstract Method for cleaning material from the outer edge of an object by applying a solvent for the material to a flat surface adjacent the edge and moving the solvent onto the edge by centrifugal force.
Inventors
- 👤 Rickie A. Kottman
- 👤 Robert E. Terrill
- 👤 Ann E. Wise
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 01:46
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/16; G03F7/26; G03F7/30; G03F7/3021
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
120 words
A method for removing a deposit of material from an outer convex edge of an object having a substantially flat surface adjacent said edge comprising the steps of: (a) providing a solvent at the outlet end of a nozzle in the form of a convex shaped reservoir created by surface tension forces of said solvent sufficiently close to said substantially flat surface to enable solvent transfer thereto; (b) spinning said object; (c) transferring the solvent to said substantially flat surface by direct contact between the convex shaped reservoir located at the nozzle outlet and the spinning object; (d) continuing the spinning of said object to bring the transferred solvent into contact with said edge to thereby remove said material deposit.
Claim 2
Independent Claim
120 words
A method for removing a deposit of material from an outer convex edge of an object having a substantially flat surface adjacent said edge comprising the steps of: (a) providing a solvent at the outlet end of a nozzle in the form of a convex shaped reservoir created by surface tension forces of said solvent sufficiently close to said substantially flat surface to enable solvent transfer thereto; (b) spinning said object; (c) transferring the solvent to said substantially flat surface by direct contact between the convex shaped reservoir located at the nozzle outlet and the spinning object; (d) continuing the spinning of said object to bring the transferred solvent into contact with said edge to thereby remove said material deposit.
Claim 3
Dependent Claim
25 words
The method of claim 1 further comprising locating said nozzle at a bottom surface of said object to deliver said solvent to said bottom surface.
Claim 4
Dependent Claim
15 words
The method of claim 1 further comprising providing said solvent under pressure to said nozzle.
Claim 5
Dependent Claim
26 words
The method of claim 1 wherein said step of providing said solvent comprises providing said solvent at a rate of approximately 100 cubic centimeters per minute.
Claim 6
Dependent Claim
16 words
The method of claim 1 further comprising locating said nozzle approximately 0.010 inches from said object.
Claim 7
Dependent Claim
16 words
The method of claim 1 further comprising providing a slot in said nozzle for solvent delivery.
Claim 8
Dependent Claim
23 words
The method of claim 8 further comprising providing a spillway adjacent said slot to prevent excess fluid from building up above said slot.
Claim 9
Dependent Claim
13 words
The method of claim 1 wherein said object is a monocrystalline semiconductor wafer.
Claim 10
Dependent Claim
15 words
The method of claim 1 wherein said material removed from said object is a resist.
Claim 11
Independent Claim
137 words
A method for preventing the deposit of a liquid on an outer convex edge of an object having a substantially flat surface adjacent said edge comprising the steps of: (a) providing a solvent at the outlet end of a nozzle in the form of a convex shaped reservoir created by surface tension forces of said solvent sufficiently close to said substantially flat surface to enable solvent transfer thereto; (b) spinning said object while depositing the liquid onto a surface of said object opposite said substantially flat surface; (c) transferring the solvent to said substantially flat surface by direct contact between the convex shaped reservoir located at the nozzle outlet and the spinning object; (d) continuing the spinning of said object to bring the transferred solvent into contact with said edge to prevent the liquid from depositing thereon.
Claim 12
Independent Claim
137 words
A method for preventing the deposit of a liquid on an outer convex edge of an object having a substantially flat surface adjacent said edge comprising the steps of: (a) providing a solvent at the outlet end of a nozzle in the form of a convex shaped reservoir created by surface tension forces of said solvent sufficiently close to said substantially flat surface to enable solvent transfer thereto; (b) spinning said object while depositing the liquid onto a surface of said object opposite said substantially flat surface; (c) transferring the solvent to said substantially flat surface by direct contact between the convex shaped reservoir located at the nozzle outlet and the spinning object; (d) continuing the spinning of said object to bring the transferred solvent into contact with said edge to prevent the liquid from depositing thereon.
Claim 13
Dependent Claim
25 words
The method of claim 13 further comprising locating said nozzle at a bottom surface of said object to deliver said solvent to said bottom surface.
Claim 14
Dependent Claim
25 words
The method of claim 13 further comprising locating said nozzle at a top surface of said object to deliver said solvent to said top surface.
Claim 15
Dependent Claim
15 words
The method of claim 13 further comprising providing said solvent under pressure to said nozzle.
Claim 16
Dependent Claim
26 words
The method of claim 13 wherein said step of providing said solvent comprises providing said solvent at a rate of approximately 100 cubic centimeters per minute.
Claim 17
Dependent Claim
16 words
The method of claim 13 further comprising locating said nozzle approximately 0.010 inches from said object.
Claim 18
Dependent Claim
31 words
The method of claim 13 further comprising providing cam action providing means for moving the nozzle with respect to the object to compensate for shape variations in the of the object.
Claim 19
Dependent Claim
16 words
The method of claim 13 further comprising providing a slot in said nozzle for solvent delivery.
Claim 20
Dependent Claim
23 words
The method of claim 20 further comprising providing a spillway adjacent said slot to prevent excess fluid from building up above said slot.
Claim 21
Dependent Claim
13 words
The method of claim 13 wherein said object is a monocrystalline semiconductor wafer.
Claim 22
Dependent Claim
15 words
The method of claim 13 wherein said material removed from said object is a resist.
Claim 23
Dependent Claim
26 words
The method of claim 13 wherein said step of spinning said object comprises spinning said object at a speed of between 2,000 RPM and 6,000 RPM.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-08-10 | 1991-02-09 | 1991-08-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-08-10 | 1995-02-09 | 1995-08-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-08-10 | 1999-02-09 | 1999-08-11 | $7700.00 | Window Closed / Lapsed |