US4682500A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Pressure sensitive element
Assignee: Sharp Corp
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Filing: 1986-04-07
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Granted: 1987-07-28
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Expires: 2006-04-07
Abstract
Abstract A pressure sensitive element having a pair of light reflecting thin films formed through a thin film producing process and composing a Fabry-Perot resonator which is arranged so as to face a light transmitting system, and a diaphragm laminated on the light reflecting thin films, wherein an optical path difference is formed in accordance with an interval of an air gap located between the pairs of light reflecting thin films, while the interval of the air gap changes by the deformation of the diaphragm.
Inventors
- 👤 Kazutaka Uda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 17:24
CPC Classifications
G; G01; G01L; G01L9/00; G01L9/0041; G01L9/0076; G01L9/0077; G01L9/0079; G02; G02B; G02B26/00; G02B26/001
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
88 words
A pressure sensitive element which comprises: a pair of light reflecting thin films formed through a thin film producing process and composing a Fabry-Perot resonator which is arranged so as to face a light transmitting system; and a pressure deforming member laminated on said light reflecting thin films; wherein an optical path difference is formed in accordance with an interval of an air gap located between said pairs of light reflecting thin films, said interval of said air gap changing by the deformation of said pressure deforming member.
Claim 2
Dependent Claim
88 words
A pressure sensitive element which comprises: a pair of light reflecting thin films formed through a thin film producing process and composing a Fabry-Perot resonator which is arranged so as to face a light transmitting system; and a pressure deforming member laminated on said light reflecting thin films; wherein an optical path difference is formed in accordance with an interval of an air gap located between said pairs of light reflecting thin films, said interval of said air gap changing by the deformation of said pressure deforming member.
Claim 3
Independent Claim
108 words
A method of manufacturing a pressure sensitive element, which comprises the steps of: forming a pair of light reflecting thin films which compose a Fabry-Perot resonator arranged so as to face a light transmitting system, on a base plate through a thin film producing process; and laminating a pressure deforming member on said light reflecting thin films through another thin film producing process; whereby an optical path difference is formed in said pressure sensitive element in accordance with an interval of an air gap located between said pairs of light reflecting thin films, said interval of said air gap changing by the deformation of said pressure deforming member
Claim 4
Independent Claim
108 words
A method of manufacturing a pressure sensitive element, which comprises the steps of: forming a pair of light reflecting thin films which compose a Fabry-Perot resonator arranged so as to face a light transmitting system, on a base plate through a thin film producing process; and laminating a pressure deforming member on said light reflecting thin films through another thin film producing process; whereby an optical path difference is formed in said pressure sensitive element in accordance with an interval of an air gap located between said pairs of light reflecting thin films, said interval of said air gap changing by the deformation of said pressure deforming member
Claim 5
Dependent Claim
15 words
The pressure sensitive element of claim 1, wherein said light transmitting system is a fiber.
Claim 6
Dependent Claim
16 words
The pressure sensitive element of claim 1, wherein said light transmitting system is a rod lens.
References Cited (Backward Citations)
US4329058A
Cited
US4408123A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-07-27 | 1991-01-26 | 1991-07-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-07-27 | 1995-01-26 | 1995-07-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-07-27 | 1999-01-26 | 1999-07-28 | $7700.00 | Window Closed / Lapsed |